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GB2188155B - Pressure transducer - Google Patents

Pressure transducer

Info

Publication number
GB2188155B
GB2188155B GB8607026A GB8607026A GB2188155B GB 2188155 B GB2188155 B GB 2188155B GB 8607026 A GB8607026 A GB 8607026A GB 8607026 A GB8607026 A GB 8607026A GB 2188155 B GB2188155 B GB 2188155B
Authority
GB
United Kingdom
Prior art keywords
pressure transducer
transducer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8607026A
Other versions
GB8607026D0 (en
GB2188155A (en
Inventor
Henri Rosenberg
Joseph Terrance Furness
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furness Controls Ltd
Original Assignee
Furness Controls Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furness Controls Ltd filed Critical Furness Controls Ltd
Priority to GB8607026A priority Critical patent/GB2188155B/en
Publication of GB8607026D0 publication Critical patent/GB8607026D0/en
Publication of GB2188155A publication Critical patent/GB2188155A/en
Application granted granted Critical
Publication of GB2188155B publication Critical patent/GB2188155B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
GB8607026A 1986-03-21 1986-03-21 Pressure transducer Expired - Lifetime GB2188155B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8607026A GB2188155B (en) 1986-03-21 1986-03-21 Pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8607026A GB2188155B (en) 1986-03-21 1986-03-21 Pressure transducer

Publications (3)

Publication Number Publication Date
GB8607026D0 GB8607026D0 (en) 1986-04-30
GB2188155A GB2188155A (en) 1987-09-23
GB2188155B true GB2188155B (en) 1990-01-10

Family

ID=10595002

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8607026A Expired - Lifetime GB2188155B (en) 1986-03-21 1986-03-21 Pressure transducer

Country Status (1)

Country Link
GB (1) GB2188155B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US7284439B2 (en) 1997-12-22 2007-10-23 Mks Instruments, Inc. Method for producing a pressure sensor for detecting small pressure differences and low pressures

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2570420B2 (en) * 1988-06-23 1997-01-08 富士電機株式会社 Capacitive pressure detector
US5442962A (en) 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
US5542300A (en) 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
FI952881A0 (en) * 1994-06-17 1995-06-13 Instrumentarium Oy Foerfarande Foer fastspaenning av ett membran och anordning Foer genomfoerande av foerfarandet
DE19724293A1 (en) * 1997-06-09 1998-12-10 Mannesmann Vdo Ag Pressure sensor used to produce electrical signals in vehicle
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US6568274B1 (en) 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7284439B2 (en) 1997-12-22 2007-10-23 Mks Instruments, Inc. Method for producing a pressure sensor for detecting small pressure differences and low pressures
US7389697B2 (en) 1997-12-22 2008-06-24 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7316163B2 (en) 2004-10-07 2008-01-08 Mks Instruments Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7624643B2 (en) 2004-10-07 2009-12-01 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor

Also Published As

Publication number Publication date
GB8607026D0 (en) 1986-04-30
GB2188155A (en) 1987-09-23

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950321