GB201916620D0 - Method and apparatus for sputter deposition of target material to a substrate - Google Patents
Method and apparatus for sputter deposition of target material to a substrateInfo
- Publication number
- GB201916620D0 GB201916620D0 GBGB1916620.6A GB201916620A GB201916620D0 GB 201916620 D0 GB201916620 D0 GB 201916620D0 GB 201916620 A GB201916620 A GB 201916620A GB 201916620 D0 GB201916620 D0 GB 201916620D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- target material
- sputter deposition
- sputter
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1916620.6A GB2588933A (en) | 2019-11-15 | 2019-11-15 | Method and apparatus for sputter deposition of target material to a substrate |
| PCT/GB2020/052838 WO2021094721A1 (en) | 2019-11-15 | 2020-11-10 | Method and apparatus for sputter deposition of target material to a substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1916620.6A GB2588933A (en) | 2019-11-15 | 2019-11-15 | Method and apparatus for sputter deposition of target material to a substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB201916620D0 true GB201916620D0 (en) | 2020-01-01 |
| GB2588933A GB2588933A (en) | 2021-05-19 |
Family
ID=69063179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1916620.6A Withdrawn GB2588933A (en) | 2019-11-15 | 2019-11-15 | Method and apparatus for sputter deposition of target material to a substrate |
Country Status (2)
| Country | Link |
|---|---|
| GB (1) | GB2588933A (en) |
| WO (1) | WO2021094721A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2588940B (en) | 2019-11-15 | 2022-06-22 | Dyson Technology Ltd | Sputter deposition |
| GB2588939B (en) | 2019-11-15 | 2022-12-28 | Dyson Technology Ltd | Sputter deposition apparatus and method |
| GB2588935B (en) | 2019-11-15 | 2022-09-07 | Dyson Technology Ltd | Method and apparatus for sputter deposition of target material to a substrate |
| GB2588932B (en) | 2019-11-15 | 2022-08-24 | Dyson Technology Ltd | Method and apparatus for sputter deposition of target material to a substrate |
| GB2588947B (en) | 2019-11-15 | 2024-02-21 | Dyson Technology Ltd | A method of manufacturing solid state battery cathodes for use in batteries |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4849087A (en) * | 1988-02-11 | 1989-07-18 | Southwall Technologies | Apparatus for obtaining transverse uniformity during thin film deposition on extended substrate |
| US7166199B2 (en) * | 2002-12-18 | 2007-01-23 | Cardinal Cg Company | Magnetron sputtering systems including anodic gas distribution systems |
| TWI349042B (en) * | 2006-02-09 | 2011-09-21 | Sputtering system providing large area sputtering and plasma-assisted reactive gas dissociation |
-
2019
- 2019-11-15 GB GB1916620.6A patent/GB2588933A/en not_active Withdrawn
-
2020
- 2020-11-10 WO PCT/GB2020/052838 patent/WO2021094721A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021094721A1 (en) | 2021-05-20 |
| GB2588933A (en) | 2021-05-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |