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GB2107360B - Depositing silicon on metal - Google Patents

Depositing silicon on metal

Info

Publication number
GB2107360B
GB2107360B GB08130747A GB8130747A GB2107360B GB 2107360 B GB2107360 B GB 2107360B GB 08130747 A GB08130747 A GB 08130747A GB 8130747 A GB8130747 A GB 8130747A GB 2107360 B GB2107360 B GB 2107360B
Authority
GB
United Kingdom
Prior art keywords
metal
depositing silicon
depositing
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08130747A
Other versions
GB2107360A (en
Inventor
Dr Malcolm Piers Hill
Dr John Frederick Mathews
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Electricity Generating Board
Original Assignee
Central Electricity Generating Board
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Electricity Generating Board filed Critical Central Electricity Generating Board
Priority to GB08130747A priority Critical patent/GB2107360B/en
Publication of GB2107360A publication Critical patent/GB2107360A/en
Application granted granted Critical
Publication of GB2107360B publication Critical patent/GB2107360B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
GB08130747A 1981-10-12 1981-10-12 Depositing silicon on metal Expired GB2107360B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08130747A GB2107360B (en) 1981-10-12 1981-10-12 Depositing silicon on metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08130747A GB2107360B (en) 1981-10-12 1981-10-12 Depositing silicon on metal

Publications (2)

Publication Number Publication Date
GB2107360A GB2107360A (en) 1983-04-27
GB2107360B true GB2107360B (en) 1985-09-25

Family

ID=10525104

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08130747A Expired GB2107360B (en) 1981-10-12 1981-10-12 Depositing silicon on metal

Country Status (1)

Country Link
GB (1) GB2107360B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026664A (en) * 1983-07-22 1985-02-09 Canon Inc Formation of deposited amorphous silicon film
US4822642A (en) * 1985-12-11 1989-04-18 Air Products And Chemicals, Inc. Method of producing silicon diffusion coatings on metal articles
US4714632A (en) * 1985-12-11 1987-12-22 Air Products And Chemicals, Inc. Method of producing silicon diffusion coatings on metal articles
JP3162480B2 (en) * 1991-06-03 2001-04-25 レール・リキード・ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード Method for passivating metal surfaces to increase the stability of low concentrations of gaseous hydrides in contact with metal surfaces
TW203633B (en) * 1991-06-03 1993-04-11 L Air Liquide Sa Pour L Expl Des Proce
US5255445A (en) * 1991-06-06 1993-10-26 American Air Liquide, Chicago Research Center Process for drying metal surfaces using gaseous hydrides to inhibit moisture adsorption and for removing adsorbed moisture from the metal surfaces
FR2692598B1 (en) * 1992-06-17 1995-02-10 Air Liquide Method for depositing a film containing silicon on the surface of a metal substrate and anti-corrosion treatment method.
US6511760B1 (en) * 1998-02-27 2003-01-28 Restek Corporation Method of passivating a gas vessel or component of a gas transfer system using a silicon overlay coating
US7727588B2 (en) * 2003-09-05 2010-06-01 Yield Engineering Systems, Inc. Apparatus for the efficient coating of substrates
DE102004053502B8 (en) * 2004-10-27 2006-11-30 Universität Stuttgart Method for corrosion protection of components made of heat-resistant steel

Also Published As

Publication number Publication date
GB2107360A (en) 1983-04-27

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee