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GB2079000B - Two-stage interferometer - Google Patents

Two-stage interferometer

Info

Publication number
GB2079000B
GB2079000B GB8119729A GB8119729A GB2079000B GB 2079000 B GB2079000 B GB 2079000B GB 8119729 A GB8119729 A GB 8119729A GB 8119729 A GB8119729 A GB 8119729A GB 2079000 B GB2079000 B GB 2079000B
Authority
GB
United Kingdom
Prior art keywords
stage interferometer
interferometer
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8119729A
Other versions
GB2079000A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of GB2079000A publication Critical patent/GB2079000A/en
Application granted granted Critical
Publication of GB2079000B publication Critical patent/GB2079000B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB8119729A 1980-06-30 1981-06-26 Two-stage interferometer Expired GB2079000B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD80222233A DD158187A3 (en) 1980-06-30 1980-06-30 ZWEISTUFENINTERFEROMETER

Publications (2)

Publication Number Publication Date
GB2079000A GB2079000A (en) 1982-01-13
GB2079000B true GB2079000B (en) 1984-03-07

Family

ID=5525028

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8119729A Expired GB2079000B (en) 1980-06-30 1981-06-26 Two-stage interferometer

Country Status (6)

Country Link
JP (1) JPS5714703A (en)
DD (1) DD158187A3 (en)
DE (1) DE3112633A1 (en)
FR (1) FR2485718A1 (en)
GB (1) GB2079000B (en)
SU (1) SU1168800A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD209263A1 (en) * 1982-09-01 1984-04-25 Univ Ernst Moritz Arndt INTERFEROMETRIC ARRANGEMENT FOR OPTOELECTRIC DISTANCE MEASUREMENT
WO1993009394A1 (en) * 1991-11-08 1993-05-13 British Technology Group Ltd. Measuring instruments
FR2712691B1 (en) * 1993-11-19 1995-12-22 Bernard Fondeur Laser interferometry measurement device.
DE19613303C3 (en) * 1996-04-03 2002-07-04 Zeiss Carl Jena Gmbh Method and device for absolute distance measurement
JP4910838B2 (en) * 2007-03-30 2012-04-04 サクサ株式会社 Open / close detection structure of the housing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD111993A1 (en) * 1974-05-13 1975-03-12

Also Published As

Publication number Publication date
FR2485718A1 (en) 1981-12-31
DD158187A3 (en) 1983-01-05
GB2079000A (en) 1982-01-13
FR2485718B1 (en) 1985-03-29
JPS5714703A (en) 1982-01-26
SU1168800A1 (en) 1985-07-23
DE3112633A1 (en) 1982-04-15

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee