[go: up one dir, main page]

GB2451130B - Deposition of metals by combustion CVD coating at atmospheric pressure - Google Patents

Deposition of metals by combustion CVD coating at atmospheric pressure

Info

Publication number
GB2451130B
GB2451130B GB0714167A GB0714167A GB2451130B GB 2451130 B GB2451130 B GB 2451130B GB 0714167 A GB0714167 A GB 0714167A GB 0714167 A GB0714167 A GB 0714167A GB 2451130 B GB2451130 B GB 2451130B
Authority
GB
United Kingdom
Prior art keywords
metals
deposition
atmospheric pressure
cvd coating
combustion cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0714167A
Other versions
GB0714167D0 (en
GB2451130A (en
Inventor
David William Sheel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Priority to GB0714167A priority Critical patent/GB2451130B/en
Publication of GB0714167D0 publication Critical patent/GB0714167D0/en
Publication of GB2451130A publication Critical patent/GB2451130A/en
Application granted granted Critical
Publication of GB2451130B publication Critical patent/GB2451130B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
GB0714167A 2007-07-20 2007-07-20 Deposition of metals by combustion CVD coating at atmospheric pressure Expired - Fee Related GB2451130B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0714167A GB2451130B (en) 2007-07-20 2007-07-20 Deposition of metals by combustion CVD coating at atmospheric pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0714167A GB2451130B (en) 2007-07-20 2007-07-20 Deposition of metals by combustion CVD coating at atmospheric pressure

Publications (3)

Publication Number Publication Date
GB0714167D0 GB0714167D0 (en) 2007-08-29
GB2451130A GB2451130A (en) 2009-01-21
GB2451130B true GB2451130B (en) 2011-08-03

Family

ID=38476678

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0714167A Expired - Fee Related GB2451130B (en) 2007-07-20 2007-07-20 Deposition of metals by combustion CVD coating at atmospheric pressure

Country Status (1)

Country Link
GB (1) GB2451130B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008025108B4 (en) * 2008-05-23 2012-02-23 Verein zur Förderung von Innovationen durch Forschung, Entwicklung und Technologietransfer e.V. (Verein INNOVENT e.V.) Process for the production of nanoscale electrically conductive multilayer systems

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858465A (en) * 1993-03-24 1999-01-12 Georgia Tech Research Corporation Combustion chemical vapor deposition of phosphate films and coatings
EP0976847A2 (en) * 1998-04-29 2000-02-02 MicroCoating Technologies, Inc. Apparatus and process for controlled atmosphere chemical vapor deposition
EP1005260A2 (en) * 1998-11-23 2000-05-31 MicroCoating Technologies, Inc. Formation of thin film capacitors
US6193911B1 (en) * 1998-04-29 2001-02-27 Morton International Incorporated Precursor solution compositions for electronic devices using CCVD
US6207522B1 (en) * 1998-11-23 2001-03-27 Microcoating Technologies Formation of thin film capacitors
US6500350B1 (en) * 1998-04-29 2002-12-31 Morton International, Inc. Formation of thin film resistors

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5858465A (en) * 1993-03-24 1999-01-12 Georgia Tech Research Corporation Combustion chemical vapor deposition of phosphate films and coatings
EP0976847A2 (en) * 1998-04-29 2000-02-02 MicroCoating Technologies, Inc. Apparatus and process for controlled atmosphere chemical vapor deposition
US6193911B1 (en) * 1998-04-29 2001-02-27 Morton International Incorporated Precursor solution compositions for electronic devices using CCVD
US6500350B1 (en) * 1998-04-29 2002-12-31 Morton International, Inc. Formation of thin film resistors
EP1005260A2 (en) * 1998-11-23 2000-05-31 MicroCoating Technologies, Inc. Formation of thin film capacitors
US6207522B1 (en) * 1998-11-23 2001-03-27 Microcoating Technologies Formation of thin film capacitors

Also Published As

Publication number Publication date
GB0714167D0 (en) 2007-08-29
GB2451130A (en) 2009-01-21

Similar Documents

Publication Publication Date Title
IL254215A0 (en) Pecvd coating using an organosilicon precursor
TWI341009B (en) Chemical vapor deposition
TWI365487B (en) Notched deposition ring
EP2462087A4 (en) Combustion inhibitor coating for gas generants
GB2456445B (en) Method for deposition of ceramic films
EP2274961A4 (en) Plasma enhanced chemical vapor deposition of barrier coatings
ZA201104608B (en) Coating of hydroxylated surfaces by gas phase grafting
EP2372135B8 (en) Gas engine
IL201341A0 (en) Multilayer cvd coating
ZA201100039B (en) Gasifier reactor internal coating
GB0915669D0 (en) Metal deposition
IL181579A0 (en) Powder port blow-off for thermal spray processes
GB2462149B (en) Pipe coating
ZA201101011B (en) Apparatus for deposition of lacquer overspray
EP2443272A4 (en) Selective deposition of metal on plastic substrates
GB0810909D0 (en) Method for deposition of ceramic films
GB2451130B (en) Deposition of metals by combustion CVD coating at atmospheric pressure
GB2461094B (en) Deposition of materials
ZA201003628B (en) Pipe coating
PT2217738E (en) Frame-based vacuum chamber for coating systems
GB0704179D0 (en) Deposition of metals by flame assisted cvd at atmospheric pressure
EP2396453A4 (en) Gas deposition reactor
GB0608526D0 (en) Droplet deposition component
GB0704039D0 (en) Low temperature route to metal like coatings by chemical vapour deposition at atmospheric pressure using a glow discharge
GB0900230D0 (en) Antibacterial coating by atmospheric pressure plasma CVD

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20130720