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GB2326524B - Method of fabricating a dynamic random access memory device - Google Patents

Method of fabricating a dynamic random access memory device

Info

Publication number
GB2326524B
GB2326524B GB9727213A GB9727213A GB2326524B GB 2326524 B GB2326524 B GB 2326524B GB 9727213 A GB9727213 A GB 9727213A GB 9727213 A GB9727213 A GB 9727213A GB 2326524 B GB2326524 B GB 2326524B
Authority
GB
United Kingdom
Prior art keywords
fabricating
memory device
random access
access memory
dynamic random
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9727213A
Other versions
GB2326524A (en
GB9727213D0 (en
Inventor
Tri-Rung Yew
Water Lur
Shih-Wei Sun
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United Microelectronics Corp
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to GB9727213A priority Critical patent/GB2326524B/en
Priority to NL1008071A priority patent/NL1008071C2/en
Publication of GB9727213D0 publication Critical patent/GB9727213D0/en
Publication of GB2326524A publication Critical patent/GB2326524A/en
Application granted granted Critical
Publication of GB2326524B publication Critical patent/GB2326524B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
GB9727213A 1997-12-23 1997-12-23 Method of fabricating a dynamic random access memory device Expired - Fee Related GB2326524B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9727213A GB2326524B (en) 1997-12-23 1997-12-23 Method of fabricating a dynamic random access memory device
NL1008071A NL1008071C2 (en) 1997-12-23 1998-01-20 DRAM manufacture

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9727213A GB2326524B (en) 1997-12-23 1997-12-23 Method of fabricating a dynamic random access memory device
NL1008071A NL1008071C2 (en) 1997-12-23 1998-01-20 DRAM manufacture

Publications (3)

Publication Number Publication Date
GB9727213D0 GB9727213D0 (en) 1998-02-25
GB2326524A GB2326524A (en) 1998-12-23
GB2326524B true GB2326524B (en) 1999-11-17

Family

ID=26312835

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9727213A Expired - Fee Related GB2326524B (en) 1997-12-23 1997-12-23 Method of fabricating a dynamic random access memory device

Country Status (2)

Country Link
GB (1) GB2326524B (en)
NL (1) NL1008071C2 (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7221664B2 (en) 1998-06-01 2007-05-22 Interdigital Technology Corporation Transmittal of heartbeat signal at a lower level than heartbeat request
US7394791B2 (en) 1997-12-17 2008-07-01 Interdigital Technology Corporation Multi-detection of heartbeat to reduce error probability
US7480280B2 (en) 1998-06-01 2009-01-20 Tantivy Communications, Inc. Fast acquisition of traffic channels for a highly variable data rate reverse link of a CDMA wireless communication system
US7496072B2 (en) 1997-12-17 2009-02-24 Interdigital Technology Corporation System and method for controlling signal strength over a reverse link of a CDMA wireless communication system
US7773566B2 (en) 1998-06-01 2010-08-10 Tantivy Communications, Inc. System and method for maintaining timing of synchronization messages over a reverse link of a CDMA wireless communication system
US7936728B2 (en) 1997-12-17 2011-05-03 Tantivy Communications, Inc. System and method for maintaining timing of synchronization messages over a reverse link of a CDMA wireless communication system
US8134980B2 (en) 1998-06-01 2012-03-13 Ipr Licensing, Inc. Transmittal of heartbeat signal at a lower level than heartbeat request
US8155096B1 (en) 2000-12-01 2012-04-10 Ipr Licensing Inc. Antenna control system and method
US8175120B2 (en) 2000-02-07 2012-05-08 Ipr Licensing, Inc. Minimal maintenance link to support synchronization
US8274954B2 (en) 2001-02-01 2012-09-25 Ipr Licensing, Inc. Alternate channel for carrying selected message types
US9014118B2 (en) 2001-06-13 2015-04-21 Intel Corporation Signaling for wireless communications
US9525923B2 (en) 1997-12-17 2016-12-20 Intel Corporation Multi-detection of heartbeat to reduce error probability

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6965778B1 (en) 1999-04-08 2005-11-15 Ipr Licensing, Inc. Maintenance of channel usage in a wireless communication system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5670808A (en) * 1995-01-30 1997-09-23 Kabushiki Kaisha Toshiba Metal oxide capacitor with a WNX electrode

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03157965A (en) * 1989-11-15 1991-07-05 Nec Corp Semiconductor device
JP3055242B2 (en) * 1991-09-19 2000-06-26 日本電気株式会社 Semiconductor device and manufacturing method thereof
DE69315125T2 (en) * 1992-06-18 1998-06-10 Matsushita Electronics Corp Manufacturing process for semiconductor device with capacitor
JPH06200366A (en) * 1993-01-05 1994-07-19 Mitsubishi Electric Corp Thin film device and method of forming thin film device
JP3597328B2 (en) * 1995-12-08 2004-12-08 株式会社ルネサステクノロジ Method for manufacturing semiconductor integrated circuit device
JP3108374B2 (en) * 1996-01-26 2000-11-13 松下電子工業株式会社 Method for manufacturing semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5670808A (en) * 1995-01-30 1997-09-23 Kabushiki Kaisha Toshiba Metal oxide capacitor with a WNX electrode

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7936728B2 (en) 1997-12-17 2011-05-03 Tantivy Communications, Inc. System and method for maintaining timing of synchronization messages over a reverse link of a CDMA wireless communication system
US7394791B2 (en) 1997-12-17 2008-07-01 Interdigital Technology Corporation Multi-detection of heartbeat to reduce error probability
US9525923B2 (en) 1997-12-17 2016-12-20 Intel Corporation Multi-detection of heartbeat to reduce error probability
US7496072B2 (en) 1997-12-17 2009-02-24 Interdigital Technology Corporation System and method for controlling signal strength over a reverse link of a CDMA wireless communication system
US9042400B2 (en) 1997-12-17 2015-05-26 Intel Corporation Multi-detection of heartbeat to reduce error probability
US7602749B2 (en) 1998-06-01 2009-10-13 Interdigital Corporation Fast acquisition of traffic channels for a highly variable data rate reverse link of a CDMA wireless communication system
US7773566B2 (en) 1998-06-01 2010-08-10 Tantivy Communications, Inc. System and method for maintaining timing of synchronization messages over a reverse link of a CDMA wireless communication system
US7746830B2 (en) 1998-06-01 2010-06-29 Interdigital Technology Corporation System and method for maintaining wireless channels over a reverse link of a CDMA wireless communication system
US8134980B2 (en) 1998-06-01 2012-03-13 Ipr Licensing, Inc. Transmittal of heartbeat signal at a lower level than heartbeat request
US8139546B2 (en) 1998-06-01 2012-03-20 Ipr Licensing, Inc. System and method for maintaining wireless channels over a reverse link of a CDMA wireless communication system
US7221664B2 (en) 1998-06-01 2007-05-22 Interdigital Technology Corporation Transmittal of heartbeat signal at a lower level than heartbeat request
US7480280B2 (en) 1998-06-01 2009-01-20 Tantivy Communications, Inc. Fast acquisition of traffic channels for a highly variable data rate reverse link of a CDMA wireless communication system
US9307532B2 (en) 1998-06-01 2016-04-05 Intel Corporation Signaling for wireless communications
US8792458B2 (en) 1998-06-01 2014-07-29 Intel Corporation System and method for maintaining wireless channels over a reverse link of a CDMA wireless communication system
US8175120B2 (en) 2000-02-07 2012-05-08 Ipr Licensing, Inc. Minimal maintenance link to support synchronization
US8509268B2 (en) 2000-02-07 2013-08-13 Intel Corporation Minimal maintenance link to support sychronization
US9301274B2 (en) 2000-02-07 2016-03-29 Intel Corporation Minimal maintenance link to support synchronization
US8155096B1 (en) 2000-12-01 2012-04-10 Ipr Licensing Inc. Antenna control system and method
US9225395B2 (en) 2000-12-01 2015-12-29 Intel Corporation Antenna control system and method
US8437330B2 (en) 2000-12-01 2013-05-07 Intel Corporation Antenna control system and method
US8687606B2 (en) 2001-02-01 2014-04-01 Intel Corporation Alternate channel for carrying selected message types
US8274954B2 (en) 2001-02-01 2012-09-25 Ipr Licensing, Inc. Alternate channel for carrying selected message types
US9014118B2 (en) 2001-06-13 2015-04-21 Intel Corporation Signaling for wireless communications

Also Published As

Publication number Publication date
NL1008071C2 (en) 1999-07-21
GB2326524A (en) 1998-12-23
GB9727213D0 (en) 1998-02-25

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)

Free format text: REGISTERED BETWEEN 20100715 AND 20100721

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20131223