GB2143372B - Applying barrier metal to a semiconductor - Google Patents

Applying barrier metal to a semiconductor

Info

Publication number: GB2143372B
Authority: GB; United Kingdom
Prior art keywords: semiconductor; barrier metal; applying barrier; applying; metal
Prior art date: 1983-07-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB08415370A

Other versions

GB2143372A (en

GB8415370D0 (en

Inventor

John Shouse Shier

Walter Harry Jopke

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Control Data Corp

Original Assignee

Control Data Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-07-12

Filing date

1984-06-15

Publication date

1987-07-01

1983-07-12 Priority claimed from US06/513,208 external-priority patent/US4486946A/en

1984-06-15 Application filed by Control Data Corp filed Critical Control Data Corp

1984-07-18 Publication of GB8415370D0 publication Critical patent/GB8415370D0/en

1985-02-06 Publication of GB2143372A publication Critical patent/GB2143372A/en

1987-07-01 Application granted granted Critical

1987-07-01 Publication of GB2143372B publication Critical patent/GB2143372B/en

Status Expired legal-status Critical Current

Classifications

- H10W20/064—
- H10W20/425—

GB08415370A 1983-07-12 1984-06-15 Applying barrier metal to a semiconductor Expired GB2143372B (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US51320683A	1983-07-12	1983-07-12
US06/513,208 US4486946A (en)	1983-07-12	1983-07-12	Method for using titanium-tungsten alloy as a barrier metal in silicon semiconductor processing

Publications (3)

Publication Number	Publication Date
GB8415370D0 GB8415370D0 (en)	1984-07-18
GB2143372A GB2143372A (en)	1985-02-06
GB2143372B true GB2143372B (en)	1987-07-01

Family

ID=27057779

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB08415370A Expired GB2143372B (en)	1983-07-12	1984-06-15	Applying barrier metal to a semiconductor

Country Status (4)

Country	Link
AU (1)	AU563246B2 (en)
DE (1)	DE3425599A1 (en)
FR (1)	FR2549289B1 (en)
GB (1)	GB2143372B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
IL82113A (en) *	1987-04-05	1992-08-18	Zvi Orbach	Fabrication of customized integrated circuits
US5055423A (en) *	1987-12-28	1991-10-08	Texas Instruments Incorporated	Planarized selective tungsten metallization system
JPH0748502B2 (en) *	1988-05-13	1995-05-24	三菱電機株式会社	Method for manufacturing semiconductor device
GB9105943D0 (en) *	1991-03-20	1991-05-08	Philips Nv	A method of manufacturing a semiconductor device
JP3118785B2 (en) *	1991-05-23	2000-12-18	ソニー株式会社	Method of forming barrier metal structure
US5364817A (en) *	1994-05-05	1994-11-15	United Microelectronics Corporation	Tungsten-plug process

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3946426A (en) *	1973-03-14	1976-03-23	Harris Corporation	Interconnect system for integrated circuits
FR2372511A1 (en) *	1976-11-25	1978-06-23	Comp Generale Electricite	Emitters and base contacts formed on planar semiconductors - with only a short distance between emitter and base

1984
- 1984-06-15 GB GB08415370A patent/GB2143372B/en not_active Expired
- 1984-06-22 AU AU29794/84A patent/AU563246B2/en not_active Ceased
- 1984-07-05 FR FR8410694A patent/FR2549289B1/en not_active Expired
- 1984-07-11 DE DE19843425599 patent/DE3425599A1/en not_active Withdrawn

Also Published As

Publication number	Publication date
AU2979484A (en)	1985-01-17
FR2549289A1 (en)	1985-01-18
FR2549289B1 (en)	1987-04-30
DE3425599A1 (en)	1985-04-25
GB2143372A (en)	1985-02-06
GB8415370D0 (en)	1984-07-18
AU563246B2 (en)	1987-07-02

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Legal Events

Date	Code	Title	Description
1992-02-12	PCNP	Patent ceased through non-payment of renewal fee