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GB2322963B - Method of fabricating a conductive plug - Google Patents

Method of fabricating a conductive plug

Info

Publication number
GB2322963B
GB2322963B GB9704377A GB9704377A GB2322963B GB 2322963 B GB2322963 B GB 2322963B GB 9704377 A GB9704377 A GB 9704377A GB 9704377 A GB9704377 A GB 9704377A GB 2322963 B GB2322963 B GB 2322963B
Authority
GB
United Kingdom
Prior art keywords
fabricating
conductive plug
plug
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9704377A
Other versions
GB2322963A (en
GB9704377D0 (en
Inventor
Client Wu
Horng-Bor Bu
Jenn-Tarng Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United Microelectronics Corp
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from TW085110947A external-priority patent/TW314654B/en
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to GB9704377A priority Critical patent/GB2322963B/en
Priority to JP9060377A priority patent/JPH1098013A/en
Priority to DE19710688A priority patent/DE19710688A1/en
Priority to FR9703262A priority patent/FR2753304B1/en
Publication of GB9704377D0 publication Critical patent/GB9704377D0/en
Publication of GB2322963A publication Critical patent/GB2322963A/en
Application granted granted Critical
Publication of GB2322963B publication Critical patent/GB2322963B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10W20/0523—
    • H10W20/033—
    • H10W20/056—
GB9704377A 1996-09-07 1997-03-03 Method of fabricating a conductive plug Expired - Fee Related GB2322963B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB9704377A GB2322963B (en) 1996-09-07 1997-03-03 Method of fabricating a conductive plug
JP9060377A JPH1098013A (en) 1996-09-07 1997-03-14 Manufacturing method of conductive plug
DE19710688A DE19710688A1 (en) 1996-09-07 1997-03-14 Conductive plug manufacture
FR9703262A FR2753304B1 (en) 1996-09-07 1997-03-18 METHOD FOR MANUFACTURING A CONDUCTIVE PLUG

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW085110947A TW314654B (en) 1996-09-07 1996-09-07 Manufacturing method of conductive plug
GB9704377A GB2322963B (en) 1996-09-07 1997-03-03 Method of fabricating a conductive plug

Publications (3)

Publication Number Publication Date
GB9704377D0 GB9704377D0 (en) 1997-04-23
GB2322963A GB2322963A (en) 1998-09-09
GB2322963B true GB2322963B (en) 1999-02-24

Family

ID=26311106

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9704377A Expired - Fee Related GB2322963B (en) 1996-09-07 1997-03-03 Method of fabricating a conductive plug

Country Status (4)

Country Link
JP (1) JPH1098013A (en)
DE (1) DE19710688A1 (en)
FR (1) FR2753304B1 (en)
GB (1) GB2322963B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990026626A (en) * 1997-09-25 1999-04-15 윤종용 Method of forming metal wiring in semiconductor process
KR20040019170A (en) * 2002-08-26 2004-03-05 삼성전자주식회사 Method of forming Al contact
DE102004026005B4 (en) 2004-05-27 2006-06-14 Stm Medizintechnik Starnberg Gmbh ZOOMOBJEKTIV for endoscopy equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2290166A (en) * 1994-06-10 1995-12-13 Samsung Electronics Co Ltd Wiring structure and method of manufacture
US5552341A (en) * 1992-12-10 1996-09-03 Samsung Electronics Co., Ltd. Semiconductor device and method for manufacturing the same
GB2306777A (en) * 1995-11-01 1997-05-07 Hyundai Electronics Ind Method for forming a metal wire

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970001883B1 (en) * 1992-12-30 1997-02-18 삼성전자 주식회사 Semiconductor device and manufacturing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5552341A (en) * 1992-12-10 1996-09-03 Samsung Electronics Co., Ltd. Semiconductor device and method for manufacturing the same
GB2290166A (en) * 1994-06-10 1995-12-13 Samsung Electronics Co Ltd Wiring structure and method of manufacture
GB2306777A (en) * 1995-11-01 1997-05-07 Hyundai Electronics Ind Method for forming a metal wire

Also Published As

Publication number Publication date
GB2322963A (en) 1998-09-09
DE19710688A1 (en) 1998-03-12
FR2753304A1 (en) 1998-03-13
GB9704377D0 (en) 1997-04-23
FR2753304B1 (en) 1998-12-24
JPH1098013A (en) 1998-04-14

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20080303