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GB2033096B - Registered writing beam - Google Patents

Registered writing beam

Info

Publication number
GB2033096B
GB2033096B GB7933221A GB7933221A GB2033096B GB 2033096 B GB2033096 B GB 2033096B GB 7933221 A GB7933221 A GB 7933221A GB 7933221 A GB7933221 A GB 7933221A GB 2033096 B GB2033096 B GB 2033096B
Authority
GB
United Kingdom
Prior art keywords
writing beam
registered
registered writing
writing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7933221A
Other versions
GB2033096A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB7933221A priority Critical patent/GB2033096B/en
Publication of GB2033096A publication Critical patent/GB2033096A/en
Priority to GB08132432A priority patent/GB2105858B/en
Application granted granted Critical
Publication of GB2033096B publication Critical patent/GB2033096B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB7933221A 1978-10-02 1979-09-25 Registered writing beam Expired GB2033096B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB7933221A GB2033096B (en) 1978-10-02 1979-09-25 Registered writing beam
GB08132432A GB2105858B (en) 1978-10-02 1981-10-28 Registered writing beam

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB7838953 1978-10-02
GB7933221A GB2033096B (en) 1978-10-02 1979-09-25 Registered writing beam

Publications (2)

Publication Number Publication Date
GB2033096A GB2033096A (en) 1980-05-14
GB2033096B true GB2033096B (en) 1983-02-09

Family

ID=26269033

Family Applications (2)

Application Number Title Priority Date Filing Date
GB7933221A Expired GB2033096B (en) 1978-10-02 1979-09-25 Registered writing beam
GB08132432A Expired GB2105858B (en) 1978-10-02 1981-10-28 Registered writing beam

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB08132432A Expired GB2105858B (en) 1978-10-02 1981-10-28 Registered writing beam

Country Status (1)

Country Link
GB (2) GB2033096B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3221797B2 (en) * 1994-06-14 2001-10-22 株式会社日立製作所 Sample preparation method and apparatus
JP3141732B2 (en) * 1995-07-05 2001-03-05 株式会社日立製作所 Charged particle beam equipment
AU5877100A (en) * 1999-06-16 2001-01-02 Norsam Technologies Method apparatus and article of manufacture for a branding diamond branding with a focused ion beam

Also Published As

Publication number Publication date
GB2033096A (en) 1980-05-14
GB2105858A (en) 1983-03-30
GB2105858B (en) 1983-08-10

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee