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GB2470714B - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
GB2470714B
GB2470714B GB0906030A GB0906030A GB2470714B GB 2470714 B GB2470714 B GB 2470714B GB 0906030 A GB0906030 A GB 0906030A GB 0906030 A GB0906030 A GB 0906030A GB 2470714 B GB2470714 B GB 2470714B
Authority
GB
United Kingdom
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0906030A
Other versions
GB0906030D0 (en
GB2470714A (en
Inventor
Eric Atherton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SENICO Ltd
Original Assignee
SENICO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SENICO Ltd filed Critical SENICO Ltd
Priority to GB0906030A priority Critical patent/GB2470714B/en
Publication of GB0906030D0 publication Critical patent/GB0906030D0/en
Publication of GB2470714A publication Critical patent/GB2470714A/en
Application granted granted Critical
Publication of GB2470714B publication Critical patent/GB2470714B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
GB0906030A 2009-04-07 2009-04-07 Pressure sensor Expired - Fee Related GB2470714B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0906030A GB2470714B (en) 2009-04-07 2009-04-07 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0906030A GB2470714B (en) 2009-04-07 2009-04-07 Pressure sensor

Publications (3)

Publication Number Publication Date
GB0906030D0 GB0906030D0 (en) 2009-05-20
GB2470714A GB2470714A (en) 2010-12-08
GB2470714B true GB2470714B (en) 2014-03-12

Family

ID=40750254

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0906030A Expired - Fee Related GB2470714B (en) 2009-04-07 2009-04-07 Pressure sensor

Country Status (1)

Country Link
GB (1) GB2470714B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140174188A1 (en) * 2012-12-21 2014-06-26 Pfeiffer Vacuum Gmbh Device for Measuring a Pressure with at Least One Pressure Sensor Having at Least One Active Sensor Surface

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5781141A (en) * 1995-10-20 1998-07-14 Denso Corporation Digital-to-analog converter and sensor-characteristic adjustment circuit
JP2000341127A (en) * 1999-05-26 2000-12-08 Matsushita Electric Works Ltd D/a converter and pressure sensor circuit using the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5781141A (en) * 1995-10-20 1998-07-14 Denso Corporation Digital-to-analog converter and sensor-characteristic adjustment circuit
JP2000341127A (en) * 1999-05-26 2000-12-08 Matsushita Electric Works Ltd D/a converter and pressure sensor circuit using the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140174188A1 (en) * 2012-12-21 2014-06-26 Pfeiffer Vacuum Gmbh Device for Measuring a Pressure with at Least One Pressure Sensor Having at Least One Active Sensor Surface
US9410862B2 (en) * 2012-12-21 2016-08-09 Pfeiffer Vacuum Gmbh Device for measuring a pressure with at least one pressure sensor having at least one active sensor surface

Also Published As

Publication number Publication date
GB0906030D0 (en) 2009-05-20
GB2470714A (en) 2010-12-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20170407