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GB2102122B - Detecting defects in a pattern - Google Patents

Detecting defects in a pattern

Info

Publication number
GB2102122B
GB2102122B GB08219801A GB8219801A GB2102122B GB 2102122 B GB2102122 B GB 2102122B GB 08219801 A GB08219801 A GB 08219801A GB 8219801 A GB8219801 A GB 8219801A GB 2102122 B GB2102122 B GB 2102122B
Authority
GB
United Kingdom
Prior art keywords
pattern
detecting defects
defects
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08219801A
Other versions
GB2102122A (en
Inventor
Geoffrey Alec William West
Leonard Norton-Wayne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAT RES DEV
National Research Development Corp UK
Original Assignee
NAT RES DEV
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAT RES DEV, National Research Development Corp UK filed Critical NAT RES DEV
Priority to GB08219801A priority Critical patent/GB2102122B/en
Publication of GB2102122A publication Critical patent/GB2102122A/en
Application granted granted Critical
Publication of GB2102122B publication Critical patent/GB2102122B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G06V10/46—Descriptors for shape, contour or point-related descriptors, e.g. scale invariant feature transform [SIFT] or bags of words [BoW]; Salient regional features
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Multimedia (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
GB08219801A 1981-07-22 1982-07-08 Detecting defects in a pattern Expired GB2102122B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08219801A GB2102122B (en) 1981-07-22 1982-07-08 Detecting defects in a pattern

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8122618 1981-07-22
GB08219801A GB2102122B (en) 1981-07-22 1982-07-08 Detecting defects in a pattern

Publications (2)

Publication Number Publication Date
GB2102122A GB2102122A (en) 1983-01-26
GB2102122B true GB2102122B (en) 1985-05-15

Family

ID=26280212

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08219801A Expired GB2102122B (en) 1981-07-22 1982-07-08 Detecting defects in a pattern

Country Status (1)

Country Link
GB (1) GB2102122B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2105427C1 (en) * 1992-06-15 1998-02-20 Центральное конструкторское бюро "Пеленг" Method for compensation of spread in values of sensitive elements of photodetector

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4625237A (en) * 1984-10-22 1986-11-25 Rca Corporation Method for detecting blemishes contiguous to the perimeter of a CCD image
US4605960A (en) * 1984-10-22 1986-08-12 Rca Corporation Method for avoiding identifying perimeter variations as blemishes in a CCD image
GB8429250D0 (en) * 1984-11-20 1984-12-27 Rosen D Measurement method
WO1987007808A1 (en) * 1986-06-02 1987-12-17 Iosif Baumberg Method and system of representing information data
US4748502A (en) * 1986-08-18 1988-05-31 Sentient Systems Technology, Inc. Computer vision system based upon solid state image sensor
GB8800570D0 (en) * 1988-01-12 1988-02-10 Leicester Polytechnic Measuring method
US5172421A (en) * 1991-03-27 1992-12-15 Hughes Aircraft Company Automated method of classifying optical fiber flaws
JPH0763691A (en) * 1993-08-24 1995-03-10 Toshiba Corp Pattern defect inspection method and its apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2105427C1 (en) * 1992-06-15 1998-02-20 Центральное конструкторское бюро "Пеленг" Method for compensation of spread in values of sensitive elements of photodetector

Also Published As

Publication number Publication date
GB2102122A (en) 1983-01-26

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee