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GB2320137B - Method for fabrication of thin film resistor - Google Patents

Method for fabrication of thin film resistor

Info

Publication number
GB2320137B
GB2320137B GB9709375A GB9709375A GB2320137B GB 2320137 B GB2320137 B GB 2320137B GB 9709375 A GB9709375 A GB 9709375A GB 9709375 A GB9709375 A GB 9709375A GB 2320137 B GB2320137 B GB 2320137B
Authority
GB
United Kingdom
Prior art keywords
fabrication
thin film
film resistor
resistor
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB9709375A
Other versions
GB2320137A (en
GB9709375D0 (en
Inventor
Mu-Yuan Chen
Tie-Min Chen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yageo Corp
Original Assignee
Yageo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yageo Corp filed Critical Yageo Corp
Priority to GB9709375A priority Critical patent/GB2320137B/en
Publication of GB9709375D0 publication Critical patent/GB9709375D0/en
Publication of GB2320137A publication Critical patent/GB2320137A/en
Application granted granted Critical
Publication of GB2320137B publication Critical patent/GB2320137B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
GB9709375A 1997-05-08 1997-05-08 Method for fabrication of thin film resistor Expired - Lifetime GB2320137B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9709375A GB2320137B (en) 1997-05-08 1997-05-08 Method for fabrication of thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9709375A GB2320137B (en) 1997-05-08 1997-05-08 Method for fabrication of thin film resistor

Publications (3)

Publication Number Publication Date
GB9709375D0 GB9709375D0 (en) 1997-07-02
GB2320137A GB2320137A (en) 1998-06-10
GB2320137B true GB2320137B (en) 1998-11-18

Family

ID=10812015

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9709375A Expired - Lifetime GB2320137B (en) 1997-05-08 1997-05-08 Method for fabrication of thin film resistor

Country Status (1)

Country Link
GB (1) GB2320137B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6365483B1 (en) * 2000-04-11 2002-04-02 Viking Technology Corporation Method for forming a thin film resistor
CN114765086A (en) * 2021-01-12 2022-07-19 国巨电子（中国）有限公司 Method for manufacturing resistor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0472277A1 (en) * 1990-08-20 1992-02-26 Ford Motor Company Limited Method for laser scribing substrates
US5266529A (en) * 1991-10-21 1993-11-30 Trw Inc. Focused ion beam for thin film resistor trim on aluminum nitride substrates

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0472277A1 (en) * 1990-08-20 1992-02-26 Ford Motor Company Limited Method for laser scribing substrates
US5266529A (en) * 1991-10-21 1993-11-30 Trw Inc. Focused ion beam for thin film resistor trim on aluminum nitride substrates

Also Published As

Publication number Publication date
GB2320137A (en) 1998-06-10
GB9709375D0 (en) 1997-07-02

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Expiry date: 20170507