GB2111299B - High current density photoelectron generators - Google Patents

High current density photoelectron generators

Info

Publication number: GB2111299B
Authority: GB; United Kingdom
Prior art keywords: photoelectron; generators; current density; high current; density
Prior art date: 1981-11-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB08231900A

Other versions

GB2111299A (en

Inventor

Peter E Oettinger

Chunghsin Lee

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Thermo Fisher Scientific Inc

Original Assignee

Thermo Electron Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-11-30

Filing date

1982-11-09

Publication date

1986-07-09

1982-11-09 Application filed by Thermo Electron Corp filed Critical Thermo Electron Corp

1983-06-29 Publication of GB2111299A publication Critical patent/GB2111299A/en

1986-07-09 Application granted granted Critical

1986-07-09 Publication of GB2111299B publication Critical patent/GB2111299B/en

Status Expired legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/34—Photo-emissive cathodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/34—Photoemissive electrodes
- H01J2201/342—Cathodes
- H01J2201/3421—Composition of the emitting surface
- H01J2201/3423—Semiconductors, e.g. GaAs, NEA emitters
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/34—Photoemissive electrodes
- H01J2201/342—Cathodes
- H01J2201/3421—Composition of the emitting surface
- H01J2201/3426—Alkaline metal compounds, e.g. Na-K-Sb
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/061—Construction
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06333—Photo emission
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
- H01J2237/31777—Lithography by projection
- H01J2237/31779—Lithography by projection from patterned photocathode

Landscapes

Engineering & Computer Science (AREA)
Chemical & Material Sciences (AREA)
Nanotechnology (AREA)
Crystallography & Structural Chemistry (AREA)
Analytical Chemistry (AREA)
Manufacturing & Machinery (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
Mathematical Physics (AREA)
Theoretical Computer Science (AREA)
Electron Beam Exposure (AREA)
Electron Sources, Ion Sources (AREA)
Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Lasers (AREA)

GB08231900A 1981-11-30 1982-11-09 High current density photoelectron generators Expired GB2111299B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US32596081A	1981-11-30	1981-11-30

Publications (2)

Publication Number	Publication Date
GB2111299A GB2111299A (en)	1983-06-29
GB2111299B true GB2111299B (en)	1986-07-09

Family

ID=23270181

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
GB08231900A Expired GB2111299B (en)	1981-11-30	1982-11-09	High current density photoelectron generators
GB08511180A Expired GB2157884B (en)	1981-11-30	1985-05-02	Photoemissive cathode for high current density photoelectron generators

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
GB08511180A Expired GB2157884B (en)	1981-11-30	1985-05-02	Photoemissive cathode for high current density photoelectron generators

Country Status (4)

Country	Link
JP (2)	JPS58108639A (en)
DE (1)	DE3241766C2 (en)
FR (1)	FR2517470B1 (en)
GB (2)	GB2111299B (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6037633A (en) *	1983-08-09	1985-02-27	Hamamatsu Photonics Kk	Photoelectron gun
US4606061A (en) *	1983-12-28	1986-08-12	Tokyo Shibaura Denki Kabushiki Kaisha	Light controlled x-ray scanner
GB8422895D0 (en) *	1984-09-11	1984-10-17	Texas Instruments Ltd	Electron beam apparatus
KR910000756B1 (en) *	1984-11-20	1991-02-06	Fujitsu Ltd	Method for projection photoelectron image
GB8506788D0 (en) *	1985-03-15	1985-04-17	Secr Defence	Thermal electron source
JPS6347928A (en) *	1986-08-18	1988-02-29	Fujitsu Ltd	Mask for photoelectron image transfer
US4963823A (en) *	1988-06-27	1990-10-16	Siemens Aktiengesellschaft	Electron beam measuring instrument
DE68916870D1 (en) *	1988-07-01	1994-08-25	Ibm	Optical fiber photocathode.
GB2260666B (en) *	1991-09-20	1995-12-20	Sharp Kk	Time division multiplexed diode lasers
US5684360A (en) *	1995-07-10	1997-11-04	Intevac, Inc.	Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas
JPH0936025A (en) *	1995-07-14	1997-02-07	Nec Corp	Electron beam exposure method and apparatus
US6538256B1 (en) *	2000-08-17	2003-03-25	Applied Materials, Inc.	Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance
DE10245052A1 (en) *	2002-09-26	2004-04-08	Leo Elektronenmikroskopie Gmbh	Electron beam source and electron optical apparatus with one
CN100394654C (en) *	2003-01-16	2008-06-11	松下电器产业株式会社	Photoelectron emitting plate and negative particle generating device using the same
US7187755B2 (en) *	2004-11-02	2007-03-06	General Electric Company	Electron emitter assembly and method for generating electron beams
US10052794B2 (en) *	2012-11-09	2018-08-21	Command Alkon Dutch Tech B.V.	Methods and systems using concrete mix temperature measurement
JP6664223B2 (en) *	2016-01-12	2020-03-13	株式会社荏原製作所	Electron gun and inspection device having the same
JP6867568B2 (en) *	2016-11-07	2021-04-28	国立大学法人東京工業大学	Nanoscale photocathode electron source

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB812403A (en) *	1954-08-06	1959-04-22	Emi Ltd	Improvements in or relating to the formation of evaporated layers
GB714054A (en) *	1950-03-17	1954-08-25	Emi Ltd	Improvements relating to the manufacture of photo-electric devices
GB1005708A (en) *	1960-12-14	1965-09-29	Emi Ltd	Improvements relating to photo electrically sensitive devices
CH391912A (en) *	1961-11-09	1965-05-15	Trueb Taeuber & Co Ag	Process for visualization and recording of electron-optical images
FR1345063A (en) *	1962-10-23	1963-12-06	Thomson Houston Comp Francaise	Photoelectric cathode
DE1464594A1 (en) *	1963-07-18	1968-12-19	Forschungslaboratorium Dr Ing	Photocathode
GB1117759A (en) *	1964-12-16	1968-06-26	Matsushita Electric Industrial Co Ltd	Photoemissive device
US4097761A (en) *	1966-02-16	1978-06-27	Rca Corporation	Image tube cathode
GB1205129A (en) *	1967-03-10	1970-09-16	Rca Radio Corp Of America	Photocathodes containing antimony and method of making the same
FR1566316A (en) *	1968-01-31	1969-05-09
DE1963740A1 (en) *	1969-12-19	1971-07-08	Max Planck Gesellschaft	Pulse electron source
FR2076604A5 (en) *	1970-01-21	1971-10-15	Commissariat Energie Atomique
US3821778A (en) *	1972-12-04	1974-06-28	Hughes Aircraft Co	Infrared photocathode
JPS573182B2 (en) *	1973-08-08	1982-01-20
JPS5224385A (en) *	1975-08-20	1977-02-23	Sanki Eng Co Ltd	Single filter press
US4039810A (en) *	1976-06-30	1977-08-02	International Business Machines Corporation	Electron projection microfabrication system
DE2719799A1 (en) *	1977-04-28	1978-11-02	Siemens Ag	Mask imaging photoelectronic projector - has mask as positive electrode of acceleration field between photocathode and semiconductor wafer
JPS5469953A (en) *	1977-11-15	1979-06-05	Toshiba Corp	Electron emission device
JPS54146952A (en) *	1978-05-10	1979-11-16	Hitachi Denshi Ltd	Photoelectric surface
US4313072A (en) *	1979-10-10	1982-01-26	The United States Of America As Represented By The United States Department Of Energy	Light modulated switches and radio frequency emitters

1982
- 1982-11-09 GB GB08231900A patent/GB2111299B/en not_active Expired
- 1982-11-11 DE DE19823241766 patent/DE3241766C2/en not_active Expired
- 1982-11-26 FR FR8219870A patent/FR2517470B1/en not_active Expired
- 1982-11-30 JP JP57208747A patent/JPS58108639A/en active Pending
1985
- 1985-05-02 GB GB08511180A patent/GB2157884B/en not_active Expired
1990
- 1990-05-29 JP JP2137317A patent/JPH03176953A/en active Pending

Also Published As

Publication number	Publication date
GB8511180D0 (en)	1985-06-12
FR2517470A1 (en)	1983-06-03
FR2517470B1 (en)	1989-01-20
GB2157884A (en)	1985-10-30
GB2111299A (en)	1983-06-29
JPH03176953A (en)	1991-07-31
DE3241766A1 (en)	1983-06-09
JPS58108639A (en)	1983-06-28
DE3241766C2 (en)	1987-04-09
GB2157884B (en)	1986-07-23

Publication	Publication Date	Title
GB2081983B (en)	1984-06-13	Electrical generator
GB2111299B (en)	1986-07-09	High current density photoelectron generators
GB8305890D0 (en)	1983-04-07	Generators
ZA827963B (en)	1983-08-31	Ion-vapor generator
ZA82848B (en)	1982-12-29	Electric current generator
GB8305707D0 (en)	1983-04-07	Electric generator
GB2131208B (en)	1986-06-18	Constant current generator circuit
GB2098007B (en)	1985-02-27	Electrical generators
GB2119587B (en)	1985-09-11	Square-wave current generator
DE3266104D1 (en)	1985-10-17	Chemo-electromagnetic generator
GB2080063B (en)	1984-06-13	Current generator circuits
DE3272688D1 (en)	1986-09-25	Substrate-bias voltage generator
GB2091058B (en)	1984-05-31	Sawtooth current generator
GB8411712D0 (en)	1984-06-13	Current collector assembly
JPS56152179A (en)	1981-11-25	Current collector
ZA854454B (en)	1986-02-26	High current density cell
DE3268958D1 (en)	1986-03-20	Electrical brushes
JPS57196840A (en)	1982-12-02	Current generator
GB8316167D0 (en)	1983-07-20	Generating electricity
GB2120865B (en)	1986-02-05	An electricity generator
GB8421344D0 (en)	1984-09-26	Electrical generator
JPS57148570A (en)	1982-09-13	Current generating motor
JPS57153970A (en)	1982-09-22	Wave-force generator
JPS54155937A (en)	1979-12-08	Constant current density plating
DE3363070D1 (en)	1986-05-22	Constant current generator

Legal Events

Date	Code	Title	Description
1993-07-07	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 19921109