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GB2168145B - Device for measuring the thickness of thin films - Google Patents

Device for measuring the thickness of thin films

Info

Publication number
GB2168145B
GB2168145B GB08430762A GB8430762A GB2168145B GB 2168145 B GB2168145 B GB 2168145B GB 08430762 A GB08430762 A GB 08430762A GB 8430762 A GB8430762 A GB 8430762A GB 2168145 B GB2168145 B GB 2168145B
Authority
GB
United Kingdom
Prior art keywords
measuring
thickness
thin films
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08430762A
Other versions
GB2168145A (en
GB8430762D0 (en
Inventor
T D T Latter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fischer & Co Inst fur Ele GmbH
Original Assignee
Fischer & Co Inst fur Ele GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fischer & Co Inst fur Ele GmbH filed Critical Fischer & Co Inst fur Ele GmbH
Priority to GB08430762A priority Critical patent/GB2168145B/en
Priority claimed from DE19843444270 external-priority patent/DE3444270A1/en
Publication of GB8430762D0 publication Critical patent/GB8430762D0/en
Publication of GB2168145A publication Critical patent/GB2168145A/en
Application granted granted Critical
Publication of GB2168145B publication Critical patent/GB2168145B/en
Priority to HK1489A priority patent/HK1489A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB08430762A 1984-12-05 1984-12-05 Device for measuring the thickness of thin films Expired GB2168145B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB08430762A GB2168145B (en) 1984-12-05 1984-12-05 Device for measuring the thickness of thin films
HK1489A HK1489A (en) 1984-12-05 1989-01-05 Device for measuring the thickness of thin coatings

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19843444270 DE3444270A1 (en) 1984-12-05 1984-12-05 DEVICE FOR MEASURING THE THICKNESS LAYERS
GB08430762A GB2168145B (en) 1984-12-05 1984-12-05 Device for measuring the thickness of thin films

Publications (3)

Publication Number Publication Date
GB8430762D0 GB8430762D0 (en) 1985-01-16
GB2168145A GB2168145A (en) 1986-06-11
GB2168145B true GB2168145B (en) 1988-05-25

Family

ID=25827065

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08430762A Expired GB2168145B (en) 1984-12-05 1984-12-05 Device for measuring the thickness of thin films

Country Status (1)

Country Link
GB (1) GB2168145B (en)

Also Published As

Publication number Publication date
GB2168145A (en) 1986-06-11
GB8430762D0 (en) 1985-01-16

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19951205