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GB2117918B - Standing wave interferometer for measuring optical path differences - Google Patents

Standing wave interferometer for measuring optical path differences

Info

Publication number
GB2117918B
GB2117918B GB08308044A GB8308044A GB2117918B GB 2117918 B GB2117918 B GB 2117918B GB 08308044 A GB08308044 A GB 08308044A GB 8308044 A GB8308044 A GB 8308044A GB 2117918 B GB2117918 B GB 2117918B
Authority
GB
United Kingdom
Prior art keywords
standing wave
optical path
reflector
measuring optical
path differences
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08308044A
Other versions
GB8308044D0 (en
GB2117918A (en
Inventor
Hans Buchner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUHL FEINMESSZEUGFAB VEB
Original Assignee
SUHL FEINMESSZEUGFAB VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUHL FEINMESSZEUGFAB VEB filed Critical SUHL FEINMESSZEUGFAB VEB
Publication of GB8308044D0 publication Critical patent/GB8308044D0/en
Publication of GB2117918A publication Critical patent/GB2117918A/en
Application granted granted Critical
Publication of GB2117918B publication Critical patent/GB2117918B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention relates to a standing wave interferometer for measuring optical path differences in which a standing wave is produced between a monochromatic light source and a reflector. The displacement of the bulges and nodal points of the standing wave due to displacement of the reflector is sampled by a sampling normal inserted into the standing wave and having two photodetecting layers at a mutual space of kx lambda /8, k being any desired odd integer. The sampling signals are fed into an electronic evaluation unit where these are processed. The measuring object, when having a well-reflecting surface can be the reflector itself, without the necessity of adjusting the same accurately to the incident light beam.
GB08308044A 1982-04-05 1983-03-24 Standing wave interferometer for measuring optical path differences Expired GB2117918B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD23873882 1982-04-05

Publications (3)

Publication Number Publication Date
GB8308044D0 GB8308044D0 (en) 1983-05-05
GB2117918A GB2117918A (en) 1983-10-19
GB2117918B true GB2117918B (en) 1986-04-30

Family

ID=5537705

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08308044A Expired GB2117918B (en) 1982-04-05 1983-03-24 Standing wave interferometer for measuring optical path differences

Country Status (5)

Country Link
US (1) US4571083A (en)
JP (1) JPS58200137A (en)
DE (1) DE3300369A1 (en)
FR (1) FR2524633B1 (en)
GB (1) GB2117918B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109642868A (en) * 2016-08-19 2019-04-16 国立大学法人香川大学 Optical characteristics measurement device and optical characteristics measuring method

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6070563A (en) * 1983-09-27 1985-04-22 Toshiba Corp High density spiral drawing device
DD236587A1 (en) * 1985-04-26 1986-06-11 Ilmenau Tech Hochschule INCREMENTAL STANDING WAVE SENSOR
GB2203259A (en) * 1987-02-26 1988-10-12 Plessey Co Plc Polarisation rotator associated with reflective surface
DE3826194A1 (en) * 1988-08-02 1990-02-15 Hommelwerke Gmbh Device for length measurement
GB8920364D0 (en) * 1989-09-08 1989-10-25 Downs Michael J Optical measuring instruments
DE3932663A1 (en) * 1989-09-29 1991-04-18 Hommelwerke Gmbh Standing wave sensor with partially transparent mirrors - has semiconducting laser with adjustable supply current and/or temp.
DD292519A5 (en) * 1990-03-13 1991-08-01 �������@������������@��k�� TRANSPARENT PHOTOELECTRIC ELEMENT
DD296549A5 (en) * 1990-07-13 1991-12-05 ����@�����@����@����@����@����K@����K`�����K@�������������@���k�� Standing wave interpolator
US5495767A (en) * 1994-07-26 1996-03-05 Alfred University Laser vibrometer
RU2177605C1 (en) * 2000-12-04 2001-12-27 Атнашев Виталий Борисович Spectrometry process and device for its realization ( variants )
DE10127018B4 (en) * 2001-06-01 2007-09-27 Forschungszentrum Jülich GmbH Photosensor for a transmitted light method for detecting the intensity profile of an optically standing wave
DE10127017B4 (en) * 2001-06-01 2007-11-29 Forschungszentrum Jülich GmbH Photosensor for a transmitted light method for detecting the intensity profile of an optically standing wave
DE10131608B4 (en) * 2001-06-29 2004-02-05 Forschungszentrum Jülich GmbH Photosensor for a transmitted light method for detecting the direction of movement of intensity maxima and intensity minima of an optical standing wave
RU2195693C1 (en) * 2001-12-17 2002-12-27 Атнашев Виталий Борисович Method of transmission and reception of optical signals and gear for its embodiment
RU2239917C2 (en) * 2002-01-11 2004-11-10 Институт физики им. Л.В. Киренского СО РАН Photodetector
RU2241280C2 (en) * 2002-01-21 2004-11-27 Институт физики им. Л.В. Киренского СО РАН Photodetector
RU2243615C2 (en) * 2002-02-28 2004-12-27 Институт физики им. Л.В. Киренского СО РАН Photodetector
RU2255306C2 (en) * 2002-03-20 2005-06-27 Институт физики им. Л.В. Киренского Сибирского отделения РАН Interferometer
RU2234055C2 (en) * 2002-10-14 2004-08-10 Специальное конструкторско-технологическое бюро "Наука" КНЦ СО РАН Interferometer
WO2005008201A1 (en) * 2003-07-21 2005-01-27 Special Designing And Technological Bureau 'nauka' Krasnoyarsk Scientific Center Of Siberian Department Russian Academy Of Sciences Method for measuring light flux correlation function and device for carrying out said method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB993072A (en) * 1963-03-21 1965-05-26 Ferranti Ltd Improvements relating to measuring apparatus
US3447014A (en) * 1966-06-27 1969-05-27 Robert J Jordan Interferometer comprising photocathode of fractional light wavelength thickness in envelope having optically flat windows
GB1184080A (en) * 1967-09-19 1970-03-11 Optomechanisms Inc Single Optical Block Interferometer Means
JPS4917264A (en) * 1972-06-03 1974-02-15
JPS591962B2 (en) * 1976-02-27 1984-01-14 五紀 伴 distance measuring device
US4443107A (en) * 1981-08-03 1984-04-17 Alexander David H Optical displacement sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109642868A (en) * 2016-08-19 2019-04-16 国立大学法人香川大学 Optical characteristics measurement device and optical characteristics measuring method
CN109642868B (en) * 2016-08-19 2022-03-15 国立大学法人香川大学 Optical property measuring apparatus and optical property measuring method

Also Published As

Publication number Publication date
JPH0379642B2 (en) 1991-12-19
GB8308044D0 (en) 1983-05-05
DE3300369C2 (en) 1987-06-19
FR2524633A1 (en) 1983-10-07
DE3300369A1 (en) 1983-10-06
GB2117918A (en) 1983-10-19
US4571083A (en) 1986-02-18
JPS58200137A (en) 1983-11-21
FR2524633B1 (en) 1987-02-13

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950324