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GB2361801B - Read head with read track width defining layer that planarizes the write gap layer of a write head - Google Patents

Read head with read track width defining layer that planarizes the write gap layer of a write head

Info

Publication number
GB2361801B
GB2361801B GB0115773A GB0115773A GB2361801B GB 2361801 B GB2361801 B GB 2361801B GB 0115773 A GB0115773 A GB 0115773A GB 0115773 A GB0115773 A GB 0115773A GB 2361801 B GB2361801 B GB 2361801B
Authority
GB
United Kingdom
Prior art keywords
read
track width
head
width defining
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0115773A
Other versions
GB2361801A (en
GB0115773D0 (en
Inventor
Henry Chinlin Chang
Robert Otto Schwenker
Cherngye Hwang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB0115773D0 publication Critical patent/GB0115773D0/en
Publication of GB2361801A publication Critical patent/GB2361801A/en
Application granted granted Critical
Publication of GB2361801B publication Critical patent/GB2361801B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/012—Recording on, or reproducing or erasing from, magnetic disks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
    • G11B5/3932—Magnetic biasing films
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49025—Making disc drive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49044—Plural magnetic deposition layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y10T29/4905—Employing workholding means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49048—Machining magnetic material [e.g., grinding, etching, polishing]
    • Y10T29/49052—Machining magnetic material [e.g., grinding, etching, polishing] by etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Magnetic Heads (AREA)

Abstract

A read track width defining layer is employed for defining first and second side edges of a read sensor. The read track width defining layer preferably remains in the head to planarize the read head at first and second hard bias and lead layers so as to overcome a problem of write gap curvature in an accompanying write head. The read track width defining layer is defined by a subtractive process about a bilayer photoresist layer. The subtractive process is selective to the read track width defining layer over a read sensor material layer therebelow. Ion milling is then employed for defining first and second side edges of a read sensor layer employing the read track width defining layer as a mask. First and second hard bias and lead layers are then deposited which make contiguous junctions with the first and second side edges of each of the read sensor and read track width defining layers. The photoresist is then removed and the remainder of the read head is completed.
GB0115773A 1998-12-16 1999-11-24 Read head with read track width defining layer that planarizes the write gap layer of a write head Expired - Fee Related GB2361801B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/212,724 US6434814B1 (en) 1998-12-16 1998-12-16 Method of manufacturing a magnetic head including a read head with read track width defining layer that planarizes the write gap layer of a write head
PCT/GB1999/003917 WO2000036594A1 (en) 1998-12-16 1999-11-24 Read head with read track width defining layer that planarizes the write gap layer of a write head

Publications (3)

Publication Number Publication Date
GB0115773D0 GB0115773D0 (en) 2001-08-22
GB2361801A GB2361801A (en) 2001-10-31
GB2361801B true GB2361801B (en) 2002-12-18

Family

ID=22792187

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0115773A Expired - Fee Related GB2361801B (en) 1998-12-16 1999-11-24 Read head with read track width defining layer that planarizes the write gap layer of a write head

Country Status (8)

Country Link
US (2) US6434814B1 (en)
JP (1) JP3586196B2 (en)
KR (1) KR100458845B1 (en)
CN (1) CN1214363C (en)
AU (1) AU1284700A (en)
GB (1) GB2361801B (en)
HU (1) HU223989B1 (en)
WO (1) WO2000036594A1 (en)

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JP3382866B2 (en) * 1998-12-18 2003-03-04 日本電気株式会社 Method of manufacturing magnetoresistive element
JP3272329B2 (en) * 1999-07-26 2002-04-08 アルプス電気株式会社 Thin film magnetic head and floating magnetic head
JP2001110016A (en) * 1999-10-05 2001-04-20 Alps Electric Co Ltd Spin valve type thin film magnetic element and its production method and thin film magnetic head having the magnetic element
US6700759B1 (en) * 2000-06-02 2004-03-02 Western Digital (Fremont), Inc. Narrow track width magnetoresistive sensor and method of making
JP2002185059A (en) * 2000-12-12 2002-06-28 Fujitsu Ltd Magnetoresistive element
JP3939503B2 (en) * 2001-03-22 2007-07-04 アルプス電気株式会社 Magnetic sensing element and manufacturing method thereof
US6817086B2 (en) 2001-05-10 2004-11-16 International Business Machines Corporation Photolithographic process for extreme resolution of track width definition of a read head
US6989971B2 (en) * 2002-04-05 2006-01-24 Hitachi Global Storage Technologies Netherlands, B.V. Giant magnetoresistance (GMR) read head with reactive-ion-etch defined read width and fabrication process
JP2003303407A (en) * 2002-04-08 2003-10-24 Hitachi Ltd Method of manufacturing magnetoresistive read head
US8679307B2 (en) * 2002-08-02 2014-03-25 E.A. Fischione Instruments, Inc. Method and apparatus for preparing specimens for microscopy
US7555828B2 (en) 2002-12-02 2009-07-07 Hitachi Global Storage Technologies Netherlands B.V. Method for manufacturing a read sensor for a magnetoresistive head
US7207098B2 (en) * 2003-06-27 2007-04-24 Seagate Technology Llc Hard mask method of forming a reader of a magnetic head
US7008550B2 (en) * 2003-09-25 2006-03-07 Hitachi Global Storage Technologies Netherlands B.V. Method for forming a read transducer by ion milling and chemical mechanical polishing to eliminate nonuniformity near the MR sensor
US20050067374A1 (en) * 2003-09-30 2005-03-31 Ananda Baer Method of forming a read sensor using photoresist structures without undercuts which are removed using chemical-mechanical polishing (CMP) lift-off processes
US7155810B2 (en) 2003-09-30 2007-01-02 Hitachi Global Storage Technologies Netherlands, B.V. Method for fabricating a magnetic head
US7611610B2 (en) * 2003-11-18 2009-11-03 Fei Company Method and apparatus for controlling topographical variation on a milled cross-section of a structure
US7575853B2 (en) * 2004-04-08 2009-08-18 Tdk Corporation Method of forming thin film pattern and method of forming magnetoresistive element
US7320170B2 (en) * 2004-04-20 2008-01-22 Headway Technologies, Inc. Xenon ion beam to improve track width definition
US7037847B2 (en) * 2004-05-28 2006-05-02 Hitachi Global Storage Technologies Netherlands, B.V. Methods for fabricating read sensor for magnetic heads with reduced read track width
US7360296B2 (en) * 2004-09-30 2008-04-22 Hitachi Global Storage Technologies Netherlands B.V. Method for reducing damage to sliders during lapping
JP2006196034A (en) * 2005-01-11 2006-07-27 Hitachi Global Storage Technologies Netherlands Bv Manufacturing method of magnetic head
US7346977B2 (en) * 2005-03-03 2008-03-25 Hitachi Global Storage Technologies Netherlands B.V. Method for making a magnetoresistive read head having a pinned layer width greater than the free layer stripe height
US20060273066A1 (en) * 2005-06-01 2006-12-07 Hitachi Global Storage Technologies Method for manufacturing a magnetic sensor having an ultra-narrow track width
JP2006351083A (en) * 2005-06-14 2006-12-28 Hitachi Global Storage Technologies Netherlands Bv Manufacturing method of thin film magnetic head
US7918014B2 (en) * 2005-07-13 2011-04-05 Headway Technologies, Inc. Method of manufacturing a CPP structure with enhanced GMR ratio
US8163185B1 (en) 2008-03-31 2012-04-24 Western Digital (Fremont), Llc Method and apparatus for lifting off photoresist beneath an overlayer
US8318030B2 (en) * 2009-07-13 2012-11-27 Seagate Technology Llc Magnetic device definition with uniform biasing control
US8913345B1 (en) 2012-08-29 2014-12-16 Marvell International Ltd. System and method for reading data from a magnetic medium by utilizing plural read sensors which define an effective read width
CN109044165B (en) * 2018-08-31 2020-12-01 温州莱益机械有限公司 Towel rack with dressing mirror based on magnetic force falling prevention
US11170809B1 (en) * 2020-06-19 2021-11-09 Western Digital Technologies, Inc. Transverse bias strength enhancement in dual free layer tunnel magnetoresistive read heads
JP2023030363A (en) * 2021-08-23 2023-03-08 株式会社東芝 Magnetic head and manufacturing method thereof, and magnetic recording/reproducing device and manufacturing thereof

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JPH07121839A (en) * 1993-10-19 1995-05-12 Alps Electric Co Ltd Thin-film magnetic head and its production
US5568335A (en) * 1994-12-29 1996-10-22 International Business Machines Corporation Multi-layer gap structure for high resolution magnetoresistive read head

Also Published As

Publication number Publication date
CN1334953A (en) 2002-02-06
AU1284700A (en) 2000-07-03
HUP0105162A2 (en) 2002-04-29
HU223989B1 (en) 2005-04-28
KR20010080745A (en) 2001-08-22
US6519118B2 (en) 2003-02-11
CN1214363C (en) 2005-08-10
KR100458845B1 (en) 2004-12-03
WO2000036594A1 (en) 2000-06-22
HUP0105162A3 (en) 2002-08-28
JP2003517693A (en) 2003-05-27
US20020089794A1 (en) 2002-07-11
US6434814B1 (en) 2002-08-20
GB2361801A (en) 2001-10-31
JP3586196B2 (en) 2004-11-10
GB0115773D0 (en) 2001-08-22

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