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GB2021789B - Monitoring voltage using an electron beam probe - Google Patents

Monitoring voltage using an electron beam probe

Info

Publication number
GB2021789B
GB2021789B GB7918090A GB7918090A GB2021789B GB 2021789 B GB2021789 B GB 2021789B GB 7918090 A GB7918090 A GB 7918090A GB 7918090 A GB7918090 A GB 7918090A GB 2021789 B GB2021789 B GB 2021789B
Authority
GB
United Kingdom
Prior art keywords
electron beam
monitoring voltage
beam probe
probe
monitoring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7918090A
Other versions
GB2021789A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB2021789A publication Critical patent/GB2021789A/en
Application granted granted Critical
Publication of GB2021789B publication Critical patent/GB2021789B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
GB7918090A 1978-05-30 1979-05-24 Monitoring voltage using an electron beam probe Expired GB2021789B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19782823642 DE2823642A1 (en) 1978-05-30 1978-05-30 METHOD FOR CONTACTLESS POTENTIAL MEASUREMENT ON AN ELECTRONIC COMPONENT

Publications (2)

Publication Number Publication Date
GB2021789A GB2021789A (en) 1979-12-05
GB2021789B true GB2021789B (en) 1982-07-07

Family

ID=6040559

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7918090A Expired GB2021789B (en) 1978-05-30 1979-05-24 Monitoring voltage using an electron beam probe

Country Status (4)

Country Link
JP (1) JPS54157085A (en)
DE (1) DE2823642A1 (en)
GB (1) GB2021789B (en)
NL (1) NL7904226A (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3036660A1 (en) * 1980-09-29 1982-05-19 Siemens AG, 1000 Berlin und 8000 München ARRANGEMENT FOR STROBOSCOPIC POTENTIAL MEASUREMENTS WITH AN ELECTRON BEAM MEASURING DEVICE
US4415851A (en) * 1981-05-26 1983-11-15 International Business Machines Corporation System for contactless testing of multi-layer ceramics
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
DE3138901A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München IMPROVED COUNTERFIELD SPECTROMETER FOR ELECTRON BEAM MEASUREMENT TECHNOLOGY
DE3138927A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Imaging spectrometer for electron-beam metrology and an electron beam measurement apparatus
DE3138990A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Coaxial opposing field spectrometer of high acceptance for secondary electrons and an electron beam test set
DE3138926A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Electron-optical arrangement for high-resolution electron-beam metrology
DE3138929A1 (en) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München IMPROVED SECONDARY ELECTRON SPECTROMETER FOR POTENTIAL MEASUREMENT ON A SAMPLE WITH AN ELECTRON PROBE
DE3206309A1 (en) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München SECONDARY ELECTRON SPECTROMETER AND METHOD FOR ITS OPERATION
JPS5932145A (en) * 1982-08-16 1984-02-21 Hitachi Ltd Potential detection device
DE3232671A1 (en) * 1982-09-02 1984-03-08 Siemens AG, 1000 Berlin und 8000 München ARRANGEMENT AND METHOD FOR MEASURING VOLTAGE ON A CURVED MEASURING OBJECT
DE3235100A1 (en) * 1982-09-22 1984-03-22 Siemens AG, 1000 Berlin und 8000 München METHOD FOR MEASURING ELECTRICAL POTENTIALS AT BURNED SOLID MATERIAL
DE3235484A1 (en) * 1982-09-24 1984-03-29 Siemens AG, 1000 Berlin und 8000 München METHOD FOR SUPPRESSING A MALFUNCTION IN THE MEASUREMENT OF SIGNAL FLOWS WITH A BODY PROBE AND DEVICE FOR PERFORMING SUCH A METHOD
GB8515250D0 (en) * 1985-06-17 1985-07-17 Texas Instruments Ltd Testing of integrated circuits
US4943769A (en) 1989-03-21 1990-07-24 International Business Machines Corporation Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
JP2973554B2 (en) * 1991-03-19 1999-11-08 富士通株式会社 Voltage measurement method using electron beam device
US11189457B2 (en) 2017-09-29 2021-11-30 Hitachi High-Tech Corporation Scanning electron microscope

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1246744A (en) * 1969-01-02 1971-09-15 Graham Stuart Plows Electron beam apparatus
GB1277303A (en) * 1969-09-16 1972-06-14 Gen Electric Method and apparatus for testing circuits with an electron beam

Also Published As

Publication number Publication date
DE2823642A1 (en) 1980-01-03
GB2021789A (en) 1979-12-05
NL7904226A (en) 1979-12-04
JPS54157085A (en) 1979-12-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee