GB2151519A - Apparatus for making printed circuit boards - Google Patents

Abstract

Printed circuit boards are made by imaging a liquid polymer which has been coated onto the board. The uncured polymer which remains liquid is removed after imaging so that the board can be processed by etch resist, plate resist or solder mask techniques. To position the circuit board to be processed a multiple chamber vacuum platen is used. This platen has a series of holes 63 drilled through its upper surface and a vacuum is drawn on the underside of the platen to a degree sufficient to keep the board locked in position on the platen surface. The underside comprises a plurality of continuous walls 64, 65 defining separate chambers 67-70 which are connected selectively to a vacuum manifold to determine which of the holes 63 are operative to hold the circuit board. Alternatively, the platen may have countersunk holes each adapted to be sealed by a ball when inoperative. <IMAGE>

Description

1

SPECIFICATION

Apparatus for making printed circuit boards GB 2 151 519A 1 This invention relates to new equipment for making printed circuit boards. More particularly, this 5 invention relates to equipment for use in photoresist processes which utilize liquid polymer compositions curable by the application of non-coherent collimated light. The present application is a divisional application of Application No. 8201146 (Publication No. 2091493) directed to photoresist processes.

There are various ways to apply an image to the surface of a metal clad board when making 10 printed circuit boards. These fall into the four broad categories of wet film techniques, dry film techniques, hand screening, and machine screening. The wet film imaging techniques generally consist of applying a photoresist composition in a liquid state to a circuit board blank, drying the film and imaging it. The dry film techniques consist of laminating a dry photoresist composition onto the circuit board blank and imaging it. The hand screening and machine screening consist 15 of the use of conventional screen printing techniques for applying a resist composition in a particular design onto the copper surface of the baink board. Hand screening is used when a limited number of boards are required.

The techniques of the present invention fall into the wet film category, but differ from the prior wet film techniques in that the film is not dried prior to exposing the film to the light source which induces a change in the part of the film which is exposed. That is, although the various prior art techniques coated the circuit board blank with a liquid, this film was usually dried prior to the subsequent steps. This drying of the film to harden is considered a requirement since the medium for applying a circuit design to a blank board (usually called a photo tool) is placed in contact with this coating. It has been considered necessary to place the 25 photo tool in contact with the coating in order to get good definition in the final printed circuit.

Also, the present processes do not require any complex developing agents or techniques and after imaging all that is necessary is that the uncured liquid polymer be removed.

Broadly, it has been discovered that liquid polymeric coatings on printed circuit board blanks can be imaged while undried and yet get very good definition. This is the case even though an 30 air gap must be maintained between the photo tool which bears the printed circuit design image and the liquid polymeric coating. This coating can range from an easily flowable liquid to a tacky viscous liquid. During imaging, fight from the non-coherent collimated light source passes through the transparent areas of the photo tool, strikes the liquid polymer, and cures the liquid polymer to a solid. Where no light passes through the photo tool, the liquid polymer remains 35 liquid, and is removed from the printed circuit board blank to expose the underlying metal.

Although the liquid polymer can be removed by physical techniques such as an air knife or by wiping, it is most effective to remove the liquid polymer by means of a liquid in which the liquid polymer is at least partially soluble, but in which the cured solid polymer has essentially no solubility. The primary advantage is that such a technique fully exposes the metal underlying the 40 liquid polymer thereby permitting a more effective etching of this metal in a subsequent step.

As discussed above, one of the drawbacks of imaging a liquid coating is the necessity of an air gap between the photo tool and the liquid coating. The use of an air gap usually results in a loss of definition in the printed circuit. However, in the present processes this is not a problem.

This is at least in part the result of the use of a non-coherent collimated light beam for imaging, 45 the processing techniques for removal of the uncured liquid polymer, the good adhesion of the cured polymer to the underlying metal, the resistance of the cured liquid polymer to etching solutions, and the ease of removal of the cured liquid polymer after etching. That is, the solution which is used to remove the uncured liquid polymer to expose the underlying metal does not attack the cured polymer. If the cured polymer is also attacked, there will be a loss in definition 50 in the final circuit and a possible loss of adhesion of the cured polymer to the underlying metal. Any loss of adhesion would cause excess metal to be removed during the etching step. However, when a solution containing cations derived from a strong base contacts the cured polymer, it is effective in removing the cured liquid polymer without attacking the underlying metal. The net result is that no organic containing solutions are required in processing the imaged printed circuit board. This provides for significant cost savings since organics are more expensive, are fire hazards, and create fumes and odors which under governmental regulations would have to be removed from the work area. It is, therefore, very useful to be able to use anueous solutions in the commercial nroduction of the circuit boards.

The term -non-coherent collimated light- means light having a half angle of not more than 3 60 degrees, and preferably not more than 1.5 degrees. By contrast, laser light is coherent light. Light is collimated (formed into a beam) by lenses, parabolic reflectors or various arrangements of mirrors.

In brief summary, the present invention consists of single station and multi-station equipment 65 to perform etch and plate resist processes to produce printed circuit boards using liquid

2 GB 2 151 51 9A 2 polymers, and to perform a process to make solder marks using liquid polymers. Each of these processes images circuit board blanks which have a liquid polymer coating and each only requires aqueous solutions to process the board after imaging. As a result the same equipment can be used to plate resist, etch resist and solder mask. This versatility provides many cost advantages, and particularly to lower volume producers of the various types of printed circuit boards.

The present invention provides a multiple chamber vacuum platen comprising a base member; a plurality of continuous wails of a uniform height extending upwardly therefrom, said continuous walls defining separate regions; an upper member having a plurality of openings therethrough and sealably contacting the upper part of said walls to form a plurality of sealed 10 chambers; and means for connecting each of said chambers to a device to draw a vacuum thereon.

In the etch and plate resist processes, the circuit board blank is first coated with the liquid polymer. A photo toot of the desired circuit is then placed in registration above, but not in contact with the liquid polymer coating. The bank is then imaged whereby under the transparent 15 areas of the photo tool the polymer cures to a solid, while that under the opaque areas remains liquid. This liquid polymer is then removed, preferably by use of solution in which it is at least partiaily soluble. After this step the processes for making plate resists and etch resists differ. In making etch resists, the exposed metal is etched away using an aqueous acid solution and the cured!iquid polymer then removed using an alkaline solution containing cations derived from a 20 strong base. In making plate resists, tin, nickel and/or similar metals are plated on the exposed metal after liquid polymer removal, the cured liquid polymer removed using an alkaline solution containing cations derived from a strong base, and the metal layer which has been exposed removed by etching.

Solder masks are produced by coating a printed circuit board with a liquid polymer, imaging 25 the coated board to create cured polymer on certain parts of the circuit design, while leaving the polymer uncured on other parts. The uncured liquid polymer is then removed using a solution in which it is at least partially soluble and the exposed metal coated with solder. The cured polymer is usually not removed, but left on the board as an insulating layer.

The single station equipment found very useful in practicing these processes consists of a device for holding a printed circuit board or printed circuit board blank in a set position, a rectractable roller coater for coating one side of a board, a photo tool in registration with the circuit board blank and bearing an image of a circuit and which can be retractably moved to a point above, but in close proximity to, the coated board, and a non- coherent collimated light source positioned for passing light through the photo tool to cure liquid polymer. Various arrangements for these units are possible. However, the preferred arrangement is to have the board blank held in place by means of a vacuum with a roller coater horizontally retractable to coat the board. The photo tool assembly is vertically retractable and is located above the positioned circuit board blank and in the path of the non-coherent collimated light from the light source. Therefore, in operation the machine operator positions the board and activates the 40 vacuum holding means. Thereafter, stepwise, the roller coater is activated and passes over the board, coats the board and retracts. Following this step the photo tool assembly lowers into close relationship with the coating, and when in position the lights source is activated for a time period to cure the polymer. When the light goes off, the photo tool assembly retracts upwardly and the board moves on a conveyor to a spray bath for removal of the uncured liquid polymer. 45 The equipment for the subsequent steps consists of a state-of-the-art etching, metal plating and solder depositing devices. The multi-station equipment consists of separate coating and exposing units, but otherwise is similar to the single station equipment.

The present processes and equipment will be discussed in more detail with reference to the following drawings:

Figure 1 is a stepwise diagram of the etch resist process for making printed circuit boards.

Figure 2 is a stepwise diagram of the plate resist process for making printed circuit boards.

Figure 3 is a stepwise diagram of the process for making solder masks.

Figure 4 is an elevational view of a circuit board blank positioned on a vacuum holding plate.

Figure 5 is an elevational view of the circuit board blank being coated by a retractable roller 55 coater.

Figure 6 is an elevational view of the photo tool lowered into a close relationship with the coated circuit board blank.

Figure 7 is a elevational view of circuit board blank with the photo tool retracted showing certain area of cured liquid polymer.

Figure 8 is a schematic diagram illustrating the non-coherent collimated light which is used.

Figure 9 is a front elevational view of a single station apparatus which contains the components of Figs. 4 and 7.

Figure 10 is a side view of the single station apparatus of Fig. 8.

Figure 11 is a front elevational view of the multi-station apparatus to stepwise perform the 65 3 GB 2 151 51 9A 3 operations of the apparatus of Figs. 8 and '10.

Figure 12 is a planar view of the photo tool surface which is in air gap relationship with the circuit board blank during imaging.

Figure 13 is a perspective view of the platen assembly which holds the circuit board blank in 5 position.

Figure 14 is a sectional view of the platen assembly of Figs. 13 along line 14-14.

Fig. 1 sets out the steps for producing a printed circuit board using etch resist techniques. The process starts with an electroconductive clad blank. Such blanks consist of a non-metallic substrate, usually a plastic containing reinforcing fibers, having on one or both sides a metal layer with a thickness of about 0.001 to 0.003 inches (0.025 to 0.076 mm). The substrate can 10 be of any reasonable thickness, but is usually about 0.003 to 0.25 inches (0.076 mm to 6.35 mm) thick. Commonly, these substrates are phenolic or epoxy plastics reinforced with fiberglass or an equivalent material. The metal cladding is usually copper.

In making an etch resist according to the present process, the metal clad blank is coated on one side with liquid polymer to a thickness of about 0. 1 to 10 mils (0. 0025 to 0.25 mm) or 15 more. Preferably the coating thickness is uniform over the entire blank, and in a thickness of about 0.5 to 5 mils (0.0127 to 0. 127 mm). The coating has to be sufficiently thick to insure that there are no voids, but not so thick that the liquid polymer flows off the edge of the blank or through the many small holes which traverse the blank. Coating can be by any convenient technique, such as spraying, brushing, or roller coating. However, roller coating is preferred 20 since it deposits a more uniform wet polymer film on the board, and it has unexpectedly been found that in roller coating the liquid polymer tends not to flow into any of the holes through the blank even though a vacuum is being drawn on the underside of the board. This is primarily attributable to an interplay between this mode of application and the surface tension of liquid polymers. These holes are used later in connecting circuit components to the finished boards. If 25 polymer flowed into these holes, it would have to be removed before circuit assembly.

In the next step, a photo tool which bears the circuit design is placed in an air gap relationship with the liquid polymer coating. It is desirable to have the photo tool as close as possible, but not contacting the liquid polymer coating. An air gap of about 5 to 500 mils (0. 127 to 12.7 mm) is generally used. An assembly holds the photo tool in position and in registration with the polymer coated blank. In the preferred method, the phototool is held in position by means of a metal frame and a vacuum drawn on the edge of the photo tool. When the photo tool is an emulsion on a glass plate, the glass plate is mechanically held in place, In the instances where the photo tool is an emulsion on a plastic film, such as a polyester film of about 4 to 10 mils (0. 1 to 0.25 mm) thickm a glass plate is above the film to assure that the 35 film is maintained in the same plane. Regardless of whether an emulsion on a glass plate or a plastic film is used as the photo tool, the emulsion side is what is in air gap relationship with the liquid polymer coating.

The term---phototool- is broadly used to mean any image bearing medium and can be any silver or silverless emulsion. This includes diazo emulsions. This emulsion can be supported on a 40 polymer film, glass, or any other convenient medium. The term - registration--- is used to denote the placement of the photo tool over the circuit board blank in a manner so that the desired circuit is placed on predetermined areas of the blank.

After the photo tool is in place, a non-coherent collimated light source, which is preferably a source of 2000 to 5000 Angstrom radiation and which is located to pass light through the photo tool, is activated. Convenient light sources include carbon arcs, mercury arcs, mercury xenon lamps, tungsten halide lamps, and argon glow lamps. Preferably the light source is a mercury arc or mercury xenon light beam. The light passes through the transparent areas of the photo tool, strikes the liquid polymer and cures the liquid polymer to a solid. The liquid polymer which is not contacted by any light remains liquid. A time duration of about 5 to 120 seconds is 50 usually sufficient to cure the liquid polymer. However, where necessary, longer time durations can be used.

After the liquid polymer is solidified whe-,e contacted with light, the uncured liquid polymer which has remained liquid, is removed to expose the underlying metal. This can be accom- plished using an air knive to blow the liquid polymer from the surface, by wiping or by using a 55 liquid in which the liquid polymer is at least partially soluble. The preferred technique is to use an aqueous alkakine solution in which the liquid polymer is at least partially soluble. Suitable solutions are alkaline solutions containing sodium, potassium, or ammonium ions such as sodium hydroxide, sodium carbonate, sodium bicarbonate, sodium sulfite, sodium bisulfite, potassium hydroxide, potassium carbonate, potassium bicarbonate, potassium suffite, potassium 60 bisulfite, ammonium hydroxide, ammonium carbonate, and combinations of these materials.

Alkaline detergents or even organic-aqueous mixtures can also be used so long as they do not attack the cured polymer.

Subsequent to the removal of the uncured liquid polymer, the exposed metal is removed by etching. Usually this metal is copper and the etching solution can be any commonly used 65 4 GB 2 151 519A 4 copper etchant, such as an an acidic chloride solution. Commonly used copper etchant solutions are ferric chloride or hydrochloric acid solutions which may also contain some other components. After the completion of this step, there remains the blank with the metal layer now only present under the cured liquid polymer.

The last step comprises removing the cured liquid polymer. This is accomplished by contacting the cured liquid polymer with an alkaline solution containing cations derived from a strong base. Sodium or potassium containing compounds are preferred alkaline materials for making such solutions. However, other reagents which will yield strongly basic cations can also be used.

Fig. 2 sets out the steps in producing a printed circuit board using plate resist techniques. The 10 first four steps in plate resist processing are essentially the same as those for etch resist processing. As a result after the step of removing the uncured liquid polymer, the exposed metal is in a pattern identical to that of the final circuit design. The remainder of the metal is covered by the cured polymer.

The next step in producing a plate resist consists of plating tin, lead, nickel, or combinations 15 of these metals onto the exposed metal. This is conveniently done by electroless or electroplat ing onto the exposed metal. The cured polymer is removed in the same manner as in the etch resist techniques. That is, the board is washed with an alkaline solution containing cations derived from a strong base.

The final step in making the plate resist consists of etching away the metal, usually copper, 20 which has been exposed upon removal of the cured polymer. This etching is the same as for etch resists with the plating metal protecting the underlying metal. The final product is a printed circuit board with a circuit design coated with the plated metal.

Fig. 3 sets out the steps for applying solder masks to printed circuit boards. In producing a solder mask, the starting substrate is a completed printed circuit board. In the first step the printed circuit board is coated with the liquid polymer using any of the techniques as disclosed in the Fig. 1 etch resist processing. A photo tool which has opaque areas above the areas where solder is to be deposited, is then placed in exacting registration above the coated printed circuit board and the light source activated. The liquid polymer cures to a solid in all areas contacted by the light with all other areas remaining liquid. The uncured liquid polymer is then removed in 30 the same manner as etch resist processing. The exposed metal areas are contacted with solder which remains on the exposed metal. Wave soldering methods can be conveniently used. The solder in these selected areas is then used to connect various electronic components and wires.

These are the three primary processes for utilizing the present liquid polymer processes in printed circuit board manufacturing. Figs. 4 through 7 broadly illustrate the preferred mecha- 35 nisms used in accomplishing these steps through the curing of the liquid polymer. In Fig. 4, the printed circuit board blank 10 is positioned on platen 11, by means of guide and registration pins 12 which pass through holes 13 in the circuit board blank. This platen has a series of small holes 14 drilled through the platen. A vacuum is drawn on the underside of this platen to a degree sufficient to keep the board locked in position on the platen surface. The pins 12 are 40 then retracted below the board surface.

Now that the printed circuit board blank is locked in position, Fig. 5 illustrates the coating with liquid polymer. The retractable roller coater consists of application roller 15 and doctor roller 16. A supply of liquid polymer remains at the nip of the rollers. Each roller is at least as long as the width of the circuit board blanks. The doctor roller allows a predetermined amount 45 of liquid polymer to be picked up by the application roller. This predetermined feed regulates the thickness of the liquid polymer 17 on the blank. After coating, the roller coater retracts.

Fig. 6 shows the liquid polymer board blank with the photo tool in place. Here the blank 10 is fully coated with a layer 17 of liquid polymer. Air gap 18, which is in the range of 5 to 500 mils (0. 127 to 12.7 mm), separates the liquid polymer from the photo tool. The photo tool assembly is comprised of negative 19 and planar maintaining glass plate 20. The negative is directly above air gap 18 and preferably the emulsion side of the film is adjacent the air gap. With the photo tool in place, a light source above the photo tool is activated. Where light strikes the liquid polymer, it cures to a solid. This is illustrated in Fig. 7, where 21 designates cured solid polymer areas, while 22 designates the uncured liquid polymer areas. The board is now ready for removal of the uncured polymer. The board can conveniently be conveyed from the platen by means of a series of rollers 23 which carry conveyor belts 23(a) for transport of the board. Conveyor belts 23(a) are inset into the platen and raised when the board is to be transported.

The non-coherent collimated light which is used for these processes is defined as the light 60 angle where the light strikes the photoresist. This angle should preferably be a light a half angle of not more than 3 degrees and preferably not more than 1.5 degrees. This light will produce a photo-resist which has an angle of deviation from vertical of not more than 3 degrees and preferably not more than 1.5 degrees. A plus deviation designates a shoulder on the photoresist while a negative deviation designates an undercut. Also, this light should not have an image 65 GB 2 151 519A dimension deviation of more than:t 1/2 mil (0.0127 mm) and preferably not more than :i: 1/4 mils (0.00635 mm). If the deviation from vertical or the image dimension deviation exceeds these amounts, there will result a lack of accuracy and/or uniformity in the dimensions of the resulting circuit. This can result in a change in circuit resistance which can affect the overall performance of the final electronic item.

These factors which define this light are illustrated in detail in Fig. 8. In this figure, the incident light is designated as L. The photo tool is designated as 19, the circuit board as 10, the liquid polymer coating as 17, and the air gap between the photo tool and the liquid polymer as 18. Area 21 (a) of the photo tool is a transparent area, while area 22(a) is an opaque area. After exposure to light, in area 21 the liquid polymer has solidified, while in area 22 it remains a liquid. The light strikes the photo tool in a substantially perpendicular condition. However, since this is an ideal condition, and since all non-coherent light will have some deviation, this is defined by means of the half angle A of the light. This half angle A will produce an angle of deviation in the photoresist resulting in either a shoulder B or an undercut B' in the photoresist.

The angle of deviation in the photoresist which is the angle of the shoulder or of the undercut is 15 the angle by which the vertical side of the photoresist deviates from absolute vertical.

The dimension deviation factor is also illustrated with reference to Fig. 8. This factor is the maximum amount of deviation of the photoresist from the dimension of the circuit line on the phototool. The light, itself, or the light striking the edge of the opaque area or the photo tool, cannot be deflected or otherwise affected to an extent where the dimension of the polymerized 20 polymer 21 will differ from the dimension of the opaque area 21 (a) on the photo tool 13 by not more than 1 /2 mil (0.0127 mm) and preferably not more than 1 /4 mil (0. 00635 mm).

The objective is to have the width dimensions of a area 21 to as much as possible be identical to that of area 21 (a). This is shown by angle C.

This light should have a substantial amount of its energy in the ultraviolet and visible bands, that is, in the region of 2000 to 5000 angstroms. Also, this light should have an intensity of about 4 to 30 mille watts/ CM2 at the surface of the liquid polymer. This is not a critical feature since at lower intensites, a longer exposure time can be used to achieve the same result. A light source of this kind is at times designated as an actinic light source.

The other parameter of importance with regard to the fight source is its placement with regard 30 to the object which is to receive the light energy. The collimated light should be in a plane which is parallel to the plane of the object which is to receive the light energy. Thus, the collimated light which is emitted perpendicular to the plane of light will be received perpendicu lar to the plane of the object which is receiving the light. This insures that the end circuit and the circuit design on the photo tool are identical. If this orientation is not maintained, the circuit 35 lines will be offset from that of the photo tool. This will create problems where a board is to carry a different circuit on each side.

Figs. 9 and 10 illustrate single station equipment which incorporates all of the unit operations of Figs. 4 through 7. By single station is meant that each of the steps of Figs. 4-7 are carried out at the same area. The preferred arrangement of the individual units is shown in each figure. 40 The upper part of the cabinet houses light source 27 and has a vent 28 for venting heat and fumes from the apparatus. The fight source is a mercury arc or mercury zenon lamp, is stationary and, thus, can be mounted in any manner which assures rigidity. The lower section 26 of the cabinet houses the vacuum pump 29 and interconnecting tubing 30 and 31, the motor 47 which drives the conveyor system for removing imaged boards to the uncured polymer removal station, and polymer pump and storage tank 48 with delivery tubing 48(a).

The middle area of the cabinet is at the operator working level and contains the particular equipment for the unit operations as shown in Figs. 4 through 7.

In place of a light source mounted in the upper part of the cabinet 25, the light source can be located in the lower part of the cabinet with a series of mirrors in the upper part of the cabinet. 50 These mirrors are positioned to change the path of the light so that it will pass down through the phototool. This can be accomplished by the use of two angled mirrors which will each reflect the light perpendicularly so that the direction of the light beam changes from an upward direction to a downward direction and through the photo tool.

In more detail, after a circuit board blank is placed in the machine and positioned on the retractable pins (as shown in detail in Figs. 4 and 5), a vacuum is drawn on the underside of platen 11 by means of vacuum pump 29 and interconnecting tubing 30. In this view, the roller coater is shown in the position it is in when applying liquid polymer to a circuit board blank. The roller coater application roller 15 and doctor roller 16 are mounted on bracket 32. The application roller is mounted forward of the doctor roller. Each roller turns in a compatable manner as shown in Fig. 5. The area between the rollers receives liquid polymer from pump and tank 48 by means of tubing 48(a). An electronic sensing mechanism maintains a constant level of liquid polymer in the nip of the rolls by switching theliquid polymer pump or actuating a valve to flow the polymer back to the tank. Drive mechanism 33 operates the rollers. This drive mechanism is mounted on the moving carriage and is an electric motor with chain or gear drive 65 6 GB 2 151 51 9A 6 to each roller. Drive mechanism 34 moves the roller coater mechanism forwardly and rearwardly on fixed screw tracks 35. This drive mechanism 34 consists of a stationary reversible electric motor which is connected to each rotating screw by means of a chain drive. That is, the motor shaft and each screw has a sprocket and the chain rides over each sprocket. Preferably a spring loaded idler sprocket is used to tension the screw drive chain. These screw tracks can both 5 support the coater and move it forward and backward in each coating cycle. However, it is preferred to use a separate bearing way 36 to support the roller coater. The roller 15 is usually in contact with the blank only on the forward or the rearward pass over the blank. It can, however, be in contact with the blank on both passes. When coating in the forward direction, the application roller 15, due to the positioning of the doctor roller 16 (behind roller 15), will deposit a thicker film. In the forward direction, this coating can range from about 3 to 10 mils (0.076 to 0.25 mm), while in reverse coating, the coating will be thinner and range from 0.5 to mils (0.0127 to 0.127 mm). Depending on the thickness of the coating desired, the application roller is maintained in contact or is raised out of contact with the blank on the forward or reverse pass over the blank. Solenoids are used to raise the rollers on the forward or 15 rearward pass as desired. The coating time ranges from 4 to 20 seconds, with about 8 seconds found to be convenient. The rotating screw mechanism which moves the roller coater, can be operated at various speeds since it uses a separate reversible electric motor from that which controls the rollers. This coating speed can be changed as the need arises.

The application roller is constructed of a polVene or a mixture of polyyenes. These materials 20 are stable and not significantly affected by the liquid polymer. This roller is of a length to coat the -,-rgest circuit board blank which can be held on the platen and is in the range of about 2 to 6 inches (5 to 15 cm) in diameter. The doctor roller can be of any material not affected by the liquid polymer and is conveniently stainless steel or chrome plated steel. The diameter of this roller is less than that of the application roller. The degree of clearance between the application 25 roller and the platen which holds the blank is set by adjusting two micrometers which raise and lower the rollers but do not raise or lower the screw mechanism for moving the roller assembly over the blank.

Depicted above the roller coater mechanism is the photo tool assembly 37. The photo tool assembly contains the film 19 which is held in planar alignment by glass plate 20. The lower 30 side of the film is the emulsion side of the film and caries the image of the circuit design. The phototool assembly is retractably mounted by means of guide bracket 38 and bearing way 39, so that it can be raised to an upper part of the cabinet when the roller coater is in a forward position applying liquid polymer, and then lowered so as to put the phototool in close air gap relationship with the liquid polymer coating during imaging. The photo tool slideably moves upwardly and downwardly aligned by the bearing ways 39. Chains 40 attached to side brackets 49 of the photo tool assembly and extend upwardly over sprockets 41. These sprockets are rotated by reversible motor 42 via drive shaft 43. Rotating these sprockets raises and lowers the photo tool assembly about 12 inches (30 cm). These sprockets need only have a circumference equal to about the distance that the photo tool assembly is to be raised and lowered. On the lower end of the phototool assembly, there are adjustable pins 44 which are set so as to maintain the proper air gap between the photo tool and the coated surface. At least 4 of these pins are used. These pins contact the platen surface and support the photo tool assembly during imaging. Tubing 31 connects the phototool assembly to the vacuum pump. The vacuum which is drawn on the photo tool holds it in place at its edges. Registration pins can also be used to help align the photo tool. Although the retracting mechanism has been discussed with respect to using a chain, or a cable, a rotating screw as used for the roller coater can be used. However, it is preferred to use a chain or cable elevator-type mechanism for raising and lowering the photo tool assembly.

Once the photo tool assembly is in place and resting on pins 44, the Imap 27 is activated which sends a beam of non-coherent collimated light down onto the photo tool. This light is applied for from 5 to 120 seconds, and preferably for about 20 seconds. As a light source ages and gets weaker, the light application time is extended. Light intensity can be measured manually and the time duration adjusted or an integrator can be used which automatically monitors the time intensity application of light energy and adjusts the light source. The light source is then extinguisheci and the photo too! assembly is raised upwardly to its rest position.

The vacuum on platen is then released, conveyor mechanism 45 raised, and the board automatically removed from the apparatus for further processing. The conveyor is raised by activating solenoids 46 raising bracket 45 which in turn raises rollers 23 and the associated conveyor belt 23(a) in the area of the platen. Motor 47 is simultaneously activated with 60 solenoids 46. Belt 47(a) from the motor drives rollers 23.

The equipment can be operated on a manual or automatic basis. In manual operation, the operator would control each step. However, an automatic operation is preferred, whereby after the circuit board is positioned, the steps are each sequentially performed without any operator control. Besides providing for better quality control, it permits safer operation of the equipment. 65 7 GB 2 151 519A 7 The controls shown in Fig. 9 depicts some of those which are used for automatic operation. It would generally be desirable to have gauges to give a constant indication of vacuum in the platen and photo tool assemblies. Switches would include a Master On-Off switch, vacuum pump switch, and light timer device. These are all state-of-the-art items and still others could be 5 added.

Fig. 10 shows a side view of the apparatus of Fig. 9 from the side opposite that where the circuit board blank exits, i.e., from the left side of the appartus of Fig. 9. The various parts are the same and bear the same numeral designations as in Fig. 8, except that this view shows the use of an optional multiple chamber platen assembly. The upper section 25 contains the light source 27 and vent 28. The lower section 26 which contains the vacuum pump 29, liquid polymer pump, and tank 48 associated polymer supply tubing 48(a), and motor 47 with associated belt 47(a) for driving conveyor rollers 23. The mid-section is the operator-working area, and contains the circuit board positioning mechanism, the roller coater mechanism, and the photo tool assembly. Each of these has been described with reference to Fig. 9, but will be described here again with reference to this Fig. 10.

The circuit board positioning mechanism consists of platen assembly 61 which has a series of holes 63 for drawing a vacuum on the upper side of the platen. The platen here is the multi chamber'platen assembly of Figs. 13 and 14. That is, there are four separate chambers in the platen assembly. A vacuum can be drawn on any or all of these chambers. This platen is used when various sized circuit boards are to be produced. In use a vacuum is only drawn on the chamber or chambers over which there is positioned a circuit board blank.

In securing the circuit board blank, it is first determined as to the chambers in the platen on which a vacuum is to be drawn. Valves 52 with connect lines 53 to vacuum manifold 51 are then opened for the chambers on which a vacuum is to be drawn. The other valves 52 remain closed. After the circuit board is firmly in position, the roller coater is activated so that it moves forward on screws 35 and coats the circuit board blank with liquid polymer. The application and doctor rolls cannot be seen in this view. The roller coaster is then retracted and the photo tool assembly 37 lowers into position. Member 38 guides the photo tool on bearing way 39. Chains are attached to side brackets 49 and raise and lower the photo tool assembly. The photo tool lowers until adjustable pins 44 contact the upper surface of platen 61. In the fully-activated position, the photo toot assembly is supported by these adjustable pins 44. By adjusting these pins, the air gap between the photo tool and the liquid polymer can be changed. When the photo tool assembly is in place, actinic light source 27 is activated. Upon the light source being extinguished, the phototool assembly is raised and the conveyor rollers 23 and associated belts 23(a) are activated. Motor 47 and associated belt 47(a) provide the motive force to rollers 23. 35 At the time that the photo tool is being raised to its storage position, conveyor bracket 45 is raised by solenoids 46. Simultaneously, motor 47 and conveyor rollers 23 and the associated belts are activated so that the circuit board can be lifted off platen 61 and conveyed from the equpment to the next work station.

As discussed, it is preferred to operate this equipment in an automatic mode. Therefore, after 40 turning on the master switch an operator, after inserting the film bearing the circuit design in the photo tool assembly, will position the circuit board blank on the vacuum platen and draw a vacuum on the platen to secure the circuit board blank. When the vacuum on the platen reaches a pre-set level, the liquid polymer roller coater automatically comes forward, and reverse coats the circuit board blank. The roller coater assembly then fully retracts. When the roller coater is 45 in its stored position, the photo toot assembly lowers to within the pre- set air gap distance from the coated board. When the photo tool is in position, the light source is automatically activated for the pre-set time. The light source is then automatically extinguished and the photo tool assembly elevator mechanism raises the photo tool upwardly about 12 inches to its stored position. After the photo tool assembly has been raised a distance of about 2 inches (5 cm), the 50 conveyor mechanism in the area of the platen is raised about 0.5 to 1 inch (12.5 to 25 mm) to contact the underside of the imaged board and the entire conveyor is simultaneously switched on to move the imaged circuit board to the next work station. The equipment is then ready to repeat the roller coating and imaging cycle.

Fig. 11 illustrates the multi-station embodiment of the apparatus to practice the foregoing 55 processes. While in the single station embodiment of Figs. 9 and 10, the coating of the circuit board and its subsequent exposure is conducted at the same location; in the multi-station embodiment these steps are conducted at separate locations. The prime advantage of the multi station embodiment over the single station embodiment is that daily production can be doubled.

This is the result of being able to simultaneously coat one board with liquid polymer while 60 another board is being exposed to the non-coherent collimated light.

In more detail, 80 is the circuit board liquid polymer coating station. The same type of retractable coater as in the single station apparatus of Figs. 9 and 10 can be used. However, a coater where the coating rolls are stationary and the circuit board to be coated passes through the rolls is preferred. This is the case since the board can be continuously moved through to the 65 8 GB 2151 51 9A non-coherent collimated light exposure section. Suitable coaters are commercially available from, for instance, the Union Tool Company. The coater which is illustrated is of the preferred type.

The coater consists of imput conveyor 81 which feeds the board into rolls 83 and 84. Roller 83 is a supporting roller, while roller 84 is the coating roller. Roller 82 is the nip roller. The supply of liquid polymer is maintained in the nip between rollers 82 and 84. After passing through these rollers and being coated, the board passes onto conveyor 86, which is fully enclosed. This enclosure consists of a sheet metal enclosure or optionally can have one or more sides of a transparent plastic. Conveyor 86 transports the coated board into exposure section 90. Immediately prior to the exposure section the board can be pre- exposed to a low level of light to partially polymerize the coating. This would be using low level, non-collimated light radiation, such as by use of fluorescent lights having an output in the UV visible range. This pre-exposure section 88(a) is shown in broken-line outline since it is an optional feature.

Conveyor 86 delivers the board onto platen 89 which is the same as the platen in the single station apparatus. That is, a conveyor moves the board into position over the platen and it is then retracted downwardly with the platen then suporting the board. Guide and registration pins 15 are used to locate the board on the platen until the vacuum is drawn to secure the board onto the platen. However, rather than using guide and registration pins, various other equivalent mechanical techniques can be used.

When the board is in place, the photo tool 93 lowers into place via guideways and elevator mechanism 94. This photo tool is the same as that of the single station apparatus and is more 20 fully described in Fig. 12. When the photo toot is in place and in registration with the board, the non-coherent collimated light source 97 is activated. This light source is the same as in the single station apparatus. It can be located in the upper part 91 of this section of the apparatus, or in the lower area 92 with mirrors located in the upper section to change the direction of the, light so that after it passes upwardly it can, via multiple reflections, be passed downwardly through the photo tool. Regardless of the arrangement, this light source must have the characteristics as previously set forth, and discussed in detail with reference to Fig. 8. Fan and vent system 98 withdraws fumes and heat from the apparatus.

The lower region 92 will also contain the various utilities for the apparatus such as a transformer, vacuum pump, electric motors, valves, switches, and the like. These are arranged 30 as space permits in this area.

After a board is exposed the phototool retracts upwardly, the vacuum which holds the board onto the platen ceases, the platen conveyor moves upwardly from its rest position in the platen and moves the exposed board onto exit conveyor 99 which removes the board from the apparatus. Section 88(b) which is outlined by dashed lines, designates an optional post-cure 35 option. That is, there can be a low intensity, non-collimated light source in the area which would further polymerize the liquid polymer on the board. Conveyor 99 delivers the board to the circuit board finishing line. This consists of apparatus 100 to remove the polymer which was not exposed to the collimated light. Typically, this is accomplished using an alkaline wash solution.

The board can then be etched in section 10 1 to remove exposed metal, and in section 102 the 40 liquid polymer which was polymerized by exposure to the collimated light is removed using a strong alkaline solution. These later three sections which can be considered a developer line can consist of commercially available units from Chemcut Corporation. It should be noted that the board may not proceed through the full developer line, may be removed for some intermediate processing and then placed back in the developer line, or removed for some other form of 45 processing.

Fig. 12 shows the lower surface of the photo tool assembly which is in close air gap relationship with the liquid polymer coating during imaging. Assembly 55, which is a metal such as aluminium, has inner area 59 where the photo tool is placed. Around this opening is vacuum channel 56. Openings 57 connect to tubing 31 on the upper surface. In this view, 50 there are shown six adjusting pins 44. Items 58 are magnets which are embedded in the surface These magnets will hold a metal frame which in addition can be used to hold the photo tool (film or plate) in position. There may optionally be a set of registration pins 60 for aligning the photo tool on the assembly. Such registration pins will pass through small holes in the phototool. In use, the operator places the photo tool on the assembly and places thin steel strips in the area of the embedded magnets, whereby the phototool is sandwiched between the surface and the strips. The vacuum system is then activated and the photo tool further secured in place. The pins 44 are adjusted to provide the proper air gap between the polymer coated blank and the photo tool. The photo tool assembly is then ready for use.

Figs. 13 and 14 are views of the multi-chamber vacuum platen embodiment. Fig. 13 is a 60 perspective view of the platen. In this view, the multi-chamber platen has the same appearance as the single chamber platen 11. In the single chamber platen of Fig. 4, a sealing plate fits onto shoulder 11 (a) to form the vacuum chamber with vacuum line 30 attaching to this sealing plate.

It also has the same channels 62 where the conveyor belts are located when not in use. And, further, both platens have a series of holds which communicate from the upper surface through 65 9 GB 2 151 51 9A 9 to the inner chamber. In the single chamber platen these are designated 14, while in the multi chambered platen they are designated 63. Fig. 14 is a section through the multi-chamber platen. The side walls 64 also form part of the outter chamber 67. Inner walls 65 form the walls of chambers 68, 69, and 70. Openings are passed through the lower surface and are connected to a vacuum manifold. The vacuum manifold and inter-connecting tubing is shown in Fig. 10. 5 As discussed above, this multi-chamber platen assembly is more efficient when various sized circuit boards are to be produced. That is, for a small board, a vacuum would be drawn only on chamber 70, while for the largest boards a vacuum would be drawn on all of the chambers in order to better hold the circuit board blank in place.

In place of the multi-chamber vacuum platen there can be used a platen where the holes in 10 the upper position can each be selectively opened or closed. One technique is to use holes having an offset coniiguration as shown in Fig. 11 (a). The hole is offset and has a ball closure. When the platen is aluminum or a similar material, magnetic balls (attracted to a magnet) can be placed selectively in the holes to block the holes when a vacuum is drawn. Then to remove the balls, it is only necessary to move a magnet over the platen. If the platen is of a magnetic 15 material, magnetic or other shot can be used with removal accomplished by an overpressure of air within the platen. This would blow the balls out of the holes.

Any liquid polymer composition which is curable to a solid using noncoherent collimated fight and strippable in liquid systems can be used in the present processes. Suitable liquid polymer compositions which can be used are those set forth in U.S. Patents 3,660, 088 and 3,753,720. 20 However, a preferred polymer is a urethane having terminal unsaturation on one end of the polymer molecule and a terminal carboxyl group on the other end of the polymer molecule. The terminal unsaturation is curable by free radical polymerization using non-coherent collimated light, while the terminal carboxyl group provides for strippability of the cured polymer using concentrated alkaline solutions. A polymer having these characteristics and useful in the present 25 processes is one having the following formula:

H 0 0 H H 0 0 H H 0 9 @0 CH -0-C"-N-R -N,-C"-O--(?-E'±-0-C-C-C-C-OH 2 1 2 X wherein R, is an alkyl group of from 1 to 6 carbon atoms, R, is the organic moiety of a diisocyanate and is an alicyclic, aryl, alkyl or arylalkyl group, and (PE), is a polyester or polyether extending chain unit where X is an integer of from 2 to 50.

This polymer can be used alone or in conjunction with a viscosity modifier such as a carboxy 35 terminated hydroxyethyl methacrylate having the formula:

CP 3 0 H H C.-q-c-CH -CE -0----COOH E2 2 2 0 By adding varying amounts of the carboxy terminated hydroxyethyle methacrylate the viscosity of the liquid polymer composition can be changed. Other viscosity modifers can also be used.

Also, useful in the liquid polymer composition is a photosensitizer such as, but not limited to, benzophenone, acetophenone, acenaphthenequinone, o-methyoxybenzophenone, dibenzosuber one, anthraquinone, hexanophenone, or 2,2-dimethoxy-2-phenyl aceto phenone. These sub stances enhance free radical generation and, thus speed the curing process. Other photo sensitizers can be used.

These are the prime additives in the preferred liquid polymer composition. However, these 50 compositions can also contain crosslinking agents containing terminal unsaturated and/or terminal thiol groups. These and other possible additives include an epoxy acrylate, a multifunctional acrylate such as hexanediol diaerylate, a multifunctional thiol such as pentaeryth ritol-tetrakis-(,8 merca pto prop ionate) and a phenolic stabilizer such as hydroquinone-mono-methyl ether or trihydroxy benzene. These additives stabilize the composition and also provide means 55 for bridging the polymerized carboxy terminated urethane to itself and also to the carboxy terminated hydroxyethyl methaerylate. Bridging provides for a harder cured polymer, and one which generally has higher thermal stability. For instance, when solder masks are to be made a bridging agent is used so that the polymer could better withstand the 400' or 500'F. (204 or 260'C) temperature of tin-lead solder sprays.

This disclosure has been directed primarily to copper clad circuit board since they are presently the predominent printed circuit board presently commercially made. However, the processes are operable with other metal claddings and, further, would be operable with non metallic conductive coatings. Therefore, whever metal cladding is used, it is understood to include equivalent claddings.

GB 2 151 519A 10 This disclosure is directed to the use of non-coherent collimated light. A light having the specifications set forth herein has been developed for this present use by the Optical Radiation Company. A laser light beam is a coherent collimated light beam and cannot be used in place of the non- coherent collimated light was to be used, the laser beam would, via a computer system, have to be set to scan the design of the desired circuit. Such a laser system would be much more expensive than the non-coherent collimated iight and photo tool arrangements discussed in detail in this application, and would require a longer duration in the exposure section leading to a loss of production. Also, a laser system would not meet the image deviation factor of not more than 0. 5 mil (0.0 127 mm).

The following examples disclose the invention in more detail.

EXAMPLE 1

This example sets forth a process for making one of the preferred liquid polymer composition.

A resin kettle is fitted with a stirrer, thermometer, drying tube and an addition funnel. 185 g of toluene diisocyanate), 0.63 g of hydroquinone monomethyl ether (MEHQ); 5.8 g of triphenyl- 15 Phosphite and 0. 15 9 of dibutyl-tin dilaurate are added to this kettle. Upon heating the mixture to 30'-35C., there is added dropwise 189 9 of hydroxypropyl acrylate, allowing the mixture to exotherm to 65'C. The temperature is maintained between 6W-65,C for 1-1 /2 hours at which time substantially all of the hydroxy groups are consumed, and the NCO content reaches 1.77 0.1 meg/g as determined by titration with dibutylamine. Thereafter, 785 g of melted 20 poly (diethyleneglycol adipate) with a molecular weight of 1000 is added along with 0. 15 g of dibutyl-tin dilaurate catalyst. The reaction mixture is held at 65"-70'C for approximately 6 hours until the isocyanate groups are consumed.

385 g of hydroxyethyl methaerylate and 0.42 g of hydroquinone are then added to this mixture. When the reaction mixture has become uniform and the temperature has dropped to 25 below 65'C, 248 9 of solid maleic anhydride and 8 9 of dibutyl-tin dilaurate are added. Slowly (over about an hour) the reaction mixture is heated up to 5WC to dissolve the maleic anhydride.

The heating is continued and held at 75'-80'C for approximately 6 hours until the maieic anhydride is completely reacted, as indicated by the absence of 1845 and 1975 cm- 1 peaks in an]R spectrograph. The final product thus obtained is a viscous liquid having viscosity of 5700 30 cps at 2WC and acid group contents of 1.4 meq/a.

The prepolymer has the following composition:

0 H ? CH 3? RC-C-C-O-CH -c 2 2 22-0- C-C 4 H 0- C-Of 5 2 2 to-M 0 WC-01CH CH OCR CH CH3 C 8 H ? -C-C-C-C-OH CH3 0 A. H ? aionm with H 2 C-C-C-O-CH 2 CH 2 0 C-C-C-C-OH EXAMPLE 2

The following composition is prepared from the resin product of Example 1 and is used in 50 etch resist processing to make a printed circuit board:

11 GB 2 151 519A 11 Component The resin product of Exarnple 1 Epoxy acrylate (Epocryl 370) Irgacure 551 Benzophenone Wt. 1 79.93 6.93 0.92 2.76 Hydroquinone Mono-methyl ether 0.046 10 Pyrogallol 0.023 Leveling agent (Modaflow) 2.30 15 Chromophtal Blue 0.64 (Ciba-Geigy) Pentaerythritol tetra-kis- 6.46 20 (f - Mercaptopropionate) This composition has a Brookfield viscosity of 3,450 centipoises at 24,C.

A copper clad-epoxy fiberglass printed circuit board blank was cleaned by wet scrubbing with 25 pumice using a Scotch Brite pad to remove corrosion and foreign material. The blank was then coated with the above composition to about 2.5 mil (0.0635 mm) for 60 seconds through a photographic negative with a 25 mil (0.635 mm) air gap to the liquid coating on the board using a medium pressure mercury vapor lamp at a distance where the radiation intensity is about 25 mil-watts /CM2. The exposed board is then spray-washed using a 5% sodium carbonate solution at room temperature for 10 seconds followed by water-rising and air drying leavina the cured nhoto-resist as an image with high fidelity and resolution.

The washed board with the circuit pattern is then subject to hydrochloric acid-cupric chloride etching for 60 seconds at 52'C to dissolve the copper in the uncoated areas. The cured polymer resist remains intact and provides good protection of the copper against the etchant. The cured 35 polymer is then stripped using a 5% solution of sodium hydroxide at WC. About 30 seconds is required for stripping. The copper remaining on the board is found to have excellent detail and integrity. The circuit board lines are well shaped with sharp edges and have sidewalls which are essentially perpendicular to the substrate. On continuity and resistance testing, it is found that there are no short circuits and the resistance of similar circuit is essentially constant. Also, none 40 of the liquid polymer entered any of the holes through the board.

EXAMPLE 3

This example illustrates making plate resists using the liquid polymer of Example 2. A circuit board blank (copper cladding of 1 ounce/sq. ft. or 305 9./M2) is then coated with the liquid 45 polymer composition used in Example 2 by reverse coating. The coating thickness was nominally 1.9 mils (0.048 mm). An Optical Radiation Company collimated mercury-xenon light was used as the energy source. The photo tool spacing pins were set to produce an air gap of about 30 mils (0.76 mm; the photo tool was opaque areas in the same design as the desired circuit). The liquid polymer was exposed to the mercury-zenon source for 30 seconds. The board was then transported to a Cherncut spray washer where it was contacted with sodiumcarbonate at a pH of 10.5 for 10 seconds.

The expose copper is then electroplated with tinlead and the cured polymer is removed in a spray bath using a 5% sodium hydroxide solution at 1 W- 1 40'F. (54'-60'C). Stripping is complete in 30 seconds and the board is water rinsed. The exposed copper cladding is then removed by etching with a 3N hydrochloric acid-cupric chloride solution at 52,C. Etching is complete in 60 seconds and the board is then water rinsed. The circuit had high resolution and no short circuits.

EXAMPLE 4

This example illustrates making solder masks using the liquid polymer of Example 2.

A finished copper printed circuit board was secured onto a platen and a roller coater by reverse roller coating a continuous layer of the liquid polymer composition of Example 2 onto the circuit board. The coating was about 1.5 mils (0.038 mm) thick on the circuit, and about 4 6 5 to 5 mils (0. 1 to 0. 13 mm) thick in the none circuit bearing areas. A photo tool which is 12 GB 2 151 519A 12 transparent, except for the circuit areas where solder is to be deposited, is placed in exact registration with the circuit board. The air gap used was 20 mils (0.5 mm). An Optical Radiation Company mercury-xenon collimated light source was used to cure the polymer. The light was extinguished after 60 seconds and the board spray-washed with aqueous sodium carbonate solution at 10.5 pH. Spray washing was continued for 30 seconds. The board was removed and dried. The circuit board was then placed in a wave soldering apparatus where solder was applied to the exposed copper area. There was no damage to the cured polymer due to contact with molten solder- The cured polymer was left on the circuit board as a protective layer.

EXAMPLE 5

The procedure of Example 2 was repeated but using as a photo tool a circuit design where the circuit lines are to be 6 mils (0. 15 mm) in width and with 6 mil (0. 15 mm) spacing between circuit lines. The photo tool was a polyester film having a series of 6 mil (0.15 mm) wide opaque areas spaced apart by 6 mil (0. 15 mm) wide transparent areas. An Optical Radiation Company collimated mercury-zenon light source was used for imaging. The other steps were the same as in Example 2. The resulting circuit board had well defined copper circuit lines which had side walls perpendicular to the board. None of the circuit lines had a short circuit.

The circuit lines were nominally 6 mils (0.15 mm) wide with the spacings also nominally 6 mils (0. 15 mm) wide.

With regard to the preferred class of polymers which can be used herein, we refer to our 20 Application No. 82/01144 Publication No. 2091278 filed on even date herewith and entitled ---PclymerComposition Having Terminal Alkene And Terminal Carboxyl Groups- --.

Claims (6)

1. A multiple chamber vacuum platen comprising a base member; a plurality of continuous 25 walls of a uniform height extending upwardly therefrom, said continuous walls defining separate regions; an upper member having a plurality of openings therethrough and sealably contacting the upper part of said walls to form a plurality of sealed chambers; and means for connecting each of said chambers to a device to draw a vacuum thereon.

2. A multiple chamber vacuum platen as in claim 1, wherein there are a series of up to four 30 chambers.

3. A multiple chamber vacuum platen as in claim 1, wherein said upper member has a plurality of parallel channels on the upper surface thereof, said channels extending from one end of said member to the other.

4. A vacuum platen capable of selectively having a vacuum drawn thereon comprising an 35 upper surface having holes extending therethrough to an enclosure and means to show a vacuum on said enclosure; said holes being countersunk so as to accept balls therein capable of sealing said holes when a vacuum is drawn within said enclosure.

5. A vacuum platen as in claim 4, wherein said platen is of a nonmagnetic material and said balls are magnetic.

6. A vacuum platen as in any one of claims 1 to 5 constructed and arranged to operate in anv one of the embodiments as herein described and with reference to and as illustrated in the eccompanying drawings.

Printeu in the United Kingdom for Her Majesty's Stationery Office, Dd 8818935. 1985, 4235Pit.i;s!,e-i at The Pa'ent Office, 25 S,3uthampton RuiWings, London, WC2A lAY, from Y.hich copies m3V be obtair.j