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GB2365208A - Amorphous alingan light emitting diode - Google Patents

Amorphous alingan light emitting diode Download PDF

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Publication number
GB2365208A
GB2365208A GB0017755A GB0017755A GB2365208A GB 2365208 A GB2365208 A GB 2365208A GB 0017755 A GB0017755 A GB 0017755A GB 0017755 A GB0017755 A GB 0017755A GB 2365208 A GB2365208 A GB 2365208A
Authority
GB
United Kingdom
Prior art keywords
amorphous
compound semiconductor
allngan
light emitting
emitting diode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0017755A
Other versions
GB0017755D0 (en
Inventor
Juses Chao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB0017755A priority Critical patent/GB2365208A/en
Priority to HK00104479A priority patent/HK1026818A2/en
Priority to DE20013106U priority patent/DE20013106U1/en
Priority to FR0010394A priority patent/FR2812765B3/en
Publication of GB0017755D0 publication Critical patent/GB0017755D0/en
Publication of GB2365208A publication Critical patent/GB2365208A/en
Withdrawn legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • H10H20/8252Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN characterised by the dopants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/011Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/013Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
    • H10H20/0137Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials the light-emitting regions comprising nitride materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/817Bodies characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous
    • H10H20/818Bodies characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous within the light-emitting regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN

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  • Led Devices (AREA)

Abstract

An amorphous AlInGaN light emitting diode comprises i-type, p-type and/or n-type impurity amorphous compound semiconductor layer on a GaN substrate or a sapphire substrate. The amorphous AlInGaN light emitting diode has low manufacture cost and high yield.

Description

<Desc/Clms Page number 1> Arnor hous AllnGaN liaht ernittin- diode Field of the invention The present invention relates to an amorphous AllnGaN light emitting diode. especially to an arnorphous AlInGaN light emitting diode %\ith lwx manufacture cost and hiah vield.
Backaround of the invention The compound serniconductor devices had been found useful application for dispIL,,, and communication products etc. 'More particulafl\. the GaN based COMPOUnd serniconductors ha%e received much attention because of the blue liahi emittina abilltv. The GaN based compound semiconductor is direct band-gap materials with high efficient enerav-transferrin2 rate and has wide band-2ap distribution 2.0-6.4 eV.
US Pat. NO. 5-563.4-121 has proposed a manufacturing method of GaN based compound sernicondUCtOrS. wherein crystalline GaN based compound semiconductors are specifically used to manufacture tight emitting diodes. Ho\#ever. the cr-,-stalline Ga.N- based compound semiconductors have the problems of high cost and tow yield.
Therefore, it is the object of the present invention to provide an amorphous AllnGaN liaht emittin2 diode with tow manufacture cost and hi#zh yields To achieve the above object. the present invention to provide an amorphous AlInGaN light emitting diode comprising sequentially a p-type GaN substrate. a first p-type amorphous compound semiconductor laver. a second p-type amorphous compound semiconductor laver, an amorphous compound semiconductor impurity laver, a p/n-type amorphous compound
<Desc/Clms Page number 2>
semiconductor laver, and an n-tApe arnorphous compound semiconductor layer. Moreover. to ach M, c the abo% e ob ject# the present invention to provide an amorphous AllriGaN1 light ernitting diode cornprisima sequentially a sapphire substrate. an n-type amorphous compound semiconductor laver. a p/n-tv'pe arnorphous compound semiconductor laver. an amorphous compound semiconductor IMPLIF11% la%cr, I skfcond p-t\ pe amorphous COMPOUnd semiconductor la%er, and a first p-t%pe arnorphous compound serniconductor laver, The #, arious objects and ad% antages of the present Invention will be more readilv understood from the follokvina detailed description when read in con#junctlon with the appended drawing. in which: Brief description of drawing: zn
Fl#z: 1 Is a sectional viev, of the amorphous AllnGaNi light emitting diode accordina to the first preferred embodiment of the present invention: Fla. 21 is a sectional view of the arnorphous AlInGaN light emitting diode accordina to the second preferred embodiment of the present invention. Detail description of preferred embodiment With reference now to Fla. 1, the present invention is intended to provide an amorphous AlInGaN light emitting diode with low manufacture cost and hl2h yield. The amorphous AllnGaN light emitting diode according to the present invention comprises sequentially a p-type GaN substrate 100, a first p-type arnorphous compound semiconductor laver 102, a second p-type amorphous compound semiconductor layer 104, an amorphous compound semiconductor impurity laver 106. a p/n-type amorphous compound
<Desc/Clms Page number 3>
semiconductor layer 108. and an n-type amorphous compound semiconductor laver I 10. wherein the laN ers to I 10 can be formed by vapor grovvth. The first p-t\pe amorphous compound semiconductor laver 102 Is functioned as I buffer la% er. The second p-t% pe amorphous COITIPOLind semiconductor Ia% cr 104 is functioned as upper claddin2 la,, er. The amorphous COMPOUnd semiconductor ii-npurity layer 106 has low resistance to function as lig,lit-ernitting laver. The p n-type arnorphous compound semiconductor layer 108 is functioned as upper cladding la%er. The n-type arnorphous COMPOUnd semiconductor layer 110 is Cunctioneclas clectrodearid pro%,Ides p,,nj'UnCtion. It should be noted that the cross section shape of those layers is rectangular shape Including square shape. %/Ioreover, the pads of the LED arc formed in two etched dents (not shok#n) on the n-type amorphous cornpOUnd semiconductor layer 110. kkhereas the only one pad of the LED in US Pat. NO. 5.563.4221 is formed in etched dent. The p-type impurity is selected form the 2roup consisting of Zinc. 'Ma2neslurn. Beryllium, Strontium. Bariurn and Cadmium and has impurities concentration of concentration 1014-22 EA/cm 3. The n-type Impurity is selected form the group consisting of Silicon. Germanium, Tin, Sulfur. Tellurium and Selenium and has impurities concentration of concentration I 0_1 4-2 'EA/cm Moreover. heatin2, annealing, electron-beam shooting for temperature between 601 C to 1200 'C . and operation time between I to 50 minutes can be performed after above process. The reaction P-as contains ammonia or hydrazine. or ammonia- hydrazine combined trimethylaluminum and the reaction gas can further contain the
<Desc/Clms Page number 4>
sin2le or combined gas frorn the trimethyl galliurn and,'or triethyl galliurn. Moreover. the reaction 2as further contains at least one aas o fd leffiv I -zinc. trimethyl-zinc. trimethyl-indiurn. and cyclopentadienyl -magnesIL11-n.
F12. 21 is a sectional % ic%#, of' the amorphous AlInGaN light ernitting diode accordina to the second preferred embodiment of the present invention. The present im,'ention provides an amorphous AlInGaN light ernitting diode comprising sequentially a sapphire substrate 200. an n-type amorphous compound semiconductor layer 202. a p/n-type amorphous compound semiconductor laver 204. an arnorphous compound semiconductor irnpurit\# laver 206, a second p-t,,pe arnorphOLIS compound semiconductor laver 208. and a First p-type amorphous compound semiconductor laver 210. vvhcrein the layers 202 to 210 can be formed by vapor growth. The n-type amorphous compound semiconductor laver 202 is functioned as buffer laver. The p/n-type amorphous compound semiconductor laver 204 is functioned as upper cladding layer. The amorphous compound semiconductor impurity laver 206 has low resistance to function as light-emitting taver. The second p-type amorphous compound semiconductor laver 208 is functioned as upper cladding laver. The First p-type amorphous compound semiconductor laver 210 is functioned as electrode and provides p/n junction.
It should be noted that the cross section shape of those layers is rectanQular shape including square shape. Moreover. the pads of the LED are formed in two etched dents (not shown) on the first p-type amorphous compound semiconductor laver 210. whereas the only one pad of the LED in US Pat, NO. 5,563,422 is formed in etched dent.
4
<Desc/Clms Page number 5>
The p-t,,pe impurity is selected form the 2roup consisting of Zinc. Maanesium. Ber',Ilium. Strontium. Barium and Cadmium and has impurities concentration ofconcentration 10"-"'EA/cm The n-tvpe impurit-, is selected form tile 2rOUP consisting of Silicon. Germanium, Tin, Sulfur. Tellurium and Selenium and has impurities concentration of concentration 10"_-EA,'cn-l. Nloreo%er. hcatln2. arincalina. electron-bearn shooting for temperature bem een 60 1 C to 1200 C . and operation tirne bem-een I to 50 minutes can he performed after above process., The reaction gas contains arnmorlia or hvdrazine,, or ammonia-hydrazine combined trimethvIaluminum and the reaction aas can further contain the sinale or combined bias from the tr'i-nethvl 2all'um and/or trieth-V'I L'a 11LIM. Moreover. the reaction aas further contains at least one gas of dlethyl-zinc. trii-neth% I-zinc. trimethyl-indium. and cyclopentadienyl -magneslul-n.
Although the present invention has been described with reference to the preferred embodiment thereof. it will be understood that the invention is not limited to the details thereof. Various substitutions and modifications have suaszested in the foregoing description. and other will occur to those ofordinar-% skill in the art. Therefore. all such substitutions and modifications are intended to be embraced within the scope of the invention as defined in the appended claims.
<Desc/Clms Page number 6>

Claims (1)

1. An arnorphous AllnGaN light ernittM2 diode comprising, sequential1% a p-t% pe GaN7 substrate. a first p-type 11110IThOLIS COMPOLind semiconductor laN er. a second p-t%pe amorphous compound semiconductor la#,er, an amorphous compound semiconductor irnpurit#, 1wer- a p/n-type amorphous compound serni conductor laver. and an pe amorphous compound semiconductor la" er. 2 The amorphous AllnGaN light ei-nitting 1 1 diode as in clairn 1, #\hercin 1 the P-tVpe Impurity is selected form the group consisting of Zinc. N/lagnesIUM. BervIlium. Strontium. Bart'Llm and CadmiLlIn and has impurities concentration o(concentration lO'-"-EA,crn` The amorphous AllnGaN light emitting diode as In claim 1, wherein the 3 n-t%,Pe Impurity is selected form the group consisting of Silicon. Germanium. Tin. Sulfur. Tellurium and Selenium and has impurities concentration of concentration 10'--- EAjcm' 4. The amorphous AllnGaN light emitting diode as in claim 1. wherein the reaction gas contains ammonia or hydrazine. or ammonia-hydrazine combined trimethylaluminurn and the reaction gas can further contain the single or combined aas from the trimethyl gallium and/or triethyl gallium. 5. The amorphous AllnGaN light emitting diode as in claim 4. wherein the reaction -as further contains at least one !aas of diethyl-zinc, trimethyl-zinc, trimethyl-Indium. and cyclopentadlenyl -magnesium. 6. An amorphous AllnGaN light emitting diode comprising sequentially sapphire substrate, an n-type amorphous compound semiconductor layer, a p/n-type amorphous compound semiconductor layer, an amorphous compound
<Desc/Clms Page number 7>
serniconductor impurity laver. a second p-type amorphous compound semiconductor laver. and a first p-type amorphous compound semiconductor layer. 7. The arnorphous AllnGaN light emittin#g diode as in claim 6, wherein the p-t% # pe impurio, i s selected form the group consisting I I - of Zinc. I N/lagnes' - I LI M. Bervillum. Strontium. Barium and Cadmium and has impurities ConCentration ofconcentration l0"-"EAcm_' . S. The amorphous AllnGaN light emitting diode as in claim 6, wherein the n-t\pe impurity is selected form the group COr1SIStIm,_ of Silicon. Germanium. Tin. Sulfur. Tellurium and Selenium and has impurities concentration ot 1-2concentration 101 "EA.,"crn". 9. The amorphous AllnGaN light ernitting diode as in clairn 6. wherein the reaction gas contains ammonia or h-,,,drazine. or ammonia-hvdrazine combined trimethvlalui-ninum and the reaction gas can further contain the single or combined gas from the trimeth#,,I gallium and/or triethvi gallium. 10. The amorphous AlInGaN light emitting diode as in claim 9. wherein the reaction ,as further contains at least one gas of" diethvl-zinc, trirneth% I-7111c. trimeth-,,I-Indium, and cyclopentadienyl -magnesium. 11. An amorphous AlInGaN light emitfing diode substantially as hereinbefore described with reference to and as illustrated in the accompanying drawings.
GB0017755A 2000-07-19 2000-07-19 Amorphous alingan light emitting diode Withdrawn GB2365208A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB0017755A GB2365208A (en) 2000-07-19 2000-07-19 Amorphous alingan light emitting diode
HK00104479A HK1026818A2 (en) 2000-07-19 2000-07-20 Amorphous a1ingan light emitting diode
DE20013106U DE20013106U1 (en) 2000-07-19 2000-07-28 Amorphous AlInGaN light emitting diode
FR0010394A FR2812765B3 (en) 2000-07-19 2000-08-07 AMORPHOUS ALINGaN LIGHT-EMITTING DIODE

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GB0017755A GB2365208A (en) 2000-07-19 2000-07-19 Amorphous alingan light emitting diode
HK00104479A HK1026818A2 (en) 2000-07-19 2000-07-20 Amorphous a1ingan light emitting diode
DE20013106U DE20013106U1 (en) 2000-07-19 2000-07-28 Amorphous AlInGaN light emitting diode
FR0010394A FR2812765B3 (en) 2000-07-19 2000-08-07 AMORPHOUS ALINGaN LIGHT-EMITTING DIODE

Publications (2)

Publication Number Publication Date
GB0017755D0 GB0017755D0 (en) 2000-09-06
GB2365208A true GB2365208A (en) 2002-02-13

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Family Applications (1)

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GB0017755A Withdrawn GB2365208A (en) 2000-07-19 2000-07-19 Amorphous alingan light emitting diode

Country Status (4)

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DE (1) DE20013106U1 (en)
FR (1) FR2812765B3 (en)
GB (1) GB2365208A (en)
HK (1) HK1026818A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2231171C1 (en) * 2003-04-30 2004-06-20 Закрытое акционерное общество "Инновационная фирма "ТЕТИС" Light-emitting diode

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0764989A1 (en) * 1995-09-25 1997-03-26 Mitsubishi Denki Kabushiki Kaisha Semiconductor light emitting device and method for fabricating semiconductor light emitting device
GB2317053A (en) * 1996-09-06 1998-03-11 Hewlett Packard Co Nitride LED
GB2338109A (en) * 1998-06-05 1999-12-08 Hewlett Packard Co Light emitting diode
EP0977279A2 (en) * 1998-07-31 2000-02-02 Xerox Corporation AlGalnN LED and laser diode structures

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0764989A1 (en) * 1995-09-25 1997-03-26 Mitsubishi Denki Kabushiki Kaisha Semiconductor light emitting device and method for fabricating semiconductor light emitting device
GB2317053A (en) * 1996-09-06 1998-03-11 Hewlett Packard Co Nitride LED
GB2338109A (en) * 1998-06-05 1999-12-08 Hewlett Packard Co Light emitting diode
EP0977279A2 (en) * 1998-07-31 2000-02-02 Xerox Corporation AlGalnN LED and laser diode structures

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2231171C1 (en) * 2003-04-30 2004-06-20 Закрытое акционерное общество "Инновационная фирма "ТЕТИС" Light-emitting diode

Also Published As

Publication number Publication date
DE20013106U1 (en) 2000-10-19
HK1026818A2 (en) 2000-11-24
FR2812765A3 (en) 2002-02-08
GB0017755D0 (en) 2000-09-06
FR2812765B3 (en) 2002-06-14

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