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GB2194556B - Chemical vapour deposition of films - Google Patents

Chemical vapour deposition of films

Info

Publication number
GB2194556B
GB2194556B GB8719391A GB8719391A GB2194556B GB 2194556 B GB2194556 B GB 2194556B GB 8719391 A GB8719391 A GB 8719391A GB 8719391 A GB8719391 A GB 8719391A GB 2194556 B GB2194556 B GB 2194556B
Authority
GB
United Kingdom
Prior art keywords
films
vapour deposition
chemical vapour
chemical
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8719391A
Other versions
GB2194556A (en
GB8719391D0 (en
Inventor
Peter Michael Corser Martineau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SPECIAL RESEARCH SYSTEMS LIMIT
Original Assignee
SPECIAL RESEARCH SYSTEMS LIMIT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SPECIAL RESEARCH SYSTEMS LIMIT filed Critical SPECIAL RESEARCH SYSTEMS LIMIT
Publication of GB8719391D0 publication Critical patent/GB8719391D0/en
Publication of GB2194556A publication Critical patent/GB2194556A/en
Application granted granted Critical
Publication of GB2194556B publication Critical patent/GB2194556B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C23C16/5096—Flat-bed apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
GB8719391A 1986-08-21 1987-08-17 Chemical vapour deposition of films Expired - Lifetime GB2194556B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868620346A GB8620346D0 (en) 1986-08-21 1986-08-21 Chemical vapour deposition of films

Publications (3)

Publication Number Publication Date
GB8719391D0 GB8719391D0 (en) 1987-09-23
GB2194556A GB2194556A (en) 1988-03-09
GB2194556B true GB2194556B (en) 1990-08-22

Family

ID=10603037

Family Applications (2)

Application Number Title Priority Date Filing Date
GB868620346A Pending GB8620346D0 (en) 1986-08-21 1986-08-21 Chemical vapour deposition of films
GB8719391A Expired - Lifetime GB2194556B (en) 1986-08-21 1987-08-17 Chemical vapour deposition of films

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB868620346A Pending GB8620346D0 (en) 1986-08-21 1986-08-21 Chemical vapour deposition of films

Country Status (1)

Country Link
GB (2) GB8620346D0 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4844945A (en) * 1988-05-18 1989-07-04 Hewlett-Packard Company Process for producing patterns in dielectric layers formed by plasma enhanced chemical vapor deposition (PECVD)
IT1227877B (en) * 1988-11-25 1991-05-14 Eniricerche S P A Agip S P A PROCEDURE FOR PLASMA DEPOSITION OF MULTIPLE LAYERS SIZED AMORPHOUS VARIABLE COMPOSITION
DE3841731C1 (en) * 1988-12-10 1990-04-12 Krupp Widia Gmbh, 4300 Essen, De Process for coating a tool base, and tool produced by this process
US5223337A (en) * 1988-12-10 1993-06-29 Fried. Krupp Gmbh Tool produced by a plasma-activated CVD process
GB2306510B (en) * 1995-11-02 1999-06-23 Univ Surrey Modification of metal surfaces
GB2312439A (en) * 1996-04-24 1997-10-29 Northern Telecom Ltd Plasma enhanced chemical vapour deposition of a layer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0026604A1 (en) * 1979-09-20 1981-04-08 Fujitsu Limited A method of vapour phase growth and apparatus therefor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0026604A1 (en) * 1979-09-20 1981-04-08 Fujitsu Limited A method of vapour phase growth and apparatus therefor
US4539068A (en) * 1979-09-20 1985-09-03 Fujitsu Limited Vapor phase growth method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP 60215765 *

Also Published As

Publication number Publication date
GB2194556A (en) 1988-03-09
GB8620346D0 (en) 1986-10-01
GB8719391D0 (en) 1987-09-23

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Effective date: 20070816