GB2300885B - Cryogenic vacuum pump with electronically controlled regeneration - Google Patents

Cryogenic vacuum pump with electronically controlled regeneration

Info

Publication number: GB2300885B
Authority: GB; United Kingdom
Prior art keywords: vacuum pump; electronically controlled; cryogenic vacuum; controlled regeneration; regeneration
Prior art date: 1993-02-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

GB9615938A

Other versions

GB9615938D0 (en

GB2300885A (en

Inventor

Allen J Bartlett

Stephen J Yamartino

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Azenta Inc

Original Assignee

Helix Technology Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1993-02-26

Filing date

1994-02-23

Publication date

1997-09-24

1993-02-26 Priority claimed from US08/023,697 external-priority patent/US5375424A/en

1994-02-23 Application filed by Helix Technology Corp filed Critical Helix Technology Corp

1994-02-23 Priority to GB9704594A priority Critical patent/GB2309750B/en

1996-09-11 Publication of GB9615938D0 publication Critical patent/GB9615938D0/en

1996-11-20 Publication of GB2300885A publication Critical patent/GB2300885A/en

1997-09-24 Application granted granted Critical

1997-09-24 Publication of GB2300885B publication Critical patent/GB2300885B/en

2014-02-23 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
- F04B37/085—Regeneration of cryo-pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

GB9615938A 1993-02-26 1994-02-23 Cryogenic vacuum pump with electronically controlled regeneration Expired - Fee Related GB2300885B (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
GB9704594A GB2309750B (en)	1993-02-26	1994-02-23	Cryogenic vacuum pump with electronically controlled regeneration

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US08/023,697 US5375424A (en)	1993-02-26	1993-02-26	Cryopump with electronically controlled regeneration
GB9514620A GB2289922B (en)	1993-02-26	1994-02-23	Cryogenic vacuum pump with electronically controlled regeneration

Publications (3)

Publication Number	Publication Date
GB9615938D0 GB9615938D0 (en)	1996-09-11
GB2300885A GB2300885A (en)	1996-11-20
GB2300885B true GB2300885B (en)	1997-09-24

Family

ID=26307420

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB9615938A Expired - Fee Related GB2300885B (en)	1993-02-26	1994-02-23	Cryogenic vacuum pump with electronically controlled regeneration

Country Status (1)

Country	Link
GB (1)	GB2300885B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19781645B4 (en) *	1996-03-20	2005-12-01	Helix Technology Corp., Mansfield	Cleaning and coarse or pre-vacuum cryopump regeneration method, cryopump and control device
CN104747422B (en) *	2013-12-31	2016-08-17	北京北方微电子基地设备工艺研究中心有限责任公司	PVD equipment cold pump method for controlling reproduction and device
CN116428155B (en) *	2023-04-13	2024-03-22	北京通嘉宏瑞科技有限公司	Pump body cleaning system and pump body cleaning control method

1994
- 1994-02-23 GB GB9615938A patent/GB2300885B/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
GB9615938D0 (en)	1996-09-11
GB2300885A (en)	1996-11-20

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Legal Events

Date	Code	Title	Description
2008-10-29	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 20080223