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GB201522137D0 - Method of imaging defects using an electron microscope - Google Patents

Method of imaging defects using an electron microscope

Info

Publication number
GB201522137D0
GB201522137D0 GBGB1522137.7A GB201522137A GB201522137D0 GB 201522137 D0 GB201522137 D0 GB 201522137D0 GB 201522137 A GB201522137 A GB 201522137A GB 201522137 D0 GB201522137 D0 GB 201522137D0
Authority
GB
United Kingdom
Prior art keywords
electron microscope
imaging defects
defects
imaging
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1522137.7A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of York
Original Assignee
University of York
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of York filed Critical University of York
Priority to GBGB1522137.7A priority Critical patent/GB201522137D0/en
Publication of GB201522137D0 publication Critical patent/GB201522137D0/en
Priority to PCT/GB2016/053912 priority patent/WO2017103575A1/en
Priority to GB1809532.3A priority patent/GB2561112B/en
Priority to GB1621062.7A priority patent/GB2545570A/en
Priority to TW105141397A priority patent/TW201732280A/en
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203Measuring back scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261Details
    • H01J37/265Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/05Investigating materials by wave or particle radiation by diffraction, scatter or reflection
    • G01N2223/053Investigating materials by wave or particle radiation by diffraction, scatter or reflection back scatter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/40Imaging
    • G01N2223/418Imaging electron microscope
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/611Specific applications or type of materials patterned objects; electronic devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245Detection characterised by the variable being measured
    • H01J2237/24592Inspection and quality control of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2803Scanning microscopes characterised by the imaging method
    • H01J2237/2804Scattered primary beam
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2809Scanning microscopes characterised by the imaging problems involved
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2813Scanning microscopes characterised by the application
    • H01J2237/2817Pattern inspection

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GBGB1522137.7A 2015-12-15 2015-12-15 Method of imaging defects using an electron microscope Ceased GB201522137D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GBGB1522137.7A GB201522137D0 (en) 2015-12-15 2015-12-15 Method of imaging defects using an electron microscope
PCT/GB2016/053912 WO2017103575A1 (en) 2015-12-15 2016-12-12 Method of imaging defects using an electron microscope
GB1809532.3A GB2561112B (en) 2015-12-15 2016-12-12 Method of imaging defects using an electron microscope
GB1621062.7A GB2545570A (en) 2015-12-15 2016-12-12 Method of imaging defects using an electron microscope
TW105141397A TW201732280A (en) 2015-12-15 2016-12-14 Method of imaging defects using an electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1522137.7A GB201522137D0 (en) 2015-12-15 2015-12-15 Method of imaging defects using an electron microscope

Publications (1)

Publication Number Publication Date
GB201522137D0 true GB201522137D0 (en) 2016-01-27

Family

ID=55274804

Family Applications (3)

Application Number Title Priority Date Filing Date
GBGB1522137.7A Ceased GB201522137D0 (en) 2015-12-15 2015-12-15 Method of imaging defects using an electron microscope
GB1809532.3A Active GB2561112B (en) 2015-12-15 2016-12-12 Method of imaging defects using an electron microscope
GB1621062.7A Withdrawn GB2545570A (en) 2015-12-15 2016-12-12 Method of imaging defects using an electron microscope

Family Applications After (2)

Application Number Title Priority Date Filing Date
GB1809532.3A Active GB2561112B (en) 2015-12-15 2016-12-12 Method of imaging defects using an electron microscope
GB1621062.7A Withdrawn GB2545570A (en) 2015-12-15 2016-12-12 Method of imaging defects using an electron microscope

Country Status (3)

Country Link
GB (3) GB201522137D0 (en)
TW (1) TW201732280A (en)
WO (1) WO2017103575A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022541391A (en) 2019-07-26 2022-09-26 エーエスエムエル ネザーランズ ビー.ブイ. Multiple landing energy scanning electron microscope system and method
US20250246399A1 (en) * 2021-10-12 2025-07-31 Asml Netherlands B.V. Energy band-pass filtering for improved high landing energy backscattered charged particle image resolution
IL303495B2 (en) * 2023-06-06 2024-12-01 Applied Materials Israel Ltd Estimating defect depth in a semiconductor sample

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8723115B2 (en) * 2012-03-27 2014-05-13 Kla-Tencor Corporation Method and apparatus for detecting buried defects
JP2014216213A (en) * 2013-04-26 2014-11-17 株式会社日立ハイテクノロジーズ Charged particle microscope device and method for acquiring image by charged particle microscope device
US9449788B2 (en) * 2013-09-28 2016-09-20 Kla-Tencor Corporation Enhanced defect detection in electron beam inspection and review
US9767986B2 (en) * 2014-08-29 2017-09-19 Kla-Tencor Corporation Scanning electron microscope and methods of inspecting and reviewing samples

Also Published As

Publication number Publication date
GB201621062D0 (en) 2017-01-25
GB2545570A (en) 2017-06-21
GB2561112B (en) 2021-06-16
WO2017103575A1 (en) 2017-06-22
TW201732280A (en) 2017-09-16
GB201809532D0 (en) 2018-07-25
GB2561112A (en) 2018-10-03

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)