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GB2126716B - Automatic checking of surfaces - Google Patents

Automatic checking of surfaces

Info

Publication number
GB2126716B
GB2126716B GB08321411A GB8321411A GB2126716B GB 2126716 B GB2126716 B GB 2126716B GB 08321411 A GB08321411 A GB 08321411A GB 8321411 A GB8321411 A GB 8321411A GB 2126716 B GB2126716 B GB 2126716B
Authority
GB
United Kingdom
Prior art keywords
automatic checking
checking
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08321411A
Other versions
GB8321411D0 (en
GB2126716A (en
Inventor
Dr Gerhard Benz
Eberhard Lohner
Gunter Schneider
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB8321411D0 publication Critical patent/GB8321411D0/en
Publication of GB2126716A publication Critical patent/GB2126716A/en
Application granted granted Critical
Publication of GB2126716B publication Critical patent/GB2126716B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB08321411A 1982-09-04 1983-08-09 Automatic checking of surfaces Expired GB2126716B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19823232885 DE3232885A1 (en) 1982-09-04 1982-09-04 METHOD FOR AUTOMATICALLY INSPECTING SURFACES

Publications (3)

Publication Number Publication Date
GB8321411D0 GB8321411D0 (en) 1983-09-07
GB2126716A GB2126716A (en) 1984-03-28
GB2126716B true GB2126716B (en) 1986-05-08

Family

ID=6172447

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08321411A Expired GB2126716B (en) 1982-09-04 1983-08-09 Automatic checking of surfaces

Country Status (3)

Country Link
JP (1) JPS5960344A (en)
DE (1) DE3232885A1 (en)
GB (1) GB2126716B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3540916A1 (en) * 1985-11-19 1987-05-21 Zeiss Carl Fa METHOD AND DEVICE FOR SCREEN LIGHT MICROSCOPIC DISPLAY OF OBJECTS IN THE DARK FIELD
US5428452A (en) * 1994-01-31 1995-06-27 The United States Of America As Represented By The Secretary Of The Air Force Optical fourier transform method for detecting irregularities upon two-dimensional sheet material such as film or tape
DE19510535A1 (en) * 1995-03-23 1996-09-26 Siemens Ag Defect detection method for glass or plastic body
DE19632763C2 (en) * 1996-08-14 1998-09-10 Holger Moritz Measuring head for the observation of photoresist development
DE19720308C2 (en) * 1997-05-15 1999-05-20 Parsytec Computer Gmbh Device for the continuous detection of defects by size and type on the surface of a moving material
US6236454B1 (en) 1997-12-15 2001-05-22 Applied Materials, Inc. Multiple beam scanner for an inspection system
DE19946520B4 (en) * 1999-09-28 2010-09-16 Parsytec Ag Apparatus and method for surface inspection of a continuously tapered strip material
CN1685220B (en) * 2002-09-30 2010-04-28 应用材料以色列股份有限公司 dark field detection system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5843681B2 (en) * 1972-06-16 1983-09-28 三菱電機株式会社 Hiyoumenjiyou Taikansokuuchi
DE2532603C3 (en) * 1975-07-21 1978-12-14 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optical device for determining the light exit angle
DE2727927C3 (en) * 1977-06-21 1980-01-24 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Device for the separate detection of light beams
DE2727926C3 (en) * 1977-06-21 1980-11-13 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Device for the detection of imperfections on the reflective surface of a web
JPS5599049A (en) * 1979-01-24 1980-07-28 Toshiba Corp Defect detector
WO1982001767A1 (en) * 1980-11-17 1982-05-27 Streight William E Surface roughness gauge and method

Also Published As

Publication number Publication date
GB8321411D0 (en) 1983-09-07
JPS5960344A (en) 1984-04-06
GB2126716A (en) 1984-03-28
DE3232885A1 (en) 1984-03-08

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee