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GB2318127B - A vacuum process and apparatus for depositing lithium/lithium nitride coating on flexiible moving web - Google Patents

A vacuum process and apparatus for depositing lithium/lithium nitride coating on flexiible moving web

Info

Publication number
GB2318127B
GB2318127B GB9621109A GB9621109A GB2318127B GB 2318127 B GB2318127 B GB 2318127B GB 9621109 A GB9621109 A GB 9621109A GB 9621109 A GB9621109 A GB 9621109A GB 2318127 B GB2318127 B GB 2318127B
Authority
GB
United Kingdom
Prior art keywords
lithium
flexiible
moving web
vacuum process
nitride coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9621109A
Other versions
GB2318127A (en
GB9621109D0 (en
Inventor
Nadir Abdul Ghaffor Ahmed
Graham Harold Ellis
Anthony Ashton Broomfield
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Vacuum Equipment Ltd
Bobst Manchester Ltd
Original Assignee
General Vacuum Equipment Ltd
Valmet General Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Vacuum Equipment Ltd, Valmet General Ltd filed Critical General Vacuum Equipment Ltd
Priority to GB9621109A priority Critical patent/GB2318127B/en
Publication of GB9621109D0 publication Critical patent/GB9621109D0/en
Publication of GB2318127A publication Critical patent/GB2318127A/en
Application granted granted Critical
Publication of GB2318127B publication Critical patent/GB2318127B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0404—Methods of deposition of the material by coating on electrode collectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/04—Processes of manufacture in general
    • H01M4/0402—Methods of deposition of the material
    • H01M4/0421—Methods of deposition of the material involving vapour deposition
    • H01M4/0423—Physical vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/36—Selection of substances as active materials, active masses, active liquids
    • H01M4/58—Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Battery Electrode And Active Subsutance (AREA)
GB9621109A 1996-10-10 1996-10-10 A vacuum process and apparatus for depositing lithium/lithium nitride coating on flexiible moving web Expired - Fee Related GB2318127B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9621109A GB2318127B (en) 1996-10-10 1996-10-10 A vacuum process and apparatus for depositing lithium/lithium nitride coating on flexiible moving web

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9621109A GB2318127B (en) 1996-10-10 1996-10-10 A vacuum process and apparatus for depositing lithium/lithium nitride coating on flexiible moving web

Publications (3)

Publication Number Publication Date
GB9621109D0 GB9621109D0 (en) 1996-11-27
GB2318127A GB2318127A (en) 1998-04-15
GB2318127B true GB2318127B (en) 2001-03-07

Family

ID=10801197

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9621109A Expired - Fee Related GB2318127B (en) 1996-10-10 1996-10-10 A vacuum process and apparatus for depositing lithium/lithium nitride coating on flexiible moving web

Country Status (1)

Country Link
GB (1) GB2318127B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6906436B2 (en) 2003-01-02 2005-06-14 Cymbet Corporation Solid state activity-activated battery device and method
US6924164B2 (en) 2000-03-24 2005-08-02 Cymbet Corporation Method of continuous processing of thin-film batteries and like devices
US7211351B2 (en) 2003-10-16 2007-05-01 Cymbet Corporation Lithium/air batteries with LiPON as separator and protective barrier and method
US7494742B2 (en) 2004-01-06 2009-02-24 Cymbet Corporation Layered barrier structure having one or more definable layers and method
US7603144B2 (en) 2003-01-02 2009-10-13 Cymbet Corporation Active wireless tagging system on peel and stick substrate

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002083597A (en) 2000-06-30 2002-03-22 Matsushita Electric Ind Co Ltd Lithium secondary battery
US7294209B2 (en) * 2003-01-02 2007-11-13 Cymbet Corporation Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
US7931989B2 (en) 2005-07-15 2011-04-26 Cymbet Corporation Thin-film batteries with soft and hard electrolyte layers and method
US7776478B2 (en) 2005-07-15 2010-08-17 Cymbet Corporation Thin-film batteries with polymer and LiPON electrolyte layers and method
US8025985B2 (en) 2005-08-11 2011-09-27 E. I. Du Pont De Nemours And Company Porous metallized sheets coated with an inorganic layer having low emissivity and high moisture vapor permeability
US11527774B2 (en) 2011-06-29 2022-12-13 Space Charge, LLC Electrochemical energy storage devices
US10601074B2 (en) 2011-06-29 2020-03-24 Space Charge, LLC Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices
US11996517B2 (en) 2011-06-29 2024-05-28 Space Charge, LLC Electrochemical energy storage devices
US10658705B2 (en) 2018-03-07 2020-05-19 Space Charge, LLC Thin-film solid-state energy storage devices
US9853325B2 (en) 2011-06-29 2017-12-26 Space Charge, LLC Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices
JP7023222B2 (en) * 2015-10-02 2022-02-21 アプライド マテリアルズ インコーポレイテッド Methods and equipment for manufacturing flexible layer stacks, as well as flexible layer stacks.
CN111987288A (en) * 2020-08-26 2020-11-24 复阳固态储能科技(溧阳)有限公司 Method for in-situ lithium supplement of lithium ion energy storage device electrode and application
WO2022108940A1 (en) * 2020-11-19 2022-05-27 Applied Materials, Inc. Protection layer sources

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614408A (en) * 1979-07-10 1981-02-12 Toshiba Corp Manufacture of solid electrolyte
US4412901A (en) * 1982-02-19 1983-11-01 Firma Carl Freudenberg Method for the manufacture of solid electrolyte layers for galvanic cells
WO1991020091A1 (en) * 1990-06-16 1991-12-26 General Vacuum Equipment Limited Metallizing apparatus
US5314765A (en) * 1993-10-14 1994-05-24 Martin Marietta Energy Systems, Inc. Protective lithium ion conducting ceramic coating for lithium metal anodes and associate method
US5318600A (en) * 1993-07-23 1994-06-07 Battery Engineering, Inc. Method for making a lithium anode for an electrochemical cell
US5413642A (en) * 1992-11-27 1995-05-09 Alger; Donald L. Processing for forming corrosion and permeation barriers
GB2289061A (en) * 1992-12-21 1995-11-08 Ion Coat Ltd Atomic beam coating of polymers
EP0695815A1 (en) * 1994-08-04 1996-02-07 Leybold Aktiengesellschaft Method for coating a sheet with a transparent metal oxide layer

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614408A (en) * 1979-07-10 1981-02-12 Toshiba Corp Manufacture of solid electrolyte
US4412901A (en) * 1982-02-19 1983-11-01 Firma Carl Freudenberg Method for the manufacture of solid electrolyte layers for galvanic cells
WO1991020091A1 (en) * 1990-06-16 1991-12-26 General Vacuum Equipment Limited Metallizing apparatus
US5413642A (en) * 1992-11-27 1995-05-09 Alger; Donald L. Processing for forming corrosion and permeation barriers
GB2289061A (en) * 1992-12-21 1995-11-08 Ion Coat Ltd Atomic beam coating of polymers
US5318600A (en) * 1993-07-23 1994-06-07 Battery Engineering, Inc. Method for making a lithium anode for an electrochemical cell
US5314765A (en) * 1993-10-14 1994-05-24 Martin Marietta Energy Systems, Inc. Protective lithium ion conducting ceramic coating for lithium metal anodes and associate method
EP0695815A1 (en) * 1994-08-04 1996-02-07 Leybold Aktiengesellschaft Method for coating a sheet with a transparent metal oxide layer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
WPI Accession no 81-24305D/14 & JP 56-014408 A *

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6924164B2 (en) 2000-03-24 2005-08-02 Cymbet Corporation Method of continuous processing of thin-film batteries and like devices
US6962613B2 (en) 2000-03-24 2005-11-08 Cymbet Corporation Low-temperature fabrication of thin-film energy-storage devices
US6986965B2 (en) 2000-03-24 2006-01-17 Cymbet Corporation Device enclosures and devices with integrated battery
US7131189B2 (en) 2000-03-24 2006-11-07 Cymbet Corporation Continuous processing of thin-film batteries and like devices
US7194801B2 (en) 2000-03-24 2007-03-27 Cymbet Corporation Thin-film battery having ultra-thin electrolyte and associated method
US7433655B2 (en) 2000-03-24 2008-10-07 Cymbet Corporation Battery-operated wireless-communication apparatus and method
US6906436B2 (en) 2003-01-02 2005-06-14 Cymbet Corporation Solid state activity-activated battery device and method
US7274118B2 (en) 2003-01-02 2007-09-25 Cymbet Corporation Solid state MEMS activity-activated battery device and method
US7603144B2 (en) 2003-01-02 2009-10-13 Cymbet Corporation Active wireless tagging system on peel and stick substrate
US7211351B2 (en) 2003-10-16 2007-05-01 Cymbet Corporation Lithium/air batteries with LiPON as separator and protective barrier and method
US7494742B2 (en) 2004-01-06 2009-02-24 Cymbet Corporation Layered barrier structure having one or more definable layers and method

Also Published As

Publication number Publication date
GB2318127A (en) 1998-04-15
GB9621109D0 (en) 1996-11-27

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20061010