[go: up one dir, main page]

GB2188441B - Contrast enhanced photolithography - Google Patents

Contrast enhanced photolithography

Info

Publication number
GB2188441B
GB2188441B GB8707015A GB8707015A GB2188441B GB 2188441 B GB2188441 B GB 2188441B GB 8707015 A GB8707015 A GB 8707015A GB 8707015 A GB8707015 A GB 8707015A GB 2188441 B GB2188441 B GB 2188441B
Authority
GB
United Kingdom
Prior art keywords
contrast enhanced
enhanced photolithography
photolithography
contrast
enhanced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8707015A
Other versions
GB2188441A (en
GB8707015D0 (en
Inventor
Clive Trundle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GE Healthcare UK Ltd
Plessey Co Ltd
Original Assignee
GE Healthcare UK Ltd
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB868607715A external-priority patent/GB8607715D0/en
Priority claimed from GB868613420A external-priority patent/GB8613420D0/en
Application filed by GE Healthcare UK Ltd, Plessey Co Ltd filed Critical GE Healthcare UK Ltd
Priority to GB8707015A priority Critical patent/GB2188441B/en
Publication of GB8707015D0 publication Critical patent/GB8707015D0/en
Publication of GB2188441A publication Critical patent/GB2188441A/en
Application granted granted Critical
Publication of GB2188441B publication Critical patent/GB2188441B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
GB8707015A 1986-03-27 1987-03-24 Contrast enhanced photolithography Expired GB2188441B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8707015A GB2188441B (en) 1986-03-27 1987-03-24 Contrast enhanced photolithography

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB868607715A GB8607715D0 (en) 1986-03-27 1986-03-27 Contrast enhanced photolithography
GB868613420A GB8613420D0 (en) 1986-06-03 1986-06-03 Photochromic gamma butyrolactones
GB8707015A GB2188441B (en) 1986-03-27 1987-03-24 Contrast enhanced photolithography

Publications (3)

Publication Number Publication Date
GB8707015D0 GB8707015D0 (en) 1987-04-29
GB2188441A GB2188441A (en) 1987-09-30
GB2188441B true GB2188441B (en) 1989-11-15

Family

ID=27262975

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8707015A Expired GB2188441B (en) 1986-03-27 1987-03-24 Contrast enhanced photolithography

Country Status (1)

Country Link
GB (1) GB2188441B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8714202D0 (en) * 1987-06-17 1987-07-22 Plessey Co Plc Contrast enthancement in optical data storage

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Journal of Imaging Scien *

Also Published As

Publication number Publication date
GB2188441A (en) 1987-09-30
GB8707015D0 (en) 1987-04-29

Similar Documents

Publication Publication Date Title
GB8717337D0 (en) Photosensitive member
GB8606707D0 (en) Combination feedboat
GB8619421D0 (en) Mechanism
GB8814374D0 (en) Photosensitive member
GB8619098D0 (en) Combination
GB2188441B (en) Contrast enhanced photolithography
GB8607715D0 (en) Contrast enhanced photolithography
GB2195971B (en) Can ends
CS358086A1 (en) Zpusob pripravy aromatickych n glycidylaminu
CS241286A1 (en) Zpusob zpracovani louhu s prevazujicim obsahem siranu amonneho
CS101186A1 (en) Zarizeni zimni ochrany mokre chladici veze s prirozenym tahem vzduchu
CS215786A1 (en) Skelne krystalicka bezalkalicka hmota s vysokym obsahem arsenu
JPS6465842A (en) Photolithography
GB8625906D0 (en) Vehicle-jack mechanism
GB8616270D0 (en) Terrying mechanism
GB8600176D0 (en) Mechanism
GR862663B (en) Mask
GB8606756D0 (en) Gratings
CS26086A1 (en) Sposob vyroby n cyklohexyltioftalimidu
CS936586A1 (en) Zpusob ziskavani n alkylmorfolinu
CS346586A1 (en) Stupnova planetova preodovka s jemnym odstupnovanim prevodovych pomerov
CS174086A1 (en) Zakladacia jednotka suciastok s otvorom
CS349486A1 (en) Zpusob spojeni hlinikoveho pouzdra s ocelovym hridelem
CS1009686A1 (en) Modrofialove termicky stabilni pigmenty s antikoroznimi vlastnostmi
CS388086A1 (en) Zapojeni mikroprocesorovych systemu s galvanickym oddelenim

Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee