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GB202218776D0 - Universal photolithography tool - Google Patents

Universal photolithography tool

Info

Publication number
GB202218776D0
GB202218776D0 GBGB2218776.9A GB202218776A GB202218776D0 GB 202218776 D0 GB202218776 D0 GB 202218776D0 GB 202218776 A GB202218776 A GB 202218776A GB 202218776 D0 GB202218776 D0 GB 202218776D0
Authority
GB
United Kingdom
Prior art keywords
universal
photolithography tool
photolithography
tool
universal photolithography
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB2218776.9A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Tech Ltd
Original Assignee
Semiconductor Tech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Tech Ltd filed Critical Semiconductor Tech Ltd
Priority to GBGB2218776.9A priority Critical patent/GB202218776D0/en
Publication of GB202218776D0 publication Critical patent/GB202218776D0/en
Priority to EP23855756.5A priority patent/EP4634725A2/en
Priority to PCT/GB2023/053196 priority patent/WO2024126995A2/en
Priority to CN202380093897.4A priority patent/CN120883142A/en
Priority to TW112148474A priority patent/TW202439014A/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GBGB2218776.9A 2022-12-13 2022-12-13 Universal photolithography tool Ceased GB202218776D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GBGB2218776.9A GB202218776D0 (en) 2022-12-13 2022-12-13 Universal photolithography tool
EP23855756.5A EP4634725A2 (en) 2022-12-13 2023-12-12 Universal photolithography tool
PCT/GB2023/053196 WO2024126995A2 (en) 2022-12-13 2023-12-12 Universal photolithography tool
CN202380093897.4A CN120883142A (en) 2022-12-13 2023-12-12 General photolithography tools
TW112148474A TW202439014A (en) 2022-12-13 2023-12-13 Universal photolithography tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB2218776.9A GB202218776D0 (en) 2022-12-13 2022-12-13 Universal photolithography tool

Publications (1)

Publication Number Publication Date
GB202218776D0 true GB202218776D0 (en) 2023-01-25

Family

ID=84974871

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB2218776.9A Ceased GB202218776D0 (en) 2022-12-13 2022-12-13 Universal photolithography tool

Country Status (5)

Country Link
EP (1) EP4634725A2 (en)
CN (1) CN120883142A (en)
GB (1) GB202218776D0 (en)
TW (1) TW202439014A (en)
WO (1) WO2024126995A2 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001077009A (en) * 1999-09-07 2001-03-23 Nikon Corp Substrate processing system
JP4331092B2 (en) * 2003-10-17 2009-09-16 エーエスエムエル ネザーランズ ビー．ブイ． Lithographic processing cell, lithographic apparatus, track, and device manufacturing method
US9128387B2 (en) * 2013-05-14 2015-09-08 Taiwan Semiconductor Manufacturing Co., Ltd. Ultraviolet light emitting diode array light source for photolithography and method
CN113721429A (en) * 2021-09-10 2021-11-30 大连理工大学 Maskless photoetching system and corresponding photoetching method thereof

Also Published As

Publication number Publication date
CN120883142A (en) 2025-10-31
WO2024126995A2 (en) 2024-06-20
TW202439014A (en) 2024-10-01
WO2024126995A3 (en) 2024-08-15
EP4634725A2 (en) 2025-10-22

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)