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GB2270379B - Lattice interference-type displacement detection equipment - Google Patents

Lattice interference-type displacement detection equipment

Info

Publication number
GB2270379B
GB2270379B GB9218602A GB9218602A GB2270379B GB 2270379 B GB2270379 B GB 2270379B GB 9218602 A GB9218602 A GB 9218602A GB 9218602 A GB9218602 A GB 9218602A GB 2270379 B GB2270379 B GB 2270379B
Authority
GB
United Kingdom
Prior art keywords
detection equipment
displacement detection
type displacement
lattice interference
lattice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9218602A
Other versions
GB2270379A (en
GB9218602D0 (en
Inventor
Soichi Sato
Masaki Tomiya
Tatsuo Itabashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to GB9218602A priority Critical patent/GB2270379B/en
Publication of GB9218602D0 publication Critical patent/GB9218602D0/en
Publication of GB2270379A publication Critical patent/GB2270379A/en
Application granted granted Critical
Publication of GB2270379B publication Critical patent/GB2270379B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
GB9218602A 1992-09-02 1992-09-02 Lattice interference-type displacement detection equipment Expired - Fee Related GB2270379B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9218602A GB2270379B (en) 1992-09-02 1992-09-02 Lattice interference-type displacement detection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9218602A GB2270379B (en) 1992-09-02 1992-09-02 Lattice interference-type displacement detection equipment

Publications (3)

Publication Number Publication Date
GB9218602D0 GB9218602D0 (en) 1992-10-14
GB2270379A GB2270379A (en) 1994-03-09
GB2270379B true GB2270379B (en) 1997-01-22

Family

ID=10721301

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9218602A Expired - Fee Related GB2270379B (en) 1992-09-02 1992-09-02 Lattice interference-type displacement detection equipment

Country Status (1)

Country Link
GB (1) GB2270379B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000234959A (en) * 1999-02-12 2000-08-29 Ando Electric Co Ltd Wavelength variation measurement apparatus and variable wave length light source

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0718714B2 (en) * 1988-05-10 1995-03-06 キヤノン株式会社 encoder
US5035507A (en) * 1988-12-21 1991-07-30 Mitutoyo Corporation Grating-interference type displacement meter apparatus
US5021649A (en) * 1989-03-28 1991-06-04 Canon Kabushiki Kaisha Relief diffraction grating encoder
US5146085A (en) * 1989-05-12 1992-09-08 Canon Kabushiki Kaisha Encoder with high resolving power and accuracy

Also Published As

Publication number Publication date
GB2270379A (en) 1994-03-09
GB9218602D0 (en) 1992-10-14

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20070902