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GB2200795B - Eprom cell with integral select transistor - Google Patents

Eprom cell with integral select transistor

Info

Publication number
GB2200795B
GB2200795B GB8800379A GB8800379A GB2200795B GB 2200795 B GB2200795 B GB 2200795B GB 8800379 A GB8800379 A GB 8800379A GB 8800379 A GB8800379 A GB 8800379A GB 2200795 B GB2200795 B GB 2200795B
Authority
GB
United Kingdom
Prior art keywords
select transistor
eprom cell
integral select
integral
eprom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8800379A
Other versions
GB8800379D0 (en
GB2200795A (en
Inventor
Simon M Tam
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of GB8800379D0 publication Critical patent/GB8800379D0/en
Publication of GB2200795A publication Critical patent/GB2200795A/en
Application granted granted Critical
Publication of GB2200795B publication Critical patent/GB2200795B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B41/00Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0411Manufacture or treatment of FETs having insulated gates [IGFET] of FETs having floating gates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B41/00Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/68Floating-gate IGFETs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/68Floating-gate IGFETs
    • H10D30/681Floating-gate IGFETs having only two programming levels
    • H10D30/684Floating-gate IGFETs having only two programming levels programmed by hot carrier injection
    • H10D30/685Floating-gate IGFETs having only two programming levels programmed by hot carrier injection from the channel
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/68Floating-gate IGFETs
    • H10D30/6891Floating-gate IGFETs characterised by the shapes, relative sizes or dispositions of the floating gate electrode
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/031Manufacture or treatment of data-storage electrodes
    • H10D64/035Manufacture or treatment of data-storage electrodes comprising conductor-insulator-conductor-insulator-semiconductor structures
GB8800379A 1987-02-02 1988-01-08 Eprom cell with integral select transistor Expired - Lifetime GB2200795B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US999887A 1987-02-02 1987-02-02

Publications (3)

Publication Number Publication Date
GB8800379D0 GB8800379D0 (en) 1988-02-10
GB2200795A GB2200795A (en) 1988-08-10
GB2200795B true GB2200795B (en) 1990-10-03

Family

ID=21740931

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8800379A Expired - Lifetime GB2200795B (en) 1987-02-02 1988-01-08 Eprom cell with integral select transistor

Country Status (3)

Country Link
JP (1) JPS63271973A (en)
KR (1) KR880010496A (en)
GB (1) GB2200795B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5268319A (en) * 1988-06-08 1993-12-07 Eliyahou Harari Highly compact EPROM and flash EEPROM devices
US5095344A (en) 1988-06-08 1992-03-10 Eliyahou Harari Highly compact eprom and flash eeprom devices
US5268318A (en) * 1988-06-08 1993-12-07 Eliyahou Harari Highly compact EPROM and flash EEPROM devices
EP0369676B1 (en) * 1988-11-17 1995-11-08 Seiko Instr Inc Semi-conductor non-volatile memory.
US5262987A (en) * 1988-11-17 1993-11-16 Seiko Instruments Inc. Floating gate semiconductor nonvolatile memory having impurity doped regions for low voltage operation
JPH03102878A (en) * 1989-09-18 1991-04-30 Seiko Instr Inc Electrically erasable nonvolatile semiconductor memory
IT1236980B (en) * 1989-12-22 1993-05-12 Sgs Thomson Microelectronics NON-VOLATILE EPROM MEMORY CELL WITH DIVIDED GATE AND SELF-ALIGNED FIELD INSULATION PROCESS FOR OBTAINING THE ABOVE CELL
US5572054A (en) * 1990-01-22 1996-11-05 Silicon Storage Technology, Inc. Method of operating a single transistor non-volatile electrically alterable semiconductor memory device
CA2051686C (en) * 1990-01-22 2001-10-23 Bing Yeh Single transistor non-volatile electrically alterable semiconductor memory device with a re-crystallized floating gate
JPH088318B2 (en) * 1990-05-09 1996-01-29 株式会社東芝 Method for manufacturing non-volatile semiconductor memory device
JPH0424969A (en) * 1990-05-15 1992-01-28 Toshiba Corp semiconductor storage device
FR2672434A1 (en) * 1991-01-31 1992-08-07 Gemplus Card Int OXIDE BREAKING MOS FUSE.
JP3854629B2 (en) * 1991-04-09 2006-12-06 シリコン・ストーリッジ・テクノロジー・インク Memory array device, memory cell device and programming method thereof
US5424567A (en) * 1991-05-15 1995-06-13 North American Philips Corporation Protected programmable transistor with reduced parasitic capacitances and method of fabrication
JP2004186452A (en) * 2002-12-04 2004-07-02 Renesas Technology Corp Nonvolatile semiconductor memory device and manufacturing method thereof
JP2010062594A (en) * 2009-12-18 2010-03-18 Renesas Technology Corp Non-volatile semiconductor storage device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2077492A (en) * 1980-06-04 1981-12-16 Ates Componenti Elettron Electrically alterable nonvolatile floating gate memory cell
EP0211632A2 (en) * 1985-08-02 1987-02-25 WaferScale Integration Inc. Self-aligned split gate EPROM

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2077492A (en) * 1980-06-04 1981-12-16 Ates Componenti Elettron Electrically alterable nonvolatile floating gate memory cell
EP0211632A2 (en) * 1985-08-02 1987-02-25 WaferScale Integration Inc. Self-aligned split gate EPROM

Also Published As

Publication number Publication date
JPS63271973A (en) 1988-11-09
GB8800379D0 (en) 1988-02-10
GB2200795A (en) 1988-08-10
KR880010496A (en) 1988-10-10

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee