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GB2262649B - Energy analyser - Google Patents

Energy analyser

Info

Publication number
GB2262649B
GB2262649B GB9126507A GB9126507A GB2262649B GB 2262649 B GB2262649 B GB 2262649B GB 9126507 A GB9126507 A GB 9126507A GB 9126507 A GB9126507 A GB 9126507A GB 2262649 B GB2262649 B GB 2262649B
Authority
GB
United Kingdom
Prior art keywords
energy analyser
analyser
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9126507A
Other versions
GB9126507D0 (en
GB2262649A (en
Inventor
Simon Gareth Ingram
Nicholas St John Braithwaite
Nigel Roderick Couch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
GEC Marconi Ltd
Marconi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GEC Marconi Ltd, Marconi Co Ltd filed Critical GEC Marconi Ltd
Priority to GB9126507A priority Critical patent/GB2262649B/en
Publication of GB9126507D0 publication Critical patent/GB9126507D0/en
Priority to PCT/GB1992/002308 priority patent/WO1993012534A1/en
Publication of GB2262649A publication Critical patent/GB2262649A/en
Application granted granted Critical
Publication of GB2262649B publication Critical patent/GB2262649B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2444—Electron Multiplier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
GB9126507A 1991-12-13 1991-12-13 Energy analyser Expired - Fee Related GB2262649B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB9126507A GB2262649B (en) 1991-12-13 1991-12-13 Energy analyser
PCT/GB1992/002308 WO1993012534A1 (en) 1991-12-13 1992-12-11 Energy analyser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9126507A GB2262649B (en) 1991-12-13 1991-12-13 Energy analyser

Publications (3)

Publication Number Publication Date
GB9126507D0 GB9126507D0 (en) 1992-02-12
GB2262649A GB2262649A (en) 1993-06-23
GB2262649B true GB2262649B (en) 1995-03-01

Family

ID=10706219

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9126507A Expired - Fee Related GB2262649B (en) 1991-12-13 1991-12-13 Energy analyser

Country Status (2)

Country Link
GB (1) GB2262649B (en)
WO (1) WO1993012534A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5386115A (en) * 1993-09-22 1995-01-31 Westinghouse Electric Corporation Solid state micro-machined mass spectrograph universal gas detection sensor
US5492867A (en) * 1993-09-22 1996-02-20 Westinghouse Elect. Corp. Method for manufacturing a miniaturized solid state mass spectrograph
US5451784A (en) * 1994-10-31 1995-09-19 Applied Materials, Inc. Composite diagnostic wafer for semiconductor wafer processing systems
US5633497A (en) * 1995-11-03 1997-05-27 Varian Associates, Inc. Surface coating to improve performance of ion trap mass spectrometers
GB2315362A (en) * 1996-07-12 1998-01-28 Analytical Precision Ltd Mass spectrometers
DE10258118A1 (en) * 2002-12-06 2004-07-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for measuring and determining charge carrier streams and parameters derived from them used in industrial coating devices comprises a sensor formed as a Faraday collector connected to an evaluation and control device
FR2961009A1 (en) 2010-06-03 2011-12-09 Ion Beam Services SECONDARY ELECTRON ELECTRON DETECTOR
FR2961010A1 (en) * 2010-06-03 2011-12-09 Ion Beam Services DOSE MEASURING DEVICE FOR ION IMPLANTATION IN PLASMA IMMERSION MODE
DE102014110334A1 (en) * 2014-07-22 2016-01-28 Krohne Messtechnik Gmbh Method for separating electrically charged particles with respect to their energy and energy filters

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2003319A (en) * 1977-08-24 1979-03-07 Tokyo Shibaura Electric Co Radiation detection element
US4608493A (en) * 1983-05-09 1986-08-26 Sony Corporation Faraday cup
US4703256A (en) * 1983-05-09 1987-10-27 Sony Corporation Faraday cups
WO1990003043A1 (en) * 1988-09-14 1990-03-22 The University Of Manchester Institute Of Science And Technology Charged particle multidetector
WO1991000612A1 (en) * 1989-06-29 1991-01-10 Fisons Plc Charge sensor and spectrometers incorporating it

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3260844A (en) * 1964-01-31 1966-07-12 Atomic Energy Commission Calutron with means for reducing low frequency radio frequency signals in an ion beam
GB1596105A (en) * 1978-02-20 1981-08-19 Nat Res Dev Electrostatic engergy analysis

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2003319A (en) * 1977-08-24 1979-03-07 Tokyo Shibaura Electric Co Radiation detection element
US4608493A (en) * 1983-05-09 1986-08-26 Sony Corporation Faraday cup
US4703256A (en) * 1983-05-09 1987-10-27 Sony Corporation Faraday cups
WO1990003043A1 (en) * 1988-09-14 1990-03-22 The University Of Manchester Institute Of Science And Technology Charged particle multidetector
WO1991000612A1 (en) * 1989-06-29 1991-01-10 Fisons Plc Charge sensor and spectrometers incorporating it

Also Published As

Publication number Publication date
GB9126507D0 (en) 1992-02-12
GB2262649A (en) 1993-06-23
WO1993012534A1 (en) 1993-06-24

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19951213