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GB2006344A - >A Method for the Production of a High Vacuum in a Container - Google Patents

>A Method for the Production of a High Vacuum in a Container

Info

Publication number
GB2006344A
GB2006344A GB7836912A GB7836912A GB2006344A GB 2006344 A GB2006344 A GB 2006344A GB 7836912 A GB7836912 A GB 7836912A GB 7836912 A GB7836912 A GB 7836912A GB 2006344 A GB2006344 A GB 2006344A
Authority
GB
United Kingdom
Prior art keywords
container
vacuum
production
walls
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7836912A
Other versions
GB2006344B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of GB2006344A publication Critical patent/GB2006344A/en
Application granted granted Critical
Publication of GB2006344B publication Critical patent/GB2006344B/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)

Abstract

A method for the production of a high vacuum in a container 4 for the carrying out of a vacuum process. In the method sorbed gases are removed from the container by increasing the temperature of the walls defining the space within the container while operating evacuation pumping installation 6. When a predetermined vacuum is reached, the heating of the walls is so controlled that the vacuum remains within an upper and a lower preselected limit, until a predetermined temperature of the walls is reached and the heating is switched off. Preferably the upper limit is at the most double the lower limit. <IMAGE>
GB7836912A 1977-10-20 1978-09-14 Method for the production of a high vacuum in a container Expired GB2006344B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1278077A CH634606A5 (en) 1977-10-20 1977-10-20 METHOD FOR GENERATING HIGH VACUUM FOR CARRYING OUT COATING PROCESSES.

Publications (2)

Publication Number Publication Date
GB2006344A true GB2006344A (en) 1979-05-02
GB2006344B GB2006344B (en) 1982-04-07

Family

ID=4386322

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7836912A Expired GB2006344B (en) 1977-10-20 1978-09-14 Method for the production of a high vacuum in a container

Country Status (5)

Country Link
CH (1) CH634606A5 (en)
DE (1) DE2838212C2 (en)
FR (1) FR2406673A1 (en)
GB (1) GB2006344B (en)
NL (1) NL172214C (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056431B2 (en) * 1980-10-09 1985-12-10 三菱電機株式会社 plasma etching equipment
DE3512614A1 (en) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR COMMISSIONING AND / OR REGENERATING A CRYOPUM PUMP AND CYRUM PUMP SUITABLE FOR THIS METHOD
DE3516933A1 (en) * 1985-05-10 1986-11-13 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn METHOD FOR APPLYING A MOS (DOWN ARROW) 2 (DOWN ARROW) COATING TO A SUBSTRATE

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH621714A5 (en) * 1976-06-08 1981-02-27 Balzers Hochvakuum

Also Published As

Publication number Publication date
NL172214C (en) 1983-08-01
NL172214B (en) 1983-03-01
NL7800199A (en) 1979-04-24
DE2838212A1 (en) 1979-04-26
FR2406673B1 (en) 1982-10-29
FR2406673A1 (en) 1979-05-18
GB2006344B (en) 1982-04-07
CH634606A5 (en) 1983-02-15
DE2838212C2 (en) 1983-03-17

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee