GB2139348B - Automatic aligment system - Google Patents

Automatic aligment system

Info

Publication number: GB2139348B
Authority: GB; United Kingdom
Prior art keywords: aligment; automatic; automatic aligment; aligment system
Prior art date: 1983-03-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB08407592A

Other versions

GB8407592D0 (en

GB2139348A (en

Inventor

Shinichi Tamura

Masanori Uga

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Disco Corp

Original Assignee

Disco Abrasive Systems Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-03-26

Filing date

1984-03-23

Publication date

1986-10-01

1983-03-26 Priority claimed from JP58051019A external-priority patent/JPS59176610A/en

1983-09-05 Priority claimed from JP58162031A external-priority patent/JPS6054454A/en

1984-02-24 Priority claimed from JP59032576A external-priority patent/JPS60177647A/en

1984-03-23 Application filed by Disco Abrasive Systems Ltd filed Critical Disco Abrasive Systems Ltd

1984-05-02 Publication of GB8407592D0 publication Critical patent/GB8407592D0/en

1984-11-07 Publication of GB2139348A publication Critical patent/GB2139348A/en

1986-10-01 Application granted granted Critical

1986-10-01 Publication of GB2139348B publication Critical patent/GB2139348B/en

Status Expired legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Multimedia (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Length Measuring Devices By Optical Means (AREA)
Dicing (AREA)

GB08407592A 1983-03-26 1984-03-23 Automatic aligment system Expired GB2139348B (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP58051019A JPS59176610A (en)	1983-03-26	1983-03-26	Straight line detection method for detected object and straight line detection device for detected object
JP58162031A JPS6054454A (en)	1983-09-05	1983-09-05	Automatic precise positioning system
JP59032576A JPS60177647A (en)	1984-02-24	1984-02-24	Automatic precision positioning system

Publications (3)

Publication Number	Publication Date
GB8407592D0 GB8407592D0 (en)	1984-05-02
GB2139348A GB2139348A (en)	1984-11-07
GB2139348B true GB2139348B (en)	1986-10-01

Family

ID=27287759

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB08407592A Expired GB2139348B (en)	1983-03-26	1984-03-23	Automatic aligment system

Country Status (2)

Country	Link
KR (1)	KR900002508B1 (en)
GB (1)	GB2139348B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2146427B (en) *	1983-08-01	1987-10-21	Canon Kk	Semiconductor manufacture
US4794736A (en) *	1985-12-27	1989-01-03	Citizen Watch Co., Ltd.	Arrangement for mechanically and accurately processing a workpiece with a position detecting pattern or patterns
JPH027992A (en) *	1988-06-27	1990-01-11	Brother Ind Ltd	Pattern registering machine
JPH03232215A (en) *	1990-02-08	1991-10-16	Toshiba Corp	Method for alignment
DE69019951T2 (en) *	1990-02-22	1995-10-26	Komori Printing Mach	Apparatus for examining printed matter and corresponding method.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS52140278A (en) *	1976-05-19	1977-11-22	Hitachi Ltd	Position detector
US4200861A (en) *	1978-09-01	1980-04-29	View Engineering, Inc.	Pattern recognition apparatus and method
JPS5915381B2 (en) *	1978-10-16	1984-04-09	日本電信電話株式会社	Pattern inspection method
EP0020832A1 (en) *	1979-06-26	1981-01-07	Excellon Industries	Pattern recognition system and method for using this system
JPS56132505A (en) *	1980-03-24	1981-10-16	Hitachi Ltd	Position detecting method
US4325077A (en) *	1980-05-19	1982-04-13	Gca Corporation	Automatic wafer alignment system
DE3175773D1 (en) *	1980-06-10	1987-02-05	Fujitsu Ltd	Pattern position recognition apparatus
JPS57157378A (en) *	1981-03-25	1982-09-28	Hitachi Ltd	Setting method of binary-coded threshold level

1984
- 1984-03-23 GB GB08407592A patent/GB2139348B/en not_active Expired
- 1984-03-26 KR KR1019840001548A patent/KR900002508B1/en not_active Expired

Also Published As

Publication number	Publication date
KR900002508B1 (en)	1990-04-16
KR840008221A (en)	1984-12-13
GB8407592D0 (en)	1984-05-02
GB2139348A (en)	1984-11-07

Publication	Publication Date	Title
EP0116977A3 (en)	1986-01-08	Automatic set-up system
EP0134109A3 (en)	1986-03-05	Automatic transaction system
GB8417555D0 (en)	1984-08-15	Automated system
ZA845680B (en)	1985-03-27	Wear-parts system
EP0121364A3 (en)	1987-07-01	Automatic read system for peripheral-controller
DE3466099D1 (en)	1987-10-15	Automatic write system for peripheral-controller
GB2137718B (en)	1986-07-02	Flow-stopping system
GB8430653D0 (en)	1985-01-16	Automated system
GB8323820D0 (en)	1983-10-05	Automatic toolchanger system
GB8406613D0 (en)	1984-04-18	Magnetic-electronic system
GB8603685D0 (en)	1986-03-19	Combined insufflation-irrigation system
GB2143886B (en)	1986-11-19	Formwok system
GB8318633D0 (en)	1983-08-10	Automatic multiplex system
GB2139348B (en)	1986-10-01	Automatic aligment system
GB8416599D0 (en)	1984-08-01	Mooring system
GB8411068D0 (en)	1984-06-06	Connection system
EP0138701A3 (en)	1985-06-19	Goniostelemeter system
CS337083A1 (en)	1985-08-31	Vyfukovy system turbodmychadlem preplnovaneho spalovaciho motoru
GB2140647B (en)	1986-05-08	3d-television system
DE3469963D1 (en)	1988-04-21	Plan pick-up system
GB2146565B (en)	1986-12-31	Automatic welding system
GB8324038D0 (en)	1983-10-12	Automatic brake
GB8412567D0 (en)	1984-06-20	Connection system
GB8407881D0 (en)	1984-05-02	Automatic transmisions
GB8407883D0 (en)	1984-05-02	Automatic transmisions

Legal Events

Date	Code	Title	Description
2004-04-14	PE20	Patent expired after termination of 20 years	Effective date: 20040322