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GB2297648B - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
GB2297648B
GB2297648B GB9601877A GB9601877A GB2297648B GB 2297648 B GB2297648 B GB 2297648B GB 9601877 A GB9601877 A GB 9601877A GB 9601877 A GB9601877 A GB 9601877A GB 2297648 B GB2297648 B GB 2297648B
Authority
GB
United Kingdom
Prior art keywords
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9601877A
Other versions
GB9601877D0 (en
GB2297648A (en
Inventor
Ji-Hong Ahn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019910015250A external-priority patent/KR940009611B1/en
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority claimed from GB9218177A external-priority patent/GB2259187B/en
Publication of GB9601877D0 publication Critical patent/GB9601877D0/en
Publication of GB2297648A publication Critical patent/GB2297648A/en
Application granted granted Critical
Publication of GB2297648B publication Critical patent/GB2297648B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/30DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H10B12/318DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor the storage electrode having multiple segments
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/01Manufacture or treatment
    • H10B12/02Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03Making the capacitor or connections thereto
    • H10B12/033Making the capacitor or connections thereto the capacitor extending over the transistor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Memories (AREA)
GB9601877A 1991-08-31 1992-08-26 Semiconductor device Expired - Fee Related GB2297648B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1019910015250A KR940009611B1 (en) 1991-08-31 1991-08-31 Capacitor Fabrication of Highly Integrated Semiconductor Devices Patterned Using Oxide Etch Masks (POEM Cells)
KR910021974 1991-11-30
KR920003339 1992-02-29
GB9218177A GB2259187B (en) 1991-08-31 1992-08-26 Semiconductor device

Publications (3)

Publication Number Publication Date
GB9601877D0 GB9601877D0 (en) 1996-04-03
GB2297648A GB2297648A (en) 1996-08-07
GB2297648B true GB2297648B (en) 1996-10-23

Family

ID=27450924

Family Applications (2)

Application Number Title Priority Date Filing Date
GB9601877A Expired - Fee Related GB2297648B (en) 1991-08-31 1992-08-26 Semiconductor device
GB9521179A Expired - Fee Related GB2293690B (en) 1991-08-31 1992-08-26 Manufacturing method for a semiconductor device

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB9521179A Expired - Fee Related GB2293690B (en) 1991-08-31 1992-08-26 Manufacturing method for a semiconductor device

Country Status (1)

Country Link
GB (2) GB2297648B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739060A (en) * 1996-08-16 1998-04-14 United Microelecrtronics Corporation Method of fabricating a capacitor structure for a semiconductor memory device
DE19637389C1 (en) * 1996-09-13 1997-10-16 Siemens Ag High packing density DRAM cell array production
JPH10229172A (en) * 1997-01-06 1998-08-25 Texas Instr Inc <Ti> Method of forming lower electrode of dram-cell-stacked capacitor
NL1006113C2 (en) * 1997-05-22 1998-11-25 United Microelectronics Corp Forming DRAM cell containing data storage capacitor, used for computer memory chips

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0443439A2 (en) * 1990-02-23 1991-08-28 INSTITUT FÜR HALBLEITERPHYSIK FRANKFURT (ODER) GmbH One-transistor-storage cell device and method for making the same
GB2250377A (en) * 1990-11-29 1992-06-03 Samsung Electronics Co Ltd Method for manufacturing a semiconductor device with villus type capacitor
GB2252447A (en) * 1991-01-30 1992-08-05 Samsung Electronics Co Ltd Highly integrated semiconductor DRAM

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910010043B1 (en) * 1988-07-28 1991-12-10 한국전기통신공사 Fine Line Width Formation Method Using Spacer
JPH0338061A (en) * 1989-07-05 1991-02-19 Fujitsu Ltd Semiconductor memory
US5084405A (en) * 1991-06-07 1992-01-28 Micron Technology, Inc. Process to fabricate a double ring stacked cell structure

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0443439A2 (en) * 1990-02-23 1991-08-28 INSTITUT FÜR HALBLEITERPHYSIK FRANKFURT (ODER) GmbH One-transistor-storage cell device and method for making the same
GB2250377A (en) * 1990-11-29 1992-06-03 Samsung Electronics Co Ltd Method for manufacturing a semiconductor device with villus type capacitor
GB2252447A (en) * 1991-01-30 1992-08-05 Samsung Electronics Co Ltd Highly integrated semiconductor DRAM

Also Published As

Publication number Publication date
GB2293690B (en) 1996-06-19
GB9601877D0 (en) 1996-04-03
GB2293690A (en) 1996-04-03
GB9521179D0 (en) 1995-12-20
GB2297648A (en) 1996-08-07

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20100826