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GB2142045B - Growth of semiconductors - Google Patents

Growth of semiconductors

Info

Publication number
GB2142045B
GB2142045B GB08414018A GB8414018A GB2142045B GB 2142045 B GB2142045 B GB 2142045B GB 08414018 A GB08414018 A GB 08414018A GB 8414018 A GB8414018 A GB 8414018A GB 2142045 B GB2142045 B GB 2142045B
Authority
GB
United Kingdom
Prior art keywords
semiconductors
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08414018A
Other versions
GB2142045A (en
GB8414018D0 (en
Inventor
Rodney Hollands Moss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Telecommunications PLC
Original Assignee
British Telecommunications PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB838316318A external-priority patent/GB8316318D0/en
Application filed by British Telecommunications PLC filed Critical British Telecommunications PLC
Priority to GB08414018A priority Critical patent/GB2142045B/en
Publication of GB8414018D0 publication Critical patent/GB8414018D0/en
Publication of GB2142045A publication Critical patent/GB2142045A/en
Application granted granted Critical
Publication of GB2142045B publication Critical patent/GB2142045B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
    • C23C16/4588—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically the substrate being rotated

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
GB08414018A 1983-06-15 1984-06-01 Growth of semiconductors Expired GB2142045B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08414018A GB2142045B (en) 1983-06-15 1984-06-01 Growth of semiconductors

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB838316318A GB8316318D0 (en) 1983-06-15 1983-06-15 Semiconductors
GB08414018A GB2142045B (en) 1983-06-15 1984-06-01 Growth of semiconductors

Publications (3)

Publication Number Publication Date
GB8414018D0 GB8414018D0 (en) 1984-07-04
GB2142045A GB2142045A (en) 1985-01-09
GB2142045B true GB2142045B (en) 1987-12-31

Family

ID=26286373

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08414018A Expired GB2142045B (en) 1983-06-15 1984-06-01 Growth of semiconductors

Country Status (1)

Country Link
GB (1) GB2142045B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8421162D0 (en) * 1984-08-21 1984-09-26 British Telecomm Growth of semi-conductors

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1110946A (en) * 1963-12-12 1968-04-24 Ass Elect Ind Improvements in or relating to the deposition of epitaxial layers
DE1260047B (en) * 1965-03-24 1968-02-01 Siemens Ag Heavy current cryotron
GB1077320A (en) * 1965-04-21 1967-07-26 Murray Bloom Improvements in and relating to semiconductors
US4022939A (en) * 1975-12-18 1977-05-10 Western Electric Company, Inc. Synchronous shielding in vacuum deposition system
DE2847620C2 (en) * 1978-11-02 1984-10-18 Siemens AG, 1000 Berlin und 8000 München Device for the production of electrical components, in particular film capacitors

Also Published As

Publication number Publication date
GB2142045A (en) 1985-01-09
GB8414018D0 (en) 1984-07-04

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950601