GB201401015D0 - Substrate carrier - Google Patents

Substrate carrier

Info

Publication number: GB201401015D0
Authority: GB; United Kingdom
Prior art keywords: substrate carrier; carrier; substrate
Prior art date: 2013-01-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

GBGB1401015.1A

Other versions

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Oxford Instruments Nanotechnology Tools Ltd

Original Assignee

Oxford Instruments Nanotechnology Tools Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2013-01-22

Filing date

2014-01-21

Publication date

2014-03-05

2014-01-21 Application filed by Oxford Instruments Nanotechnology Tools Ltd filed Critical Oxford Instruments Nanotechnology Tools Ltd

2014-03-05 Publication of GB201401015D0 publication Critical patent/GB201401015D0/en

2014-09-03 Publication of GB2511418A publication Critical patent/GB2511418A/en

2018-04-04 Application granted granted Critical

2018-04-04 Publication of GB2511418B publication Critical patent/GB2511418B/en

Status Active legal-status Critical Current

2034-01-21 Anticipated expiration legal-status Critical

Classifications

- H10P72/7608—
- H10P72/7611—
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- H10P72/76—
- H10P72/7624—

Landscapes

Chemical & Material Sciences (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Chemical Vapour Deposition (AREA)

GB1401015.1A 2013-01-22 2014-01-21 Substrate carrier Active GB2511418B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GBGB1301124.2A GB201301124D0 (en)	2013-01-22	2013-01-22	Substrate carrier

Publications (3)

Publication Number	Publication Date
GB201401015D0 true GB201401015D0 (en)	2014-03-05
GB2511418A GB2511418A (en)	2014-09-03
GB2511418B GB2511418B (en)	2018-04-04

Family

ID=47843717

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
GBGB1301124.2A Ceased GB201301124D0 (en)	2013-01-22	2013-01-22	Substrate carrier
GB1401015.1A Active GB2511418B (en)	2013-01-22	2014-01-21	Substrate carrier

Family Applications Before (1)

Application Number	Title	Priority Date	Filing Date
GBGB1301124.2A Ceased GB201301124D0 (en)	2013-01-22	2013-01-22	Substrate carrier

Country Status (3)

Country	Link
GB (2)	GB201301124D0 (en)
TW (1)	TW201438137A (en)
WO (1)	WO2014114927A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR101692251B1 (en) *	2014-08-06	2017-01-03	(주)얼라이드 테크 파인더즈	Plasma device
KR102277918B1 (en) *	2016-07-09	2021-07-14	어플라이드 머티어리얼스, 인코포레이티드	substrate carrier
GB201709446D0 (en) *	2017-06-14	2017-07-26	Semblant Ltd	Plasma processing apparatus
CN111613506B (en) *	2020-05-22	2023-10-13	北京北方华创微电子装备有限公司	Fixed components of semiconductor chambers and semiconductor chambers
CN112885738B (en) *	2020-09-03	2024-02-23	天虹科技股份有限公司	Wafer fixing mechanism and wafer pre-cleaning machine using the same
TWI747611B (en) *	2020-11-13	2021-11-21	天虹科技股份有限公司	Wafer pre-cleaning apparatus
TWI761270B (en) *	2020-11-13	2022-04-11	天虹科技股份有限公司	Wafer pre-cleaning apparatus
TWI799120B (en) *	2020-11-13	2023-04-11	天虹科技股份有限公司	Wafer pre-cleaning apparatus
CN112563164B (en) *	2020-11-25	2022-07-12	鑫天虹(厦门)科技有限公司	Wafer pre-cleaning machine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4473455A (en) *	1981-12-21	1984-09-25	At&T Bell Laboratories	Wafer holding apparatus and method
US5262029A (en) *	1988-05-23	1993-11-16	Lam Research	Method and system for clamping semiconductor wafers
US5753133A (en) *	1994-07-11	1998-05-19	Applied Komatsu Technology, Inc.	Method and apparatus for etching film layers on large substrates
US8535445B2 (en) *	2010-08-13	2013-09-17	Veeco Instruments Inc.	Enhanced wafer carrier
JP5524139B2 (en) *	2010-09-28	2014-06-18	東京エレクトロン株式会社	Substrate position detection apparatus, film forming apparatus including the same, and substrate position detection method

2013
- 2013-01-22 GB GBGB1301124.2A patent/GB201301124D0/en not_active Ceased
2014
- 2014-01-21 WO PCT/GB2014/050162 patent/WO2014114927A1/en not_active Ceased
- 2014-01-21 GB GB1401015.1A patent/GB2511418B/en active Active
- 2014-01-21 TW TW103102073A patent/TW201438137A/en unknown

Also Published As

Publication number	Publication date
GB2511418B (en)	2018-04-04
GB2511418A (en)	2014-09-03
TW201438137A (en)	2014-10-01
GB201301124D0 (en)	2013-03-06
WO2014114927A1 (en)	2014-07-31

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GB201320049D0 (en)	2013-12-25	Artwork substrate
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