GB2244176B - Method and apparatus for forming a conductive pattern on an integrated circuit - Google Patents
Method and apparatus for forming a conductive pattern on an integrated circuitInfo
- Publication number
- GB2244176B GB2244176B GB9108848A GB9108848A GB2244176B GB 2244176 B GB2244176 B GB 2244176B GB 9108848 A GB9108848 A GB 9108848A GB 9108848 A GB9108848 A GB 9108848A GB 2244176 B GB2244176 B GB 2244176B
- Authority
- GB
- United Kingdom
- Prior art keywords
- integrated circuit
- pads
- photoresist
- exposed
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H10W72/20—
-
- H10W72/01255—
-
- H10W72/251—
-
- H10W72/252—
-
- H10W72/923—
-
- H10W72/9445—
-
- H10W72/952—
Landscapes
- Wire Bonding (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
In a method for processing an integrated circuit of the type having conductive die bond pads thereon the fabricated IC is coated with a layer of photoresist (16) which is exposed to create a pattern which includes windows (18-29) over the pads and a connection between at least two of the pads. The exposed photoresist is dissolved and the exposed portions are plated with gold to a depth sufficient for creating a bump over each die bond pad suitable for bonding a conductive lead thereto. The remaining photoresist is dissolved thus leaving a plurality of bumps for attaching conductive leads thereto and an electrical connection (24, 26, 28) between at least two of the bumps. <IMAGE>
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52593590A | 1990-05-18 | 1990-05-18 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB9108848D0 GB9108848D0 (en) | 1991-06-12 |
| GB2244176A GB2244176A (en) | 1991-11-20 |
| GB2244176B true GB2244176B (en) | 1994-10-05 |
Family
ID=24095225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB9108848A Expired - Fee Related GB2244176B (en) | 1990-05-18 | 1991-04-24 | Method and apparatus for forming a conductive pattern on an integrated circuit |
Country Status (2)
| Country | Link |
|---|---|
| GB (1) | GB2244176B (en) |
| HK (1) | HK22295A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2263018B (en) * | 1991-03-23 | 1995-06-21 | Sony Corp | Static random access memories |
| GB2254487B (en) * | 1991-03-23 | 1995-06-21 | Sony Corp | Full CMOS type static random access memories |
| KR100335875B1 (en) * | 1998-07-03 | 2002-05-08 | 아오야기 모리키 | Wiring board for bump bonding, semiconductor device assembled from the wiring board and manufacturing method of wiring board for bump bonding |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1567808A (en) * | 1976-07-15 | 1980-05-21 | Nippon Telegraph & Telephone | Semiconductor devices and method of manufacturing the same |
| US4394678A (en) * | 1979-09-19 | 1983-07-19 | Motorola, Inc. | Elevated edge-protected bonding pedestals for semiconductor devices |
| GB2180991A (en) * | 1985-08-28 | 1987-04-08 | Mitsubishi Electric Corp | Silicide electrode for semiconductor device |
| US4927505A (en) * | 1988-07-05 | 1990-05-22 | Motorola Inc. | Metallization scheme providing adhesion and barrier properties |
-
1991
- 1991-04-24 GB GB9108848A patent/GB2244176B/en not_active Expired - Fee Related
-
1995
- 1995-02-16 HK HK22295A patent/HK22295A/en not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1567808A (en) * | 1976-07-15 | 1980-05-21 | Nippon Telegraph & Telephone | Semiconductor devices and method of manufacturing the same |
| US4394678A (en) * | 1979-09-19 | 1983-07-19 | Motorola, Inc. | Elevated edge-protected bonding pedestals for semiconductor devices |
| GB2180991A (en) * | 1985-08-28 | 1987-04-08 | Mitsubishi Electric Corp | Silicide electrode for semiconductor device |
| US4927505A (en) * | 1988-07-05 | 1990-05-22 | Motorola Inc. | Metallization scheme providing adhesion and barrier properties |
Also Published As
| Publication number | Publication date |
|---|---|
| GB9108848D0 (en) | 1991-06-12 |
| GB2244176A (en) | 1991-11-20 |
| HK22295A (en) | 1995-02-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
| PCNP | Patent ceased through non-payment of renewal fee |