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GB2090291B - Sputter ion plating of refractory metal/metal compounds - Google Patents

Sputter ion plating of refractory metal/metal compounds

Info

Publication number
GB2090291B
GB2090291B GB8137948A GB8137948A GB2090291B GB 2090291 B GB2090291 B GB 2090291B GB 8137948 A GB8137948 A GB 8137948A GB 8137948 A GB8137948 A GB 8137948A GB 2090291 B GB2090291 B GB 2090291B
Authority
GB
United Kingdom
Prior art keywords
metal
ion plating
sputter ion
metal compounds
refractory metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8137948A
Other versions
GB2090291A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SECR DEFENCE
UK Secretary of State for Defence
Original Assignee
SECR DEFENCE
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SECR DEFENCE, UK Secretary of State for Defence filed Critical SECR DEFENCE
Priority to GB8137948A priority Critical patent/GB2090291B/en
Publication of GB2090291A publication Critical patent/GB2090291A/en
Application granted granted Critical
Publication of GB2090291B publication Critical patent/GB2090291B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB8137948A 1980-12-22 1981-12-16 Sputter ion plating of refractory metal/metal compounds Expired GB2090291B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8137948A GB2090291B (en) 1980-12-22 1981-12-16 Sputter ion plating of refractory metal/metal compounds

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8041039 1980-12-22
GB8137948A GB2090291B (en) 1980-12-22 1981-12-16 Sputter ion plating of refractory metal/metal compounds

Publications (2)

Publication Number Publication Date
GB2090291A GB2090291A (en) 1982-07-07
GB2090291B true GB2090291B (en) 1985-05-15

Family

ID=26277939

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8137948A Expired GB2090291B (en) 1980-12-22 1981-12-16 Sputter ion plating of refractory metal/metal compounds

Country Status (1)

Country Link
GB (1) GB2090291B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH663455A5 (en) * 1984-04-19 1987-12-15 Balzers Hochvakuum TUBE WITH AN INTERNAL COATING.
GB8508338D0 (en) * 1985-03-29 1985-05-09 British Aerospace Application of stop-off coating
FR2579911B1 (en) * 1985-04-04 1991-03-29 Sharp Kk
EP0207768A3 (en) * 1985-07-01 1987-08-05 United Kingdom Atomic Energy Authority Coating improvements
EP0208487A3 (en) * 1985-07-01 1987-08-19 United Kingdom Atomic Energy Authority Coating improvements
GB8521406D0 (en) * 1985-08-28 1985-10-02 Atomic Energy Authority Uk Coatings
AT388394B (en) * 1987-01-09 1989-06-12 Vni Instrument Inst METHOD FOR PRODUCING CUTTING TOOL
US5811182A (en) * 1991-10-04 1998-09-22 Tulip Memory Systems, Inc. Magnetic recording medium having a substrate and a titanium nitride underlayer
US6881235B2 (en) * 2002-04-17 2005-04-19 Walter R. May Method of reducing smoke and particulate emissions from spark-ignited reciprocating engines operating on liquid petroleum fuels
DE102005018618A1 (en) * 2005-04-21 2006-10-26 Rheinmetall Waffe Munition Gmbh Gun barrel and method of coating the inner surface of the barrel

Also Published As

Publication number Publication date
GB2090291A (en) 1982-07-07

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee