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GB2014014A - Voltage contrast in scanning electron microscopy - Google Patents

Voltage contrast in scanning electron microscopy

Info

Publication number
GB2014014A
GB2014014A GB7902301A GB7902301A GB2014014A GB 2014014 A GB2014014 A GB 2014014A GB 7902301 A GB7902301 A GB 7902301A GB 7902301 A GB7902301 A GB 7902301A GB 2014014 A GB2014014 A GB 2014014A
Authority
GB
United Kingdom
Prior art keywords
line
scan
voltage contrast
effects
bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7902301A
Other versions
GB2014014B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bull HN Information Systems Italia SpA
Original Assignee
Honeywell Information Systems Italia SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Information Systems Italia SpA filed Critical Honeywell Information Systems Italia SpA
Publication of GB2014014A publication Critical patent/GB2014014A/en
Application granted granted Critical
Publication of GB2014014B publication Critical patent/GB2014014B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

In using a scanning electron microscope to examine integrated circuits, it is desirable to observe only the brightness of each point as affected by the voltage at that point in the integrated circuit being examined, and to eliminate the brightness effects of surface topography, composition, etc. To do this, a flip-flop 24 changes state on each scan line, the scanning being in a TV-like raster. This applies electrical bias to the circuit under test on alternate scan lines. Each scan-line-with- bias output is delayed by 1 line scan period in delay line 28, and has the next scan line (without bias) signal subtracted from it by a difference amplifier 31 to give a resultant signal in which effects due to causes other than voltage contrast are cancelled out. The resultant display is a TV-like display which can be view directly and shows only the voltage contrast effects. <IMAGE>
GB7902301A 1978-01-23 1979-01-22 Voltage contrast in scanning electron microscopy Expired GB2014014B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT19508/78A IT1092854B (en) 1978-01-23 1978-01-23 SCANNING MICROSCOPY DEVICE FOR SELECTIVE VOLTAGE CONTRAST WITH DELAY LINE AND RELATED METHOD

Publications (2)

Publication Number Publication Date
GB2014014A true GB2014014A (en) 1979-08-15
GB2014014B GB2014014B (en) 1982-06-23

Family

ID=11158613

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7902301A Expired GB2014014B (en) 1978-01-23 1979-01-22 Voltage contrast in scanning electron microscopy

Country Status (5)

Country Link
JP (1) JPS54120579A (en)
DE (1) DE2901939A1 (en)
GB (1) GB2014014B (en)
IT (1) IT1092854B (en)
NL (1) NL7900456A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0107040A1 (en) * 1982-09-27 1984-05-02 Siemens Aktiengesellschaft Method and device for recording signal variations from a cyclically driven probe dependent on sporadically occurring events

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0107040A1 (en) * 1982-09-27 1984-05-02 Siemens Aktiengesellschaft Method and device for recording signal variations from a cyclically driven probe dependent on sporadically occurring events

Also Published As

Publication number Publication date
IT1092854B (en) 1985-07-12
DE2901939A1 (en) 1979-07-26
NL7900456A (en) 1979-07-25
GB2014014B (en) 1982-06-23
JPS54120579A (en) 1979-09-19
IT7819508A0 (en) 1978-01-23

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee