GB2129124B - Aligning mask with body - Google Patents

Aligning mask with body

Info

Publication number: GB2129124B
Authority: GB; United Kingdom
Prior art keywords: aligning mask; aligning; mask
Prior art date: 1982-10-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB08229616A

Other versions

GB2129124A (en

Inventor

Arthur Desmond Haigh

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ferranti International PLC

Original Assignee

Ferranti PLC

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-10-16

Filing date

1982-10-16

Publication date

1985-12-11

1982-10-16 Application filed by Ferranti PLC filed Critical Ferranti PLC

1982-10-16 Priority to GB08229616A priority Critical patent/GB2129124B/en

1984-05-10 Publication of GB2129124A publication Critical patent/GB2129124A/en

1985-12-11 Application granted granted Critical

1985-12-11 Publication of GB2129124B publication Critical patent/GB2129124B/en

Status Expired legal-status Critical Current

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7065—Production of alignment light, e.g. light source, control of coherence, polarization, pulse length, wavelength
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

GB08229616A 1982-10-16 1982-10-16 Aligning mask with body Expired GB2129124B (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
GB08229616A GB2129124B (en)	1982-10-16	1982-10-16	Aligning mask with body

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GB08229616A GB2129124B (en)	1982-10-16	1982-10-16	Aligning mask with body

Publications (2)

Publication Number	Publication Date
GB2129124A GB2129124A (en)	1984-05-10
GB2129124B true GB2129124B (en)	1985-12-11

Family

ID=10533651

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB08229616A Expired GB2129124B (en)	1982-10-16	1982-10-16	Aligning mask with body

Country Status (1)

Country	Link
GB (1)	GB2129124B (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1168971A (en) *	1966-07-08	1969-10-29	Melvin Seymour Cook	Improvements in or relating to Optical Measurement of Length
NL6904621A (en) *	1969-03-25	1970-09-29
DE2539206A1 (en) *	1975-09-03	1977-03-17	Siemens Ag	METHOD FOR AUTOMATIC ADJUSTMENT OF SEMI-CONDUCTOR DISCS
GB2086572B (en) *	1980-10-27	1984-05-10	Rosemount Eng Co Ltd	Differential pressure measuring apparatus

1982
- 1982-10-16 GB GB08229616A patent/GB2129124B/en not_active Expired

Also Published As

Publication number	Publication date
GB2129124A (en)	1984-05-10

Publication	Publication Date	Title
DE3365241D1 (en)	1986-09-18	Cannulae
GB8314676D0 (en)	1983-06-29	Integrated weblocker
GB8300312D0 (en)	1983-02-09	Circuitry
GB8320828D0 (en)	1983-09-01	Respirator
ZA836275B (en)	1984-04-25	Enhanced flavor-releasing agent
DE3276101D1 (en)	1987-05-27	Esophageal-endotracheal airway
GB2131162B (en)	1986-04-30	Aligning objects
GB2117873B (en)	1985-08-29	Valve arrangements
GB2118252B (en)	1985-08-14	Valve actuator-covers
GB2120753B (en)	1985-09-11	Valve
GB2127295B (en)	1986-08-13	Catheter with valve
GB2116047B (en)	1985-05-01	Catheter
GB2133507B (en)	1986-01-02	Valve
GB8321477D0 (en)	1983-09-14	Casts
GB2116677B (en)	1985-09-25	Two way valve
GB2117497B (en)	1985-05-22	Valve
GB2132318B (en)	1986-03-12	Valve
GB2133501B (en)	1986-01-29	Valve
GB2129124B (en)	1985-12-11	Aligning mask with body
GB2125148B (en)	1985-11-13	Valve
GB2133503B (en)	1986-10-15	Valve
GB2170578B (en)	1987-01-21	Valve
PL245201A1 (en)	1984-08-13	Clawler-type undercarriage
GB2131297B (en)	1986-04-30	Body engaging electrode
GB2119064B (en)	1985-06-05	Valve

Legal Events

Date	Code	Title	Description
1988-06-08	732	Registration of transactions, instruments or events in the register (sect. 32/1977)
1992-09-09	732	Registration of transactions, instruments or events in the register (sect. 32/1977)
1995-06-14	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 19941016