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GB2362224A - Micromachined mirror with stretchable restoring force member - Google Patents

Micromachined mirror with stretchable restoring force member

Info

Publication number
GB2362224A
GB2362224A GB0109131A GB0109131A GB2362224A GB 2362224 A GB2362224 A GB 2362224A GB 0109131 A GB0109131 A GB 0109131A GB 0109131 A GB0109131 A GB 0109131A GB 2362224 A GB2362224 A GB 2362224A
Authority
GB
United Kingdom
Prior art keywords
mirror
planar base
longitudinal axis
planar
end portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0109131A
Other versions
GB0109131D0 (en
GB2362224B (en
Inventor
Joseph D Drake
John H Jerman
John D Grade
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of GB0109131D0 publication Critical patent/GB0109131D0/en
Publication of GB2362224A publication Critical patent/GB2362224A/en
Application granted granted Critical
Publication of GB2362224B publication Critical patent/GB2362224B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Recording Or Reproduction (AREA)

Abstract

A mirror assembly (200) of micron dimensions for use in deflecting a beam of light. The mirror assembly includes a planar base (301) and a planar mirror (220) spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has first and second end portions (220a, 220b) and a longitudinal axis (303) extending between the first and second end portions. First and second torsional members (306, 307) extend along the longitudinal axis and are connected to the respective first and second end portions for permitting the mirror to rock between first and second positions about the longitudinal axis relative to the planar base. The first and second torsional members are secured to the planar base. At least a portion of the mirror is made from a conductive material. First and second spaced-apart electrodes (322, 323) are carried by the planar base for driving the mirror between the first and second positions. A tether member (431) extends transversely of the longitudinal axis and is secured to the first torsional member and to the planar base. The tether member regulates the rocking of the mirror.
GB0109131A 1998-09-18 1999-09-17 Micromachined mirror with stretchable restoring force member Expired - Fee Related GB2362224B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10098998P 1998-09-18 1998-09-18
PCT/US1999/021682 WO2000017865A1 (en) 1998-09-18 1999-09-17 Micromachined mirror with stretchable restoring force member

Publications (3)

Publication Number Publication Date
GB0109131D0 GB0109131D0 (en) 2001-05-30
GB2362224A true GB2362224A (en) 2001-11-14
GB2362224B GB2362224B (en) 2003-03-19

Family

ID=22282566

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0109131A Expired - Fee Related GB2362224B (en) 1998-09-18 1999-09-17 Micromachined mirror with stretchable restoring force member

Country Status (7)

Country Link
JP (1) JP4619538B2 (en)
KR (1) KR100473693B1 (en)
CN (1) CN1128440C (en)
AU (1) AU6254999A (en)
DE (1) DE19983566T1 (en)
GB (1) GB2362224B (en)
WO (1) WO2000017865A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7002215B1 (en) * 2002-09-30 2006-02-21 Pts Corporation Floating entrance guard for preventing electrical short circuits

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153870A (en) * 1989-06-29 1992-10-06 Digital Equipment Corporation Rotary head actuator for optical disk
US5202875A (en) * 1991-06-04 1993-04-13 International Business Machines Corporation Multiple data surface optical data storage system
US5719846A (en) * 1995-11-30 1998-02-17 Sharp Kabushiki Kaisha Deformable mirror and method for fabricating the same and apparatus using a deformable mirror
US6002661A (en) * 1996-12-26 1999-12-14 Sharp Kabushiki Kaisha Deformable mirror and optical data reproducing apparatus using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5661591A (en) * 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
US6044056A (en) * 1996-07-30 2000-03-28 Seagate Technology, Inc. Flying optical head with dynamic mirror
EP0929894A1 (en) * 1996-08-27 1999-07-21 Seagate Technology Optical head using micro-machined elements
JP4776779B2 (en) * 1998-09-02 2011-09-21 カイロス・インク Microfabricated members that are connected by torsional flexure and rotate relatively

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153870A (en) * 1989-06-29 1992-10-06 Digital Equipment Corporation Rotary head actuator for optical disk
US5202875A (en) * 1991-06-04 1993-04-13 International Business Machines Corporation Multiple data surface optical data storage system
US5719846A (en) * 1995-11-30 1998-02-17 Sharp Kabushiki Kaisha Deformable mirror and method for fabricating the same and apparatus using a deformable mirror
US6002661A (en) * 1996-12-26 1999-12-14 Sharp Kabushiki Kaisha Deformable mirror and optical data reproducing apparatus using the same

Also Published As

Publication number Publication date
GB0109131D0 (en) 2001-05-30
KR20010075212A (en) 2001-08-09
AU6254999A (en) 2000-04-10
GB2362224B (en) 2003-03-19
CN1325530A (en) 2001-12-05
DE19983566T1 (en) 2001-08-16
JP4619538B2 (en) 2011-01-26
WO2000017865A1 (en) 2000-03-30
JP2002525691A (en) 2002-08-13
CN1128440C (en) 2003-11-19
KR100473693B1 (en) 2005-03-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20050917