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GB201111272D0 - Defect detection in semiconductors - Google Patents

Defect detection in semiconductors

Info

Publication number
GB201111272D0
GB201111272D0 GBGB1111272.9A GB201111272A GB201111272D0 GB 201111272 D0 GB201111272 D0 GB 201111272D0 GB 201111272 A GB201111272 A GB 201111272A GB 201111272 D0 GB201111272 D0 GB 201111272D0
Authority
GB
United Kingdom
Prior art keywords
semiconductors
defect detection
defect
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1111272.9A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Strathclyde
Original Assignee
University of Strathclyde
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Strathclyde filed Critical University of Strathclyde
Priority to GBGB1111272.9A priority Critical patent/GB201111272D0/en
Publication of GB201111272D0 publication Critical patent/GB201111272D0/en
Priority to PCT/GB2012/000559 priority patent/WO2013004990A1/en
Ceased legal-status Critical Current

Links

GBGB1111272.9A 2011-07-01 2011-07-01 Defect detection in semiconductors Ceased GB201111272D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB1111272.9A GB201111272D0 (en) 2011-07-01 2011-07-01 Defect detection in semiconductors
PCT/GB2012/000559 WO2013004990A1 (en) 2011-07-01 2012-06-29 Method for identifying dislocation type in semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1111272.9A GB201111272D0 (en) 2011-07-01 2011-07-01 Defect detection in semiconductors

Publications (1)

Publication Number Publication Date
GB201111272D0 true GB201111272D0 (en) 2011-08-17

Family

ID=44511971

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1111272.9A Ceased GB201111272D0 (en) 2011-07-01 2011-07-01 Defect detection in semiconductors

Country Status (2)

Country Link
GB (1) GB201111272D0 (en)
WO (1) WO2013004990A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106055899B (en) * 2016-06-01 2018-07-03 西安交通大学 A kind of required dislocation automated analysis method of crystal geometry based on synchrotron radiation
EP3343210B1 (en) * 2016-12-30 2020-11-18 IMEC vzw Characterization of regions with different crystallinity in materials
WO2019152585A2 (en) * 2018-01-31 2019-08-08 Northwestern University Orientation determination and mapping by stage rocking electron channeling and imaging reconstruction
CN110095486B (en) * 2019-05-08 2021-12-17 中国科学院金属研究所 Method for rapidly presenting distribution characteristics of specific crystal faces of polycrystalline material
CN118112027B (en) * 2024-04-30 2024-06-25 中国科学院苏州纳米技术与纳米仿生研究所 Electron Backscatter Diffraction Imaging Method for Characterization of Crystal Defects
CN119044222B (en) * 2024-09-29 2025-09-23 中国科学院苏州纳米技术与纳米仿生研究所 A fast method for locating sample dislocations based on spherical aberration electron microscopy

Also Published As

Publication number Publication date
WO2013004990A1 (en) 2013-01-10

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)