GB2454793B - Assignment of particles to processes of origin - Google Patents
Assignment of particles to processes of originInfo
- Publication number
- GB2454793B GB2454793B GB0820835A GB0820835A GB2454793B GB 2454793 B GB2454793 B GB 2454793B GB 0820835 A GB0820835 A GB 0820835A GB 0820835 A GB0820835 A GB 0820835A GB 2454793 B GB2454793 B GB 2454793B
- Authority
- GB
- United Kingdom
- Prior art keywords
- assignment
- origin
- particles
- processes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/1429—Signal processing
- G01N15/1433—Signal processing using image recognition
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Theoretical Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Quality & Reliability (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Signal Processing (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007054099A DE102007054099A1 (en) | 2007-11-13 | 2007-11-13 | Assignment of particles to formation processes |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB0820835D0 GB0820835D0 (en) | 2008-12-24 |
| GB2454793A GB2454793A (en) | 2009-05-20 |
| GB2454793B true GB2454793B (en) | 2011-10-05 |
Family
ID=40194621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB0820835A Expired - Fee Related GB2454793B (en) | 2007-11-13 | 2008-11-13 | Assignment of particles to processes of origin |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE102007054099A1 (en) |
| GB (1) | GB2454793B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040047500A1 (en) * | 1997-08-07 | 2004-03-11 | Junichi Taguchi | Inspecting method and apparatus for repeated micro-miniature patterns |
| US20060008151A1 (en) * | 2004-06-30 | 2006-01-12 | National Instruments Corporation | Shape feature extraction and classification |
| US6999614B1 (en) * | 1999-11-29 | 2006-02-14 | Kla-Tencor Corporation | Power assisted automatic supervised classifier creation tool for semiconductor defects |
| US20080029699A1 (en) * | 2006-08-06 | 2008-02-07 | Hitachi High- Technologies Corporation | Charged Particle Beam System, Sample Processing Method, and Semiconductor Inspection System |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005004599A1 (en) | 2005-02-01 | 2006-08-10 | Infineon Technologies Ag | Measuring object measurement method for manufacturing plant for semiconductor wafer, involves scanning target object in intensity profile and determining parameter as measurement result, where one of the results is stored in processing unit |
-
2007
- 2007-11-13 DE DE102007054099A patent/DE102007054099A1/en not_active Withdrawn
-
2008
- 2008-11-13 GB GB0820835A patent/GB2454793B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040047500A1 (en) * | 1997-08-07 | 2004-03-11 | Junichi Taguchi | Inspecting method and apparatus for repeated micro-miniature patterns |
| US6999614B1 (en) * | 1999-11-29 | 2006-02-14 | Kla-Tencor Corporation | Power assisted automatic supervised classifier creation tool for semiconductor defects |
| US20060008151A1 (en) * | 2004-06-30 | 2006-01-12 | National Instruments Corporation | Shape feature extraction and classification |
| US20080029699A1 (en) * | 2006-08-06 | 2008-02-07 | Hitachi High- Technologies Corporation | Charged Particle Beam System, Sample Processing Method, and Semiconductor Inspection System |
Also Published As
| Publication number | Publication date |
|---|---|
| GB0820835D0 (en) | 2008-12-24 |
| DE102007054099A1 (en) | 2009-05-14 |
| GB2454793A (en) | 2009-05-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20141113 |