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GB2010577B - Preparation of materials for examination of transmission electron microscopy techniques - Google Patents

Preparation of materials for examination of transmission electron microscopy techniques

Info

Publication number
GB2010577B
GB2010577B GB7844005A GB7844005A GB2010577B GB 2010577 B GB2010577 B GB 2010577B GB 7844005 A GB7844005 A GB 7844005A GB 7844005 A GB7844005 A GB 7844005A GB 2010577 B GB2010577 B GB 2010577B
Authority
GB
United Kingdom
Prior art keywords
examination
preparation
materials
transmission electron
electron microscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7844005A
Other versions
GB2010577A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Tech Ltd
Original Assignee
Ion Tech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Tech Ltd filed Critical Ion Tech Ltd
Priority to GB7844005A priority Critical patent/GB2010577B/en
Publication of GB2010577A publication Critical patent/GB2010577A/en
Application granted granted Critical
Publication of GB2010577B publication Critical patent/GB2010577B/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32Polishing; Etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
GB7844005A 1977-11-07 1978-11-10 Preparation of materials for examination of transmission electron microscopy techniques Expired GB2010577B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7844005A GB2010577B (en) 1977-11-07 1978-11-10 Preparation of materials for examination of transmission electron microscopy techniques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB4631177 1977-11-07
GB7844005A GB2010577B (en) 1977-11-07 1978-11-10 Preparation of materials for examination of transmission electron microscopy techniques

Publications (2)

Publication Number Publication Date
GB2010577A GB2010577A (en) 1979-06-27
GB2010577B true GB2010577B (en) 1982-05-06

Family

ID=26265789

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7844005A Expired GB2010577B (en) 1977-11-07 1978-11-10 Preparation of materials for examination of transmission electron microscopy techniques

Country Status (1)

Country Link
GB (1) GB2010577B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3211022A1 (en) * 1981-03-31 1982-11-11 Ion Tech Ltd., Teddington, Middlesex METHOD AND DEVICE FOR PROVIDING A SAMPLE SUITABLE FOR EXAMINATION WITH AN ELECTRONIC MICROSCOPE
HU190855B (en) * 1983-10-12 1986-11-28 Mta Mueszaki Fizikai Kutato Intezete,Hu Device for working solid samples by ion beam and ion source to the device
JP2779414B2 (en) * 1988-12-01 1998-07-23 セイコーインスツルメンツ株式会社 Processing and observation method of micro section
US5089774A (en) * 1989-12-26 1992-02-18 Sharp Kabushiki Kaisha Apparatus and a method for checking a semiconductor
JP3221797B2 (en) * 1994-06-14 2001-10-22 株式会社日立製作所 Sample preparation method and apparatus
AT509608B1 (en) * 2010-12-23 2011-10-15 Leica Mikrosysteme Gmbh DEVICE AND METHOD FOR COOLING SAMPLES DURING ONE ION BEAM PREPARATION
CN111208153B (en) * 2020-01-20 2024-02-27 航天科工防御技术研究试验中心 Tin-based lead-free welding spot transmission sample and preparation method thereof

Also Published As

Publication number Publication date
GB2010577A (en) 1979-06-27

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee