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GB2008791A - Method and apparatus for sensing inplane deformation of a surface - Google Patents

Method and apparatus for sensing inplane deformation of a surface

Info

Publication number
GB2008791A
GB2008791A GB7846064A GB7846064A GB2008791A GB 2008791 A GB2008791 A GB 2008791A GB 7846064 A GB7846064 A GB 7846064A GB 7846064 A GB7846064 A GB 7846064A GB 2008791 A GB2008791 A GB 2008791A
Authority
GB
United Kingdom
Prior art keywords
plane
deformation
beams
inplane
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7846064A
Other versions
GB2008791B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB2008791A publication Critical patent/GB2008791A/en
Application granted granted Critical
Publication of GB2008791B publication Critical patent/GB2008791B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

A surface on which there is a regular periodic pattern, often a relief pattern (12), is deformed, and in-plane deformation is sensed by illuminating the deformed pattern with a beam (12) of coherent light so that light is reflected as one zero order beam and a plurality of diffracted beams, and combining two of the beams (16, 18) so that they interfere in a manner related to the deformation along the direction of intersection of the surface plane with the plane in which the two interfering beams lie. The magnitude and direction of in-plane deformation in one or more directions and the magnitude and direction of the maximum in-plane stress or strain, can be determined automatically.
GB7846064A 1977-11-25 1978-11-24 Method and apparatus for sensing inplane deformation of a surface Expired GB2008791B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4917077 1977-11-25

Publications (2)

Publication Number Publication Date
GB2008791A true GB2008791A (en) 1979-06-06
GB2008791B GB2008791B (en) 1982-04-28

Family

ID=10451426

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7846064A Expired GB2008791B (en) 1977-11-25 1978-11-24 Method and apparatus for sensing inplane deformation of a surface

Country Status (6)

Country Link
EP (1) EP0006945A1 (en)
JP (1) JPS54500096A (en)
CH (1) CH626992A5 (en)
FR (1) FR2454602A1 (en)
GB (1) GB2008791B (en)
WO (1) WO1979000320A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2242518A (en) * 1990-03-12 1991-10-02 Univ Southampton Strain gauge
CN103278268A (en) * 2013-05-31 2013-09-04 哈尔滨工业大学 Stress testing device and stress concentration testing method based on speckle interference principle
US20150233706A1 (en) * 2014-02-20 2015-08-20 Kabushiki Kaisha Toshiba Deflection measuring device and deflection measuring method

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8005258A (en) * 1980-09-22 1982-04-16 Philips Nv INTERFEROMETER.
US4474466A (en) * 1981-03-11 1984-10-02 National Research Development Corporation Measurement of deformation
FR2504256A1 (en) * 1981-04-16 1982-10-22 Euromask METHOD AND DEVICE FOR OPTICAL MEASUREMENT OF DISPLACEMENT AND APPLICATION TO WAFER PHOTOREPETORS
NL1011035C2 (en) * 1999-01-15 2000-07-18 Kema Nv Method and device for measuring in-plane displacements.

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2127483A1 (en) * 1971-06-03 1972-12-14 Leitz Ernst Gmbh Procedure for the interferential measurement of lengths, angles, differences in gait or speeds

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2242518A (en) * 1990-03-12 1991-10-02 Univ Southampton Strain gauge
GB2242518B (en) * 1990-03-12 1994-03-30 Univ Southampton Strain gauge
CN103278268A (en) * 2013-05-31 2013-09-04 哈尔滨工业大学 Stress testing device and stress concentration testing method based on speckle interference principle
US20150233706A1 (en) * 2014-02-20 2015-08-20 Kabushiki Kaisha Toshiba Deflection measuring device and deflection measuring method
US9459093B2 (en) * 2014-02-20 2016-10-04 Kabushiki Kaisha Toshiba Deflection measuring device and deflection measuring method

Also Published As

Publication number Publication date
CH626992A5 (en) 1981-12-15
JPS54500096A (en) 1979-12-20
FR2454602A1 (en) 1980-11-14
GB2008791B (en) 1982-04-28
FR2454602B1 (en) 1983-01-28
EP0006945A1 (en) 1980-01-23
WO1979000320A1 (en) 1979-06-14

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee