GB2135123B - Multi-level metallization structure for semiconductor device and method of making same - Google Patents

Multi-level metallization structure for semiconductor device and method of making same

Info

Publication number: GB2135123B
Authority: GB; United Kingdom
Prior art keywords: semiconductor device; making same; metallization structure; level metallization; level
Prior art date: 1983-02-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB08402109A

Other versions

GB8402109D0 (en

GB2135123A (en

Inventor

Albert Wayne Fisher

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

RCA Corp

Original Assignee

RCA Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-02-10

Filing date

1984-01-26

Publication date

1987-05-20

1984-01-26 Application filed by RCA Corp filed Critical RCA Corp

1984-02-29 Publication of GB8402109D0 publication Critical patent/GB8402109D0/en

1984-08-22 Publication of GB2135123A publication Critical patent/GB2135123A/en

1987-05-20 Application granted granted Critical

1987-05-20 Publication of GB2135123B publication Critical patent/GB2135123B/en

Status Expired legal-status Critical Current

Classifications

- H10W20/064—
- H10W72/071—
- H10W20/056—
- H10W20/4405—

GB08402109A 1983-02-10 1984-01-26 Multi-level metallization structure for semiconductor device and method of making same Expired GB2135123B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US46564083A	1983-02-10	1983-02-10

Publications (3)

Publication Number	Publication Date
GB8402109D0 GB8402109D0 (en)	1984-02-29
GB2135123A GB2135123A (en)	1984-08-22
GB2135123B true GB2135123B (en)	1987-05-20

Family

ID=23848579

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB08402109A Expired GB2135123B (en)	1983-02-10	1984-01-26	Multi-level metallization structure for semiconductor device and method of making same

Country Status (7)

Country	Link
JP (1)	JPH0666313B2 (en)
KR (1)	KR910008104B1 (en)
CA (1)	CA1209281A (en)
GB (1)	GB2135123B (en)
IT (1)	IT1213136B (en)
SE (1)	SE501466C2 (en)
YU (1)	YU18284A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0763064B2 (en)	1986-03-31	1995-07-05	株式会社日立製作所	Wiring connection method for IC element
JPH0719841B2 (en) *	1987-10-02	1995-03-06	株式会社東芝	Semiconductor device
USRE36475E (en)	1993-09-15	1999-12-28	Hyundai Electronics Industries Co., Ltd.	Method of forming a via plug in a semiconductor device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS51112292A (en) *	1975-03-28	1976-10-04	Hitachi Ltd	Semiconductor device
JPS55156365A (en) *	1979-05-24	1980-12-05	Toshiba Corp	Semiconductor device

1984
- 1984-01-26 GB GB08402109A patent/GB2135123B/en not_active Expired
- 1984-01-31 CA CA000446407A patent/CA1209281A/en not_active Expired
- 1984-02-02 YU YU00182/84A patent/YU18284A/en unknown
- 1984-02-06 SE SE8400592A patent/SE501466C2/en unknown
- 1984-02-09 IT IT8419546A patent/IT1213136B/en active
- 1984-02-09 JP JP59024197A patent/JPH0666313B2/en not_active Expired - Lifetime
- 1984-02-10 KR KR1019840000622A patent/KR910008104B1/en not_active Expired

Also Published As

Publication number	Publication date
GB8402109D0 (en)	1984-02-29
SE8400592D0 (en)	1984-02-06
JPS59205739A (en)	1984-11-21
KR910008104B1 (en)	1991-10-07
SE8400592L (en)	1984-08-11
YU18284A (en)	1987-12-31
IT8419546A0 (en)	1984-02-09
GB2135123A (en)	1984-08-22
IT1213136B (en)	1989-12-14
KR840008215A (en)	1984-12-13
SE501466C2 (en)	1995-02-20
CA1209281A (en)	1986-08-05
JPH0666313B2 (en)	1994-08-24

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Legal Events

Date	Code	Title	Description
1997-09-17	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 19970126