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GB2267761B - Method of electrically testing a sample - Google Patents

Method of electrically testing a sample

Info

Publication number
GB2267761B
GB2267761B GB9211583A GB9211583A GB2267761B GB 2267761 B GB2267761 B GB 2267761B GB 9211583 A GB9211583 A GB 9211583A GB 9211583 A GB9211583 A GB 9211583A GB 2267761 B GB2267761 B GB 2267761B
Authority
GB
United Kingdom
Prior art keywords
sample
electrically testing
testing
electrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9211583A
Other versions
GB2267761A (en
GB9211583D0 (en
Inventor
Julian Darryn White
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Europe Ltd
Original Assignee
Hitachi Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Europe Ltd filed Critical Hitachi Europe Ltd
Priority to GB9211583A priority Critical patent/GB2267761B/en
Publication of GB9211583D0 publication Critical patent/GB9211583D0/en
Publication of GB2267761A publication Critical patent/GB2267761A/en
Application granted granted Critical
Publication of GB2267761B publication Critical patent/GB2267761B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
    • G11C29/50—Marginal testing, e.g. race, voltage or current testing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
GB9211583A 1992-06-02 1992-06-02 Method of electrically testing a sample Expired - Fee Related GB2267761B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9211583A GB2267761B (en) 1992-06-02 1992-06-02 Method of electrically testing a sample

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9211583A GB2267761B (en) 1992-06-02 1992-06-02 Method of electrically testing a sample

Publications (3)

Publication Number Publication Date
GB9211583D0 GB9211583D0 (en) 1992-07-15
GB2267761A GB2267761A (en) 1993-12-15
GB2267761B true GB2267761B (en) 1996-01-17

Family

ID=10716343

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9211583A Expired - Fee Related GB2267761B (en) 1992-06-02 1992-06-02 Method of electrically testing a sample

Country Status (1)

Country Link
GB (1) GB2267761B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102483428A (en) * 2009-09-03 2012-05-30 于利奇研究中心有限公司 Method for measuring the force interaction that is caused by a sample

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9724642D0 (en) 1997-11-21 1998-01-21 British Tech Group Single electron devices
JP3735701B2 (en) * 1999-03-31 2006-01-18 独立行政法人産業技術総合研究所 Electrical measurement prober and method of measuring electrical characteristics using the prober
JP5916861B2 (en) * 2011-08-16 2016-05-11 エレツ ハラーミ System for contactless control of field effect transistors

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343993A (en) * 1979-09-20 1982-08-10 International Business Machines Corporation Scanning tunneling microscope
US4575822A (en) * 1983-02-15 1986-03-11 The Board Of Trustees Of The Leland Stanford Junior University Method and means for data storage using tunnel current data readout
US4826732A (en) * 1987-03-16 1989-05-02 Xerox Corporation Recording medium
EP0401852A2 (en) * 1989-06-09 1990-12-12 Hitachi, Ltd. Surface microscope

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4343993A (en) * 1979-09-20 1982-08-10 International Business Machines Corporation Scanning tunneling microscope
US4575822A (en) * 1983-02-15 1986-03-11 The Board Of Trustees Of The Leland Stanford Junior University Method and means for data storage using tunnel current data readout
US4826732A (en) * 1987-03-16 1989-05-02 Xerox Corporation Recording medium
EP0401852A2 (en) * 1989-06-09 1990-12-12 Hitachi, Ltd. Surface microscope

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
"NEW SCIENTIST", 7 March 1992, pages 42-46 "Nanotechnology rules, OK!" (especially pages 43 and 45 *
itive atom probe" especially pages 222 and 223 *
JOURNAL OF MICROSCOPY vol154 pt3 June 1989 p215-225 A CEREZO"Materials analysis with a position-sens *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102483428A (en) * 2009-09-03 2012-05-30 于利奇研究中心有限公司 Method for measuring the force interaction that is caused by a sample
CN102483428B (en) * 2009-09-03 2016-05-11 于利奇研究中心有限公司 For measuring the interactional method of the power being caused by sample

Also Published As

Publication number Publication date
GB2267761A (en) 1993-12-15
GB9211583D0 (en) 1992-07-15

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20050602