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GB201806585D0 - Load Lock - Google Patents

Load Lock

Info

Publication number
GB201806585D0
GB201806585D0 GBGB1806585.4A GB201806585A GB201806585D0 GB 201806585 D0 GB201806585 D0 GB 201806585D0 GB 201806585 A GB201806585 A GB 201806585A GB 201806585 D0 GB201806585 D0 GB 201806585D0
Authority
GB
United Kingdom
Prior art keywords
load lock
lock
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB1806585.4A
Other versions
GB2573110A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Emerson and Renwick Ltd
Original Assignee
Emerson and Renwick Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Emerson and Renwick Ltd filed Critical Emerson and Renwick Ltd
Priority to GB1806585.4A priority Critical patent/GB2573110A/en
Publication of GB201806585D0 publication Critical patent/GB201806585D0/en
Priority to PCT/GB2019/051134 priority patent/WO2019207295A1/en
Priority to GB2018266.3A priority patent/GB2588529A/en
Publication of GB2573110A publication Critical patent/GB2573110A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H10P72/0451—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • H10P72/0441—
    • H10P72/0466—
    • H10P72/3314—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
GB1806585.4A 2018-04-23 2018-04-23 Load Lock Withdrawn GB2573110A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB1806585.4A GB2573110A (en) 2018-04-23 2018-04-23 Load Lock
PCT/GB2019/051134 WO2019207295A1 (en) 2018-04-23 2019-04-23 Sealing device
GB2018266.3A GB2588529A (en) 2018-04-23 2019-04-23 Sealing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1806585.4A GB2573110A (en) 2018-04-23 2018-04-23 Load Lock

Publications (2)

Publication Number Publication Date
GB201806585D0 true GB201806585D0 (en) 2018-06-06
GB2573110A GB2573110A (en) 2019-10-30

Family

ID=62236089

Family Applications (2)

Application Number Title Priority Date Filing Date
GB1806585.4A Withdrawn GB2573110A (en) 2018-04-23 2018-04-23 Load Lock
GB2018266.3A Withdrawn GB2588529A (en) 2018-04-23 2019-04-23 Sealing device

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB2018266.3A Withdrawn GB2588529A (en) 2018-04-23 2019-04-23 Sealing device

Country Status (2)

Country Link
GB (2) GB2573110A (en)
WO (1) WO2019207295A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10945752B2 (en) 2019-03-20 2021-03-16 Covidien Lp Tissue resecting instrument including a rotation lock feature
US20220112594A1 (en) * 2020-10-14 2022-04-14 Applied Materials, Inc. Device for sealing a vacuum chamber, vacuum processing system, and method of monitoring a load lock seal

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2331367A1 (en) * 1973-06-20 1975-01-23 Kleinewefers Ind Co Gmbh SEAL FOR TREATMENT CONTAINERS, IN PARTICULAR FOR TEXTILE TRACKS
US7090743B2 (en) * 1999-09-20 2006-08-15 Hunter Douglas Inc. Pressure laminator apparatus
TWI341816B (en) * 2008-08-14 2011-05-11 Gudeng Prec Industral Co Ltd A wafer container having the latch and inflatable seal element
WO2010025257A2 (en) * 2008-08-28 2010-03-04 Applied Materials, Inc. Slotted tssl door to couple o-ring with moving mating part
US8641014B2 (en) * 2010-09-10 2014-02-04 Applied Materials, Inc. Gate valve

Also Published As

Publication number Publication date
GB202018266D0 (en) 2021-01-06
GB2588529A (en) 2021-04-28
GB2573110A (en) 2019-10-30
WO2019207295A1 (en) 2019-10-31

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)