GB1602903A - Radiationsensitive copying composition - Google Patents
Radiationsensitive copying composition Download PDFInfo
- Publication number
- GB1602903A GB1602903A GB16075/78A GB1607578A GB1602903A GB 1602903 A GB1602903 A GB 1602903A GB 16075/78 A GB16075/78 A GB 16075/78A GB 1607578 A GB1607578 A GB 1607578A GB 1602903 A GB1602903 A GB 1602903A
- Authority
- GB
- United Kingdom
- Prior art keywords
- composition
- group
- photoinitiator
- aryl
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 57
- 150000001875 compounds Chemical class 0.000 claims abstract description 33
- JIHQDMXYYFUGFV-UHFFFAOYSA-N 1,3,5-triazine Chemical compound C1=NC=NC=N1 JIHQDMXYYFUGFV-UHFFFAOYSA-N 0.000 claims abstract description 13
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 27
- 125000003118 aryl group Chemical group 0.000 claims description 23
- 239000002253 acid Substances 0.000 claims description 20
- 125000004432 carbon atom Chemical group C* 0.000 claims description 19
- 230000005855 radiation Effects 0.000 claims description 19
- 229920003986 novolac Polymers 0.000 claims description 17
- 239000000460 chlorine Substances 0.000 claims description 11
- 229910052801 chlorine Inorganic materials 0.000 claims description 11
- 229910052736 halogen Inorganic materials 0.000 claims description 11
- 125000003545 alkoxy group Chemical group 0.000 claims description 9
- 125000000217 alkyl group Chemical group 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 claims description 8
- 229910052794 bromium Chemical group 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 claims description 6
- 230000009471 action Effects 0.000 claims description 6
- 125000003342 alkenyl group Chemical group 0.000 claims description 6
- 150000002367 halogens Chemical group 0.000 claims description 6
- 238000007639 printing Methods 0.000 claims description 6
- 125000006615 aromatic heterocyclic group Chemical group 0.000 claims description 5
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Chemical group BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 claims description 5
- 239000007795 chemical reaction product Substances 0.000 claims description 5
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 claims description 5
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 claims description 4
- 239000000047 product Substances 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 claims description 4
- 125000002947 alkylene group Chemical group 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 125000004104 aryloxy group Chemical group 0.000 claims description 3
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 3
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 238000006116 polymerization reaction Methods 0.000 claims description 3
- 239000003377 acid catalyst Substances 0.000 claims description 2
- 239000011230 binding agent Substances 0.000 claims description 2
- 238000010538 cationic polymerization reaction Methods 0.000 claims description 2
- 125000005842 heteroatom Chemical group 0.000 claims description 2
- 150000002790 naphthalenes Chemical class 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 claims description 2
- 125000006267 biphenyl group Chemical group 0.000 claims 1
- 125000001424 substituent group Chemical group 0.000 abstract description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 abstract description 2
- 125000005843 halogen group Chemical group 0.000 abstract 1
- -1 vinyl halogen methyl-s-triazines Chemical class 0.000 description 34
- 239000010410 layer Substances 0.000 description 30
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 8
- 150000007513 acids Chemical class 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 150000002825 nitriles Chemical class 0.000 description 6
- 150000002896 organic halogen compounds Chemical class 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- LELOWRISYMNNSU-UHFFFAOYSA-N Hydrocyanic acid Natural products N#C LELOWRISYMNNSU-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000003999 initiator Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 238000006303 photolysis reaction Methods 0.000 description 4
- 230000015843 photosynthesis, light reaction Effects 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical group C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical group [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 150000001721 carbon Chemical group 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000012043 crude product Substances 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 230000000977 initiatory effect Effects 0.000 description 3
- 229910001507 metal halide Inorganic materials 0.000 description 3
- 150000005309 metal halides Chemical class 0.000 description 3
- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical compound C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 description 3
- 239000010695 polyglycol Substances 0.000 description 3
- 229920000151 polyglycol Polymers 0.000 description 3
- 235000019795 sodium metasilicate Nutrition 0.000 description 3
- 229910052911 sodium silicate Inorganic materials 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- FCEHBMOGCRZNNI-UHFFFAOYSA-N 1-benzothiophene Chemical compound C1=CC=C2SC=CC2=C1 FCEHBMOGCRZNNI-UHFFFAOYSA-N 0.000 description 2
- QZZJTWAHFMBFSX-UHFFFAOYSA-N 2,4-bis(trichloromethyl)-1,3,5-triazine Chemical class ClC(Cl)(Cl)C1=NC=NC(C(Cl)(Cl)Cl)=N1 QZZJTWAHFMBFSX-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- HDDGHHVNVQKFIB-UHFFFAOYSA-N 2-naphthalen-2-yl-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=2C=C3C=CC=CC3=CC=2)=N1 HDDGHHVNVQKFIB-UHFFFAOYSA-N 0.000 description 2
- 125000001622 2-naphthyl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C(*)C([H])=C([H])C2=C1[H] 0.000 description 2
- XJPDJNDHLFVVAZ-UHFFFAOYSA-N 5-butyl-2-[(5-butyl-5-ethyl-1,3-dioxan-2-yl)oxy]-5-ethyl-1,3-dioxane Chemical compound O1CC(CCCC)(CC)COC1OC1OCC(CC)(CCCC)CO1 XJPDJNDHLFVVAZ-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- DRUIESSIVFYOMK-UHFFFAOYSA-N Trichloroacetonitrile Chemical compound ClC(Cl)(Cl)C#N DRUIESSIVFYOMK-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 2
- 150000001241 acetals Chemical class 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- PQLAYKMGZDUDLQ-UHFFFAOYSA-K aluminium bromide Chemical compound Br[Al](Br)Br PQLAYKMGZDUDLQ-UHFFFAOYSA-K 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 125000001246 bromo group Chemical group Br* 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- WRJWRGBVPUUDLA-UHFFFAOYSA-N chlorosulfonyl isocyanate Chemical class ClS(=O)(=O)N=C=O WRJWRGBVPUUDLA-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- TXCDCPKCNAJMEE-UHFFFAOYSA-N dibenzofuran Chemical compound C1=CC=C2C3=CC=CC=C3OC2=C1 TXCDCPKCNAJMEE-UHFFFAOYSA-N 0.000 description 2
- IYYZUPMFVPLQIF-UHFFFAOYSA-N dibenzothiophene Chemical compound C1=CC=C2C3=CC=CC=C3SC2=C1 IYYZUPMFVPLQIF-UHFFFAOYSA-N 0.000 description 2
- 150000002366 halogen compounds Chemical class 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 230000000269 nucleophilic effect Effects 0.000 description 2
- 238000007645 offset printing Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- 150000002989 phenols Chemical class 0.000 description 2
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- JBSAUEMFOKUWTP-UHFFFAOYSA-N quinoline-4-carbonitrile Chemical compound C1=CC=C2C(C#N)=CC=NC2=C1 JBSAUEMFOKUWTP-UHFFFAOYSA-N 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 239000001488 sodium phosphate Substances 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 125000005504 styryl group Chemical group 0.000 description 2
- HJUGFYREWKUQJT-UHFFFAOYSA-N tetrabromomethane Chemical compound BrC(Br)(Br)Br HJUGFYREWKUQJT-UHFFFAOYSA-N 0.000 description 2
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 1
- YKYIFUROKBDHCY-ONEGZZNKSA-N (e)-4-ethoxy-1,1,1-trifluorobut-3-en-2-one Chemical group CCO\C=C\C(=O)C(F)(F)F YKYIFUROKBDHCY-ONEGZZNKSA-N 0.000 description 1
- UXNCDAQNSQBHEN-UHFFFAOYSA-N 1,2,3,4-tetrahydrophenanthrene Chemical compound C1=CC2=CC=CC=C2C2=C1CCCC2 UXNCDAQNSQBHEN-UHFFFAOYSA-N 0.000 description 1
- SAMBTDSIZXPXBA-UHFFFAOYSA-N 1,2-dihydroacenaphthylene-5-carbonitrile Chemical compound C1CC2=CC=CC3=C2C1=CC=C3C#N SAMBTDSIZXPXBA-UHFFFAOYSA-N 0.000 description 1
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical compound C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- WELHBLLMEXKKEH-UHFFFAOYSA-N 1,3-benzoxazole-2-carbonitrile Chemical compound C1=CC=C2OC(C#N)=NC2=C1 WELHBLLMEXKKEH-UHFFFAOYSA-N 0.000 description 1
- VZXPHDGHQXLXJC-UHFFFAOYSA-N 1,6-diisocyanato-5,6-dimethylheptane Chemical compound O=C=NC(C)(C)C(C)CCCCN=C=O VZXPHDGHQXLXJC-UHFFFAOYSA-N 0.000 description 1
- UQRJIBNPTHJHNY-UHFFFAOYSA-N 1-(2-ethoxyethoxy)naphthalene Chemical compound C1=CC=C2C(OCCOCC)=CC=CC2=C1 UQRJIBNPTHJHNY-UHFFFAOYSA-N 0.000 description 1
- RCYHXESNWFYTCU-UHFFFAOYSA-N 1-benzothiophene-2-carbonitrile Chemical compound C1=CC=C2SC(C#N)=CC2=C1 RCYHXESNWFYTCU-UHFFFAOYSA-N 0.000 description 1
- IPJUOWGTGHKFKN-UHFFFAOYSA-N 1-benzothiophene-5-carbonitrile Chemical compound N#CC1=CC=C2SC=CC2=C1 IPJUOWGTGHKFKN-UHFFFAOYSA-N 0.000 description 1
- DRNFPCFRKOZEPV-UHFFFAOYSA-N 1-benzothiophene-7-carbonitrile Chemical compound N#CC1=CC=CC2=C1SC=C2 DRNFPCFRKOZEPV-UHFFFAOYSA-N 0.000 description 1
- USYQKCQEVBFJRP-UHFFFAOYSA-N 1-bromo-3-phenylbenzene Chemical group BrC1=CC=CC(C=2C=CC=CC=2)=C1 USYQKCQEVBFJRP-UHFFFAOYSA-N 0.000 description 1
- KZNJSFHJUQDYHE-UHFFFAOYSA-N 1-methylanthracene Chemical compound C1=CC=C2C=C3C(C)=CC=CC3=CC2=C1 KZNJSFHJUQDYHE-UHFFFAOYSA-N 0.000 description 1
- DXUMYHZTYVPBEZ-UHFFFAOYSA-N 2,4,6-tris(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 DXUMYHZTYVPBEZ-UHFFFAOYSA-N 0.000 description 1
- VPUQWCPXNUGDML-UHFFFAOYSA-N 2-(1,2-dihydroacenaphthylen-5-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=2C=3C=CC=C4CCC(C=34)=CC=2)=N1 VPUQWCPXNUGDML-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- VRBKTPNSKOSBLV-UHFFFAOYSA-N 2-(2-methoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound COC1=CC=C2C=CC=CC2=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 VRBKTPNSKOSBLV-UHFFFAOYSA-N 0.000 description 1
- ORXBVLDMEZLJSC-UHFFFAOYSA-N 2-(4-butoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(OCCCC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 ORXBVLDMEZLJSC-UHFFFAOYSA-N 0.000 description 1
- NLNVSTLNDJGLTL-UHFFFAOYSA-N 2-(4-ethoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(OCC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 NLNVSTLNDJGLTL-UHFFFAOYSA-N 0.000 description 1
- WYJIVQXBJGQLCK-UHFFFAOYSA-N 2-(5-methoxynaphthalen-1-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC=C2C(OC)=CC=CC2=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 WYJIVQXBJGQLCK-UHFFFAOYSA-N 0.000 description 1
- IRRFIKKURRZFKP-UHFFFAOYSA-N 2-(6-ethoxynaphthalen-2-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC2=CC(OCC)=CC=C2C=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 IRRFIKKURRZFKP-UHFFFAOYSA-N 0.000 description 1
- KQIBPYPSGLSJFU-UHFFFAOYSA-N 2-(6-methoxy-5-methylnaphthalen-2-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC2=C(C)C(OC)=CC=C2C=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 KQIBPYPSGLSJFU-UHFFFAOYSA-N 0.000 description 1
- CNKYRBLODJDMKS-UHFFFAOYSA-N 2-(6-methoxynaphthalen-2-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C1=CC2=CC(OC)=CC=C2C=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 CNKYRBLODJDMKS-UHFFFAOYSA-N 0.000 description 1
- HWSSEYVMGDIFMH-UHFFFAOYSA-N 2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOC(=O)C(C)=C HWSSEYVMGDIFMH-UHFFFAOYSA-N 0.000 description 1
- XVJFDEJJZXZOJH-UHFFFAOYSA-N 2-[4-(2-butoxyethyl)naphthalen-1-yl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(CCOCCCC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 XVJFDEJJZXZOJH-UHFFFAOYSA-N 0.000 description 1
- NBFVAHHLOQOFHL-UHFFFAOYSA-N 2-[4-(2-ethoxyethyl)naphthalen-1-yl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(CCOCC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 NBFVAHHLOQOFHL-UHFFFAOYSA-N 0.000 description 1
- SLQUQTXMEISFED-UHFFFAOYSA-N 2-[4-(2-methoxyethyl)naphthalen-1-yl]-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound C12=CC=CC=C2C(CCOC)=CC=C1C1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 SLQUQTXMEISFED-UHFFFAOYSA-N 0.000 description 1
- WVQHODUGKTXKQF-UHFFFAOYSA-N 2-ethyl-2-methylhexane-1,1-diol Chemical compound CCCCC(C)(CC)C(O)O WVQHODUGKTXKQF-UHFFFAOYSA-N 0.000 description 1
- LETDRANQSOEVCX-UHFFFAOYSA-N 2-methyl-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound CC1=NC(C(Cl)(Cl)Cl)=NC(C(Cl)(Cl)Cl)=N1 LETDRANQSOEVCX-UHFFFAOYSA-N 0.000 description 1
- ZTEVZRQIBGJEHG-UHFFFAOYSA-N 2-naphthalen-1-yl-4,6-bis(trichloromethyl)-1,3,5-triazine Chemical compound ClC(Cl)(Cl)C1=NC(C(Cl)(Cl)Cl)=NC(C=2C3=CC=CC=C3C=CC=2)=N1 ZTEVZRQIBGJEHG-UHFFFAOYSA-N 0.000 description 1
- GAQCTWOEPLWMKZ-UHFFFAOYSA-N 3-chloroanthracene-1-carbonitrile Chemical compound C1=CC=CC2=CC3=CC(Cl)=CC(C#N)=C3C=C21 GAQCTWOEPLWMKZ-UHFFFAOYSA-N 0.000 description 1
- ZRYCRPNCXLQHPN-UHFFFAOYSA-N 3-hydroxy-2-methylbenzaldehyde Chemical compound CC1=C(O)C=CC=C1C=O ZRYCRPNCXLQHPN-UHFFFAOYSA-N 0.000 description 1
- MVMOMSLTZMMLJR-UHFFFAOYSA-N 4-[2-(1,3-benzothiazol-2-yl)ethenyl]-n,n-dimethylaniline Chemical compound C1=CC(N(C)C)=CC=C1C=CC1=NC2=CC=CC=C2S1 MVMOMSLTZMMLJR-UHFFFAOYSA-N 0.000 description 1
- FKBGNZOXLWAJNS-UHFFFAOYSA-N 4-methylsulfanylnaphthalene-1-carbonitrile Chemical compound C1=CC=C2C(SC)=CC=C(C#N)C2=C1 FKBGNZOXLWAJNS-UHFFFAOYSA-N 0.000 description 1
- TWJICXJKACMJFO-UHFFFAOYSA-N 4-phenylnaphthalene-1-carbonitrile Chemical compound C12=CC=CC=C2C(C#N)=CC=C1C1=CC=CC=C1 TWJICXJKACMJFO-UHFFFAOYSA-N 0.000 description 1
- YYROPELSRYBVMQ-UHFFFAOYSA-N 4-toluenesulfonyl chloride Chemical compound CC1=CC=C(S(Cl)(=O)=O)C=C1 YYROPELSRYBVMQ-UHFFFAOYSA-N 0.000 description 1
- HZGMFVCYHFDNGW-UHFFFAOYSA-N 9h-fluorene-2-carbonitrile Chemical compound C1=CC=C2C3=CC=C(C#N)C=C3CC2=C1 HZGMFVCYHFDNGW-UHFFFAOYSA-N 0.000 description 1
- KMUZLXGXYIMZBJ-UHFFFAOYSA-N 9h-xanthene-4-carbonitrile Chemical compound C1C2=CC=CC=C2OC2=C1C=CC=C2C#N KMUZLXGXYIMZBJ-UHFFFAOYSA-N 0.000 description 1
- KYNSBQPICQTCGU-UHFFFAOYSA-N Benzopyrane Chemical compound C1=CC=C2C=CCOC2=C1 KYNSBQPICQTCGU-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 238000005727 Friedel-Crafts reaction Methods 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 238000006000 Knoevenagel condensation reaction Methods 0.000 description 1
- 239000002841 Lewis acid Substances 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910003074 TiCl4 Inorganic materials 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- CWRYPZZKDGJXCA-UHFFFAOYSA-N acenaphthene Chemical compound C1=CC(CC2)=C3C2=CC=CC3=C1 CWRYPZZKDGJXCA-UHFFFAOYSA-N 0.000 description 1
- TXNCCVLUSULXHW-UHFFFAOYSA-N acridine-2-carbonitrile Chemical compound C1=CC=CC2=CC3=CC(C#N)=CC=C3N=C21 TXNCCVLUSULXHW-UHFFFAOYSA-N 0.000 description 1
- 125000002252 acyl group Chemical group 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 150000001299 aldehydes Chemical class 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 125000003302 alkenyloxy group Chemical group 0.000 description 1
- 125000004183 alkoxy alkyl group Chemical group 0.000 description 1
- 125000004171 alkoxy aryl group Chemical group 0.000 description 1
- 125000004414 alkyl thio group Chemical group 0.000 description 1
- 230000002152 alkylating effect Effects 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- WVAHKIQKDXQWAR-UHFFFAOYSA-N anthracene-1-carbonitrile Chemical compound C1=CC=C2C=C3C(C#N)=CC=CC3=CC2=C1 WVAHKIQKDXQWAR-UHFFFAOYSA-N 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- RFRXIWQYSOIBDI-UHFFFAOYSA-N benzarone Chemical compound CCC=1OC2=CC=CC=C2C=1C(=O)C1=CC=C(O)C=C1 RFRXIWQYSOIBDI-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000031709 bromination Effects 0.000 description 1
- 238000005893 bromination reaction Methods 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- UIZLQMLDSWKZGC-UHFFFAOYSA-N cadmium helium Chemical compound [He].[Cd] UIZLQMLDSWKZGC-UHFFFAOYSA-N 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 150000001730 carboxylic acid amide acetals Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000000000 cycloalkoxy group Chemical group 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- FRGBHEOXVTVYHI-UHFFFAOYSA-N dibenzofuran-1-carbonitrile Chemical compound O1C2=CC=CC=C2C2=C1C=CC=C2C#N FRGBHEOXVTVYHI-UHFFFAOYSA-N 0.000 description 1
- JMLMVVOQPAPVOQ-UHFFFAOYSA-N dibenzofuran-2-carbonitrile Chemical compound C1=CC=C2C3=CC(C#N)=CC=C3OC2=C1 JMLMVVOQPAPVOQ-UHFFFAOYSA-N 0.000 description 1
- UAWKBKHHKGFTSQ-UHFFFAOYSA-N dibenzofuran-3-carbonitrile Chemical compound C1=CC=C2C3=CC=C(C#N)C=C3OC2=C1 UAWKBKHHKGFTSQ-UHFFFAOYSA-N 0.000 description 1
- UMMDSBXMUIEZOC-UHFFFAOYSA-N dibenzothiophene-4-carbonitrile Chemical compound C12=CC=CC=C2SC2=C1C=CC=C2C#N UMMDSBXMUIEZOC-UHFFFAOYSA-N 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003480 eluent Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- UYMKPFRHYYNDTL-UHFFFAOYSA-N ethenamine Chemical class NC=C UYMKPFRHYYNDTL-UHFFFAOYSA-N 0.000 description 1
- 125000005678 ethenylene group Chemical group [H]C([*:1])=C([H])[*:2] 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- RMBPEFMHABBEKP-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2C3=C[CH]C=CC3=CC2=C1 RMBPEFMHABBEKP-UHFFFAOYSA-N 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- IVJISJACKSSFGE-UHFFFAOYSA-N formaldehyde;1,3,5-triazine-2,4,6-triamine Chemical compound O=C.NC1=NC(N)=NC(N)=N1 IVJISJACKSSFGE-UHFFFAOYSA-N 0.000 description 1
- SLGWESQGEUXWJQ-UHFFFAOYSA-N formaldehyde;phenol Chemical compound O=C.OC1=CC=CC=C1 SLGWESQGEUXWJQ-UHFFFAOYSA-N 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- XVJDHUCBVHTPGE-UHFFFAOYSA-N isoquinoline-5-carbonitrile Chemical compound N1=CC=C2C(C#N)=CC=CC2=C1 XVJDHUCBVHTPGE-UHFFFAOYSA-N 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- 150000007517 lewis acids Chemical class 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- DZVCFNFOPIZQKX-LTHRDKTGSA-M merocyanine Chemical compound [Na+].O=C1N(CCCC)C(=O)N(CCCC)C(=O)C1=C\C=C\C=C/1N(CCCS([O-])(=O)=O)C2=CC=CC=C2O\1 DZVCFNFOPIZQKX-LTHRDKTGSA-M 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical class CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910000403 monosodium phosphate Inorganic materials 0.000 description 1
- 235000019799 monosodium phosphate Nutrition 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002923 oximes Chemical class 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 229920001289 polyvinyl ether Polymers 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000000306 recurrent effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000010517 secondary reaction Methods 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 150000003918 triazines Chemical class 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000005829 trimerization reaction Methods 0.000 description 1
- PYOKUURKVVELLB-UHFFFAOYSA-N trimethyl orthoformate Chemical compound COC(OC)OC PYOKUURKVVELLB-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229910000406 trisodium phosphate Inorganic materials 0.000 description 1
- 235000019801 trisodium phosphate Nutrition 0.000 description 1
- 229920001567 vinyl ester resin Polymers 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D251/00—Heterocyclic compounds containing 1,3,5-triazine rings
- C07D251/02—Heterocyclic compounds containing 1,3,5-triazine rings not condensed with other rings
- C07D251/12—Heterocyclic compounds containing 1,3,5-triazine rings not condensed with other rings having three double bonds between ring members or between ring members and non-ring members
- C07D251/14—Heterocyclic compounds containing 1,3,5-triazine rings not condensed with other rings having three double bonds between ring members or between ring members and non-ring members with hydrogen or carbon atoms directly attached to at least one ring carbon atom
- C07D251/24—Heterocyclic compounds containing 1,3,5-triazine rings not condensed with other rings having three double bonds between ring members or between ring members and non-ring members with hydrogen or carbon atoms directly attached to at least one ring carbon atom to three ring carbon atoms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
- G03F7/0295—Photolytic halogen compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Polymerisation Methods In General (AREA)
- Materials For Photolithography (AREA)
- Plural Heterocyclic Compounds (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
The photosensitive mixture contains, as the photosensitive compound, an s-triazine with two methyl groups which together contain at least one halogen atom, and an aromatic radical as a nuclear substituent.
Description
(54) RADIATION-SENSITIVE COPYING
COMPOSITION
(71) We, HOECHST AKTIENGESELLSCHAFT, a Body Corporate organised according to the laws of the Federal Republic of Germany, of 6230
Frankfurt/Main 80, Postfach 8003 20, Federal Republic of Germany, do hereby declare the invention, for which we pray that a patent may be granted to us, and the method by which it is to be performed, to be particularly described in and by the following statement:- This invention relates to a radiation sensitive composition, in particular a copying composition, that contains a light-sensitive organo-halogen compound whose decomposition under the influence of actinic radiation causes chemical or physical changes in the composition or in one or more of its components.
Radiation sensitive organo-halogen compounds are used in industry, on the one hand, for the purpose of utilizing the free radicals formed under the influence of radiation for initiating polymerization reactions or color changes, and, on the other hand, for effecting secondary reactions with the acid liberated by the radiation.
Previously proposed organo-halogen compounds belong to a wide variety of chemical compounds. Despite wide differences between their structures, the hitherto proposed organo-halogen compounds do not meet the requirements for maximum sensitivity within the main emission range of the light-sources presently used, i.e., the known compounds have their UV absorption maxima at relatively low wave length ranges.
Although some undesirable characteristics are eliminated by the chromophore-substituted vinyl halogen methyl-s-triazines disclosed in German
Offenlegungsschriften Nos. 2243 621 and 23 06 248, they have the disadvantage that their preparation is relatively complicated. Thus, 2 - methyl - 4.6 - bis trichloromethyl - s- triazine, for example, must be first obtained by cotrimerization of acetonitrile and trichloroacetonitrile, and this compound, which is extremely reactive towards nucleophilic compounds, must then be condensed, under the conditions of a Knoevenagel reaction, with aldehydes, some of which have a complicated structure and thus are expensive to prepare. The resulting vinylene group links the triazine group to a chromophore and forms part of the entire chromophoric system which is responsible for the absorption within the visible and long-wave ultra-violet range of the spectrum which is desired.
The present invention is concerned with providing more easily obtainable organo-halogen compounds which are sensitive to actinic radiation and have a good sensitivity in the ultraviolet and short-wave visible range of the spectrum and are suitable for use in radiation sensitive compositions.
The present invention relates to a radiation sensitive composition which contains, as a radiation-sensitive component, an s-triazine of the Formula I
wherein
X represents bromine or chlorine,
m and n are whole numbers from 0 to 3 inclusive, the sum of m and n not exceeding 5, and
R represents a substituted or unsubstituted, bi- or polynuclear aromatic or heterocyclic aromatic group which may be partially hydrogenated and which is linked via an unsaturated nuclear carbon atom.
Preferably, the group R is linked via an aromatic carbon atom, and in this specification the term "unsaturated", when applied to carbon atoms, includes "aromatic".
The composition also comprises a compound capable of forming a chemical reaction product in the presence of the product formed by irradiation of the striazine.
In connection with this application, the term "actinic radiation" includes any radiation whose energy at least corresponds to that of short-wave visible light.
Long-wave ultraviolet radiation is particularly suitable. Electron and laser beams may also be used.
The symbols in the above Formula I preferably have the following meanings:
R represents a bi- or trinuclear condensed aryl group or a corresponding heterocyclic aromatic group with 0, S, or N as heteroatoms, and may be partially hydrogenated. Alternatively, R may be adiphenyl group. The nuclei of the group R may carry one or more substituents.
X represents chlorine, and
n and m are zero.
Examples of suitable bi- and tri-nuclear aromatic groups are:
Naphthalene, anthracene, phenanthrene, quinoline, isoquinoline, benzofuran, benzopyran, dibenzofuran, benzothiophene, dibenzothiophene, acenaphthene, benzoxazole, fluorene, tetrahydrophenanthrene, and dihydrophenalene.
Naphthalene is particularly advantageous.
Suitable substituents are, for example:
Halogen, especially chlorine and bromine, lower alkyl groups, preferably with
I to 3 carbon atoms which may be substituted, substituted or unsubstituted aryl groups, nitro groups, sulfonyl groups, alkyl mercapto groups, phenyl mercapto groups, acyl groups, aryloxy groups, hydroxy groups and, preferably, alkoxy groups. Alkoxy groups with 1 to 8 carbon atoms which, in turn, may be substituted by halogen, phenyl or phenoxy and in which one or more methylene groups may be replaced by O- or S-bridges, and phenoxy, cycloalkoxy and alkenyloxy groups are particularly advantageous.
Particularly preferred are s-triazines corresponding to Formula I in which R represents a group of the Formula II:
wherein
R, represents H or -OR3, preferably -OR3, R2 represents H, Cl, Br, or an alkyl group with 1 to 4 carbon atoms an alkenyl group with 2 to 4 carbon atoms, an aryl, or a substituted or unsubstituted alkoxy group with 1 to 4 carbon atoms (preferably H, or an alkyl group with 1 to 3 carbon atoms, or an alkoxy group with 1 to 3 carbon atoms) and
R3 is an alkyl group with I to 8 carbon atoms which may be substituted by halogen, preferably chlorine or bromine, or by aryl or aryloxy groups, and in which one or more methylene groups may be replaced by O- or S-bridges, or R3 is a cycloalkyl, alkenyl, or aryl group, especially an alkyl or alkoxy-alkyl group with I to 4 carbon atoms, or
R, and R2, taken together, form an alkylene group which is linked to the naphthalene nucleus, preferably in such a manner that a 5- or 6-membered ring results,
X represents a Cl atom, and
n=m=zero.
Compounds in which the s-triazine group and an alkoxy group are arranged in the 1.4 position or the 2.6 position of the naphthalene nucleus of Formula II are also of advantage.
Since the photochemical activity of the initiators is only insignificantly influenced by the number of carbon atoms in the alkoxy groups, the limitation to 8 carbon atoms in the OR3 group is not to be regarded as a rigid limit, but may be exceeded, for example by nonyloxy, dodecyloxy or octadecyl groups.
The following organo halogen compounds are listed as particularly advantageous compounds:
2 - (naphth - 1 - yl) - 4.6 - bis - trichloromethyl - s-triazine, 2 - (4 - methoxy - naphth - I - yl) - 4.6 - bis - triehloromethyl - S - triazine, 2 - (4 - ethoxy - naphth - 1 - yl) - 4.6 - bis - trichloromethyl - s - triazine,
2 - (4 - butoxy - naphth - I - yl) - 4.6 - bis - trichloromethyl - s - triazine,
2 - [4 - (2 - methoxyethyl) - naphth - 1 - yl] - 4.6 - bis - trichloromethyl s - triazine, 2 - [4 - (2 - ethoxyethyl) - naphth - 1- yl] - 4.6 - bis - trichloromethyl - s - triazine, 2 - [4 - (2 - butoxyethyl) - naphth - 1 - yl] - 4.6 - bis - trichloromethyl - S - triazine,
2 - (2 - methoxy - naphth - 1 - yl) - 4.6 - bis - trichloromethyl - s - triazine,
2 - (6 - methoxy - 5 - methyl - naphth - 2 - yl) - 4.6 - bis - trichloromethyl s - triazine,
2 - (6 - methoxy - naphth - 2 - yl) - 4.6 - bis - trichloromethyl - s - triazine,
2 - (5 - methoxy - naphth - 1 - yl) - 4.6 - bis - trichloromethyl - s - triazine, 2 - (4.7 - dimethoxy - naphth - 1 - yl) - 4.6 - bis - trichloromethyl - s triazine, 2 - (6 - ethoxy - naphth - 2 - yl) - 4.6 - bis - trichloromethyl - s - triazine, 2 - (4.5 - dimethoxy - naphth - 1 - yl) - 4.6 - bis - trichloromethyl - s triazine, 2 - (acenaphth - 5 - yl) - 4.6 - bis - trichloromethyl - s - triazine, and, slightly less active,
2 - (naphth - 2 - yl) - 4.6 - bis - trichloromethyl - s - triazine.
The following are suitable halogen compounds selected from groups which do not come under Formula II: 2 - (phenanthr - 9 - yl)-, 2-(dibenzothien-2-yl)-, 2 (benzopyran-3-yl) and the 2- (4- alkoxyanthrac - 1 - yl)- 4.6 - bis - trichloromethyl - s - triazines. The absorption of the last mentioned class of compounds extends beyond 500 nm.
The aryl - halogen - methyl - triazines according to the present invention are prepared, in the simplest manner, by cotrimerization of the aryl carboxylic acid nitriles with halogen aceto nitriles, in the presence of hydrochloric acid and
Friedel-Crafts catalysts, e.g. AICI3, AlBr3, TiCl4, or borotrifluoride etherate, analogously to the method described in "Bull. Chem. Soc. Jap.", 42, 2924, (1969).
Other ways of synthesizing the compounds are by reacting aryl amidines with polychloroaza-alkenes, according to the method published in "Angew. Chem." 78, 982 (1966), or by reacting carboxylic acid chlorides or -anhydrides with n (iminoacyl)-trichloroacetamidines 2 - aryl - 4 - methyl - 6 - trichloromethyl - s triazines also may be easily prepared by the last-mentioned reaction, as is disclosed in British Patent No. 912,112. Methods for the subsequent chlorination and bromination of alkyl substituents in s-triazines, to form halogen alkyl-s-triazines, and exchange reactions by which bromine atoms in tribromomethyl groups may be replaced by hydrogen and trihalogen methyl groups in s-triazines may be replaced by amino or alkoxy groups are published in "J. Org. Chem.", 29, 1527(1964). Some of the nitriles used for co-trimerization are commercially available or may be prepared in a simple manner, for example by dehydration of carboxylic acid amides or oximes or by reaction of aromatic bromine compounds with copper-I-cyanide.
Frequently, it is of advantage to react carboxylic acids or activated aromatic compounds first with chlorosulfonyl isocyanates (CSI) and then with dimethyl formamide, in one operation, thus forming the nitriles, after the intermediate formation of carboxylic acid amide-N-sulfochlorides, as described in "Chem.
Ber.", 100, 2719 (1967).
Besides the nitriles, from which the bis-trichloromethyl-s-triazines mentioned in the examples are derived, the following compounds are also suitable as educts, for example: 4-chloro- 1-, 5-chloro- 1-, 4-bromo- 1-, 5-bromo- 1-, 2,6-dimethoxy-1-, 2.7dimethoxy-l-, 5-nitro- 1-, 3.6-diehloro-1-, i-ehloro-2-, 5-chloro-2-, 6-bromo-2-, 4 methyl-l-, 5-methyl- 1 2-ethyl-1-, 3.4-dimethyl- 1 -'3 .6-dimethyl-2-, 4-isopropyloxy- 1-, 4-bromo-3-methoxy-2-, 4-(2-chloropropyl)- 1-, 4-allyloxy- 1-, 4-cyclohexyloxy-1-, 4-n-octyloxy-l-, 4-phenoxy-l-, 4-p-tolyloxy-l-, 4-benzyloxy-1-, 4- (2 ethylmercaptoethyl) - 1-, and 4 - phenyl - 1 - naphthonitrile, and also 4-acetyl-1-, 4-acetoxy-l-, 4-hydroxy-1-, and 4 - methylmercapto - 1 - naphthonitrile; chloro, 4'-nitro-, 4'-bromo-, 3 - bromo - diphenyl - 4 - carbonitrile, benzothiophene 2 - carbonitrile, -5-carbonitrile, and -7-carbonitrile, dibenzothiophene - 4carbonitrile, benzofuran-2- and -3-carbonitrile, dibenzofuran - 1 - carbonitrile, -2carbonitrile, and -3-carbonitrile, anthracene-l-carbonitrile and -2-carbonitrile, 4
methyl - anthracene - I - carbonitrile, 3 - chloro - anthracene - I - carbonitrile, phenanthreno - 1 - carbonitrile and -2-carbonitrile, and 3 - chloro
phenanthreno - 9 - carbonitrile, acridine - 2 - carbonitrile, fluorene - 2 carbonitrile, and -4-carbonitrile, quinoline-4-carbonitrile, isoquinoline- 5 carbonitrile, benzoxazole-2-carbonitrile, xanthene-4-carbonitrile, acenaphthene 5 - carbonitrile, 2.3 - dihydrophenalene - 6 - carbonitrile, and 1.2.3.4 - tetrahydro - phenanthreno - 9 - carbonitrile.
With the exception of the unsubstituted 2 - naphth - 1 - yl- and 2 - naphth 2 - yl - 4.6 - bis - trichloromethyl - s - triazines, which also are not known as photoinitiators, the aryl - halogen - methyl - s - triazines according to the present invention have not previously been disclosed in the literature.
The photoinitiators have a wide range of applications. For example, they may be used as highly effective initiators for photopolymerization reactions triggered by free radicals. Suitable monomers undergoing such polyaddition reactions are, for example:
mono-, bis-, tris- and tetraacrylates and -methacrylates of mono- and polyfunctional alcohols or phenols, acrylic and methacrylic acid amides derived from mono- or polyfunctional amines, further vinyl esters and vinyl amides.
Polymerizable compositions of this type may further contain fillers, binders, polymerization inhibitors, dyestuffs, color couplers, plasticizers, adhesion promoters or oxygen absorbing agents, in varying quantities. If the compositions are applied in the form of layers to supports, which may be chemically pretreated, if desired, for example to steel, chromium, copper or brass foils, or to plastic materials, paper, glass, wood, or ceramics, or to a composite material comprising two or more of these materials, the light-sensitive layer may also be covered by a protective coating which inhibits the access of oxygen.
The photoinitiators according to the invention are effective in quantities as low as 0.05 per cent of the solids content of the composition, and an increase of this quantity beyond 10 per cent is not advisable, as a rule. Preferably, concentrations between 0.4 and 7 per cent by weight are used.
Furthermore, the photoinitiators according to the invention may be used in such radiation-sensitive compositions which undergo a change in their properties by the action of acid catalysts formed during photolysis of the initiator. In this connection, the cationic polymerization of systems containing vinyl ethers, N-vinyl compounds, such as N-vinylcarbazole, or special acid-variable lactones is to be mentioned, without precluding, however, that in some of these systems radicalinitiated reactions may also take place. Furthermore, amino plastics, such as urea/formaldehyde resins, melamine/formaldehyde resins, and other N-methylol compounds, and phenol/formaldehyde resins are mentioned as compositions which are hardened by acids. Although it is normal for epoxy resins to be hardened by
Lewis acids or by such acids whose anions are less nucleophilic than chloride or bromide, i.e. the anions of the hydrohalic acids formed during photolysis of the new photoinitiators, layers composed of epoxy resins and novolaks harden readily in the presence of the aryl - halogen - methyl - s - triazines according to the invention.
As another advantageous property of the new photoinitiators according to the invention, they are capable of causing color changes in colored systems during photolysis, or of initiating color formation in color couplers, e.g. leuko compounds, or of causing bathochromic color displacement or deepening in mixtures containing cyanine, merocyanine, or styryl color bases. Further, in mixtures such as those disclosed in German Offenlegungsschrift No. 1,572,080, which contain a color base, N-vinyl carbazole, and a halogenated hydrocarbon, the halogen compound tetrabromomethane may be replaced by a small percentage, i.e. about 1/40, of its quantity of aryl - bis - trichloromethyl - s - triazine.
Color changes are very desirable for certain techniques, for example in the manufacture of printing plates, because they render it possible to examine the exposed plate even before it is developed. The acid donors disclosed in German Offenlegungsschriften Nos. 2,331,377 and 2,641,100 (British Patent Application No.
37897/77, Serial No. 1591113), may advantageously be replaced by the photoinitiators according to the present invention.
Among the compositions according to the invention, those are particularly advantageous, however, which in addition to the aryl halogen methyl-s-triazines, contain, as essential component, a compound containing at least one C-O-C bond capable of being split up by an acid.
The following substances are mentioned as examples of compounds which can be split up by acids:
A. Compounds containing at least one ortho-carboxylic acid ester- and/or carboxylic acid amide-acetal grouping; the compounds may have a polymeric character and the groupings may be present as connecting elements in the main chain or as lateral substituents.
B. Polymeric compounds containing recurrent acetal and/or ketal groupings in which both carbon atoms in the position of the alcohols required for forming the groupings are aliphatic.
Compounds of type A which may be split up by acids are described in detail as components of radiation sensitive copying compositions in German
Offenlegungsschrift No. 26 10 842 (British Patent Application No. 12045/76, Serial
No. 1,548,757); copying compositions containing compounds of type B are the object of our co-pending patent application No. 16074/78 filed simultaneously with the present case (Serial No. 1602902).
Further compounds capable of being split up by acids are, for example, the aryl-alkyl-acetals and -aminals disclosed in German Auslegeschrift No. 23 06 248, which are also decomposed by the photolysis products of the aryl-halogen-methyls-triazines according to the invention.
Compositions in which molecules which essentially influence the chemical and/or physical properties of the composition by their presence and are directly or indirectly converted into smaller molecules by the action of actinic radiation, normally show an increased solubility, tackiness or volatility in the exposed areas.
These areas may be removed by suitable measures, for example by dissolving them away in a suitable developer liquid. In the case of copying compositions, such systems are referred to as "positive-working systems".
The novolak condensation resins found suitable for many positive-working copying compositions were also found suitable and advantageous as an additive to the copying compositions according to the invention which comprise compounds capable of being decomposed by acids. These resins, in particular the more highly condensed resins containing substituted phenols as formaldehyde condensation partners, promote a strong differentiation between the exposed and the unexposed areas of the layer during development. The type and quantity of the novolak resin added may vary with the purpose for which the composition is intended; novolak proportions between 30 and 90 per cent by weight, especially between25 and 85 per cent by weight, based on the solids content of the composition, are preferred.
In addition thereto, various other resins may be added, besides the novolaks, vinyl polymers, such as polyvinyl acetates, polyacrylates, polyvinyl ethers, and polyvinyl pyrrolidones, which, in turn, may be modified by co-monomers, being preferred.
The most favorable ratio of these resins depends on practical requirements and on their influence on the conditions of development; normally, it does not exceed 20 per cent of the novolak component. For special requirements for example, those of flexibility, adhesion or gloss etc. there may be added minor amounts of other substances, for example, polyglycols, cellulose derivatives, e.g. ethyl cellulose, wetting agents, dyestuffs, finely divided pigments, and, if necessary, UV absorbers.
Preferably, development is effected with the aqueous alkaline developers customary in the art, to which small proportions of organic solvents may be added.
The supports mentioned in connexion with the photopolymerizable compositions may also be used for the positive-working copying compositions. In addition, the silicon and silicon dioxide surfaces known from microelectronic processes may be used.
The quantity of photoinitiator contained in the positive-working copying compositions may also vary widely, depending. on the substance used and the type of layer. Favorable results are obtained with proportions ranging from about 0.05 per cent to about 10 per cent, based on the total solids content, proportions between 0.1 and 5 per cent being preferred. In the case of layers of more than 10 m thickness, it is recommended to use a relatively small quantity of acid donor.
In principle, any electromagnetic radiation emitting waves of a wave length up to about 600 nm is capable of initiating reactions of the described type in the compositions according to the invention. The preferred wave length range extends from 300 to 500 nm.
The great number of aryl-halogen-methyl-s-triazines with absorption maxima deep in the visible range of the spectrum and absorption ranges extending beyond 500 nm renders it possible to select a photoinitiator which is best suited to the light source employed. In principle, however, the use of a sensitizer is also possible.
Suitable light sources are, for example, tubular lamps, pulsed xenon lamps, metalhalide-doped high pressure mercury vapor lamps, and carbon arc lamps. In addition thereto, the light-sensitive copying compositions according to the invention may be exposed in conventional projectors and enlargement apparatuses, to the light of metallic-filament lamps, or by contact exposure under normal incandescent bulbs. Alternatively, coherent laser beams may be used for exposure.
Short-wave lasers of adequate energy output, for example argon lasers, Kryptonion lasers, dyestuff lasers, and helium-cadmium lasers emitting between 300 and 600 nm were found suitable for the purposes of the present invention. The laser beam is directed by a given, programmed line and/or screen movement.
As a further possibility, the layers according to the invention may be differentiated by irradiation with electron beams. The copying compositions according to the invention, as may numerous other organic materials, may be cross-linked by electron beams, so that a negative image is formed after the unexposed areas have been removed by a solvent or by exposure without an original followed by development. In the case of an electron beam of lower intensity and/or higher operating speed, however, the electron beam causes an increase in solubility of the irradiated areas of the layer, which may then be removed by a developer. The most favorable conditions may easily be ascertained by preliminary tests.
Preferably, the radiation sensitive compositions according to the present invention are used for the manufacture of printing forms, especially offset, halftone gravure, and screen printing forms, but also in photo resists and in so-called dry resists.
The following examples serve to illustrate the invention in detail. First, the preparation of a number of new aryl carboxylic acid nitriles is described which serve as starting materials from which the photoinitiators are prepared. Then, the preparation of some halogen-methyl substituted s-triazines is described which were found suitable as acid-forming compounds in the copying compositions according to the invention. They were designated as Compounds Nos. I to 20 and will be referred to in the examples by these numbers.
In the examples, the relation between parts by weight and parts by volume corresponds to that between grams and milliliters. Percentages and proportions are by weight unless otherwise stated.
Preparation of Aryl Carboxylic Acid Nitriles
The following aryl carboxylic acid nitriles R-CN, which have not previously been disclosed in the literature, were prepared analogously to the instructions given in "Chem. Ber.", 100, 2719 (1967), from the corresponding carboxylic acids R-COOH, or directly from the alkoxy aryl compounds R-H, by reaction first with chlorosulfonyl isocyanate and then with dimethyl formamide.
TABLE 1
Nitriles R-CN Nitrile Starting
No. R Melting Pt. ("C) Substance
4-(2-ethoxy-ethoxy)- oil; distilled in a R-H naphth-l-yl bulb tube; air bath
130 to 1400C/5.10-' Torr
2 4.7-dimethoxy-naphth- 109-110 R-H l-yl 3 4.5-dimethoxy-naphth- 120.5-121.5 R-H I-yl 4 5-methyl-6-methoxy- 7485+) R-H naphth-2-yl
5 4-methoxy-anthrac- 1 -yl 143-145 R-H 6 5-methoxy-naphth-1-yl 89-91 R-COOH +) Crude product; purification at the aryl-s-triazine stage.
The starting substance of Nitrile No. 1, 1 - (2 - ethoxy - ethoxy) naphthalene, with a melting point of 91--95"C/0.002 Torr, was obtained by alkylating l-naphthol with ethyleneglycol monoethyl ether/p-toluene sulfonic acid chloride, according to the method described in "Monatshefte Chem.", 8?, 588 (1951).
Preparation of bis-Trichloromethyl-s-Triazines
Gaseous hydrochloric acid is introduced, at a temperature between 0 and 5"C, into a solution of 29.1 grams of l-ethoxy-naphthalene, 100 grams of trichloroacetonitrile, and 1.65 grams of aluminum tribromide while the solution is agitated. After about 2 hours, the mass in the flask has solidified; introduction of the gas and cooling are discontinued. When the reaction mixture is heated to room temperature, it becomes partly liquid again; it is cooled again to 0 C and gaseous hydrochloric acid is again introduced for two hours. After the mass has again spontaneously heated and was cooled to 0--50C, and after further introduction of gaseous hydrochloric acid for 2 hours, the then solid mass is allowed to stand overnight at room temperature. Thereafter, it is dissolved in methylene chloride and shaken out in a small quantity of water. After the solution has been dried over sodium sulfate and the solvent has been removed under reduced pressure, a crude product is obtained which is freed from unreacted portions of the starting material and from tris-trichloromethyl-s-triazine, which is formed by a side reaction, by distillation in a bulb tube apparatus (air bath: 1 1l 300C/0. 1 Torr). 24.1 grams of a residue are obtained which consists of almost pure 2 - (4 - ethoxy - naphth - 1 yl) - 4.6 - bis - trich;oromethyl - s - triazine, which, after recrystallization from diethyl ether, has a melting point of 154.5-156.5 C.
The aryl - bis - trichloromethyl - s - triazines listed in Table 2 are prepared analogously, the crude products being in some cases purified by crystallization, in others by additional filtration over silica gel, using methylene chloride as the solvent and eluent.
TABLE 2
Aryl-bis-trichloromethyl-s-triazines corresponding to Formula I wherein
n=m=0 and X=CI
Long-Wave Absorption
Photoinitiator No. R Melting Pt. Maximum (nm)
( C) #max log #
1+) Naphth-l-yl 128-129 363 4.05 2 2-Methoxy-naphth-l-yl 162-165 368 3.59
3 4-Methoxy-naphth-l-yl 181,5-183 388 4.33
4 5-Methoxy-naphth-l-yl 154-156 399 3.87
5 4-Ethoxy-naphth-l-yl 154.5-156.5 388 4.34 6 4,5-Dimethoxy-naphth-l-yl 165-167 416 4.16
7 4,7-Dimethoxy-naphth-l-yl 136-137 404 4.27 8 4-(2-ethoxy-ethoxy)-naphth-l-yl 103-105 388 4.34
9++) Naphth-2-yl 210211.5 367 3.52
10 l-Methoxy-naphth-2-yl 132-134.5 371 3.71
11 3-Methoxy-naphth-2-yl 173-175 322 4.29 385(sh) 2.98
12 6-Methoxy-naphth-2-yl 191.5-192 351 4.27 374 4.28
13 5-Methyl-6-methoxy-naphth-2-yl 211-214 390 4.20 14 Quinol-3-yl 201-204 317 4.28
15 Benzopyran-3-yl 185-188.5 405 4.04
16 4-Phenyl-phenyl 149.5-151.5 332
0.12 p.b.w. of photoinitiator No. 5 64.0 p.b.w. of ethyleneglycol monoethyl ether,
22.7 p.b.w. of butyl acetate, and
0.3 p.b.w. of 2.4 - dinitro - 6 - chloro - 2' - acetamido - 5' - methoxy - 4' (p - hydroxyethyl -,1' - cyanoethyl) - amino - azobenzene, so that a layer weighing 3 to 4 g/m2 results after drying. The plate is then provided with a 4 pm thick protective layer of polyvinyl alcohol (Mowiol 4/88, Hoechst AG), exposed for 30 seconds from a distance of 110 cm to the light of a 5 kW metal halide lamp under a line/screen original and developed with a 1.5 per cent sodium metasilicate. loped with a 1.5 per cent solution of
A negative image of the original is thus obtained. A printing run with an offset printing plate made in this manner was stopped after 200,000 copies of unobjectionable quality had been printed.
Example 2
This example describes the manufacture of a negative-working dry resist. A coating solution of
24.9 p.b.w. of a copolymer of 30 p.b.w. of methacrylic acid, 60 p.b.w. of nhexylmethacrylate, and 10 p.b.w. of styrene,
16.1 p.b.w. of the reaction product of 1 mol of 2.2.4 trimethylhexamethylene - diisocyanate and 2 mols of hydroxyethyl-methacrylate, 0.41 p.b.w. of triethyleneglycol dimethacrylate,
0.58 p.b.w. of Photoinitiator No. 3,
0.11 p.b.w. of the dyestuff used in Ex. 1, and
57.9 p.b.w. of methyl ethyl ketone is whirler coated on a polyethylene terephthalate film in a manner such that the dry layer weighs 25 g/m2. The resulting material is laminated in a commercial laminator, at 1200C, onto a support consisting of insulating material provided with a 35 pm thick copper layer. After exposing the material for 60 seconds under an original which contains a continuous tone step wedge, besides line and screen motifs, using a 5 kW metal halide lamp as the light source as in Example 1, and development with 0.8 per cent sodium carbonate solution, a negative image of the line and screen motif and steps 1 to 5 of the step wedge remain in the form of a relief, while step 6 of the step wedge is partially corroded.
The resist layer is resistant to etching processes, for example with ferric chloride solutions, and the action of electroplating baths used for the production of circuit boards.
Example 3
A mechanically roughened aluminum plate is whirler coated with a solution of 4.3 p.b.w. of a phenol-formaldehyde novolak (melting range 110--1200C, acc. to
DIN 53181),
10.6 p.b.w. of N-vinyl carbazole,
0.24 p.b.w. of 2 - (p - dimethylaminostyryl) - benzthiazole,
0.25 p.b.w. of Photoinitiator No. 7, and
84.6 p.b.w. of methyl ethyl ketone.
After drying a light-sensitive layer of 1-2 ,vm thickness results. The plate is image-wise exposed for 8 seconds as described in Example 1; during exposure, the color shade in the image areas of the layer changes from yellow to orange red. By moving the plate to and fro in a developer solution consisting of
0.6 p.b.w. of NaOH,
0.5 p.b.w. of Na2SiO3. 5 H2O,
1.0 p.b.w. of n-butanol, and
97.9 p.b.w. of completely desalted water, the unexposed areas of the layer are removed within 75 seconds. When the plate is wiped over with greasy ink, the exposed areas of the layer accept ink so that the
plate may be used for printing on an offset machine.
Example 4
Example 3 is repeated, except that in the coating solution the styryl color base
is replaced by the same quantity by weight of the cyanine color base 2 - [1 - cyan
3 - (3 - ethyl - 2 - benzthiazolylidene) - propen - 1 - yll - quinoline and that the
Photoinitiator No. 7 is replaced by the same quantity of Photoinitiator No. 13 and
that a polyester film is used for coating.
By image-wise exposing the material for 16 seconds as described in Example 1,
the color of the image areas changes from an initial light red to deep violet.
By wiping over with the developer used in Example 3, the non-image areas are
removed. A negative image of the original is thus produced.
This method may be used for the production of color proofing films.
Example 5
A mechanically roughened aluminum plate is whirler coated with a layer of the
following composition from a 10 per cent methyl ethyl ketone solution:
48.3 p.b.w. of an epoxy resin (obtained from epichlorohydrin and Bisphenol A,
epoxy equivalent weight 182-194) 48.3 p.b.w. of a cresol-formaldehyde novolak (melting range 105--120"C according to DIN 53181),
2.9 p.b.w. of Photoinitiator No. 8, and
0.5 p.b.w. of Crystal Violet.
By 60 seconds' image-wise exposure as in Example 1 and 40 seconds'
development with the developer used in Example 3, a negative image of the original
is obtained in which the non-image areas are free from scum.
If the epoxy resin is replaced by the same quantity of the above stated novolak,
a negative image becomes briefly visible during development, but the resistance of
the layer to the developer is so poor that the entire layer is dissolved from the
support within 30 seconds.
Example 6
This example shows how layers containing the new photoinitiators and
compounds which are split up by acids, are imaged by means of electron beams:
About 2 ,um thick layers of the following composition
74% of the novolak used in Example 5, 22 /ó of the compound split up by an acid,
3.8% of the photoinitiator, and
0.2% of a dyestuff
are applied to mechanically roughened aluminum and are then irradiated with 11
kV electron beams. The irradiated areas are solubilized under the conditions stated
in Table 3.
For development, either the developer used in Example 3 or the following
developer solution is used:
5.5 p.b.w. of sodium metasilicate .9 H2O,
3.4 p.b.w. of trisodium phosphate .12 H2O, 0.4 p.b.w. of anhydrous mono-sodium phosphate,
90.7 p.b.w. of completely desalted water.
TABLE 3
Irradiated Developer Developing
Photoinitiator Compound Split Energy acc. to Time
No. up by an Acid (Joule/cm2) Example (seconds)
3 polyacetyl obtained from 1--10.10-2 6 45
benzaldehyde and
triethylene-glycol
5 polyacetal obtained from 1--15.10-2 3 10
propionic aldehyde and
triethylene-glycol
8 bis-diphenoxy methyl-ether 1--30.10-2 6 30
of polyglycol 200
Example 7
For the preparation of a re-enlargement plate, a solution was prepared from
4.0 p.b.w. of the novolak stated in Ex. 5,
1.2 p.b.w. of bis - (5 - ethyl - 5 - butyl - 1.3 - dioxan - 2 - yl) - ether of polyglycol 200,
0.2 p.b.w. of Photoinitiator No. 12,
0.01 p.b.w. of Crystal Violet, and
94.6 p.b.w. of methyl ethyl ketone and applied, on a centrifuge, to a brushed aluminum plate. The plate is exposed for 3 minutes under a positive transparency from a distance of 65 cm, using a projector of type Leitz Prado (f=85 mm, 1:2.5) with a 150 watt lamp as the light source. By immersion in the developer used in Example 6, an enlarged positive copy of the black and white line image on the positive transparency is obtained within 30 seconds. The copy may be reproduced by printing in a small offset press.
Similar results are obtained if the above bis-orthoester is replaced by the same quantity of the polymeric acetal of benzaldehyde and triethylene glycol and
Photoinitiator No. 12 is replaced by Photoinitiator No. 20.
Example 8
A coating solution consisting of
4.0 p.b.w. of the novolak used in Example 5,
1.2 p.b.w. of the reaction product of 2.2.5.5 - tetrahydroxymethyl cyclopentanone and ortho-formic acid trimethyl ester,
0.2 p.b.w. of Photoinitiator No. 1,
0.0I p.b.w. of Crystal Violet, and
94.6 p.b.w. of methyl ethyl ketone is whirler coated onto an electrolytically roughened and anodized aluminum plate in a manner such that a dry layer weight of 2.0 g/m2 results, and the plate is imagewise exposed for 40 seconds under the conditions stated in Example I whereupon a pronounced bluish violet-bluegreen contrast becomes visible.
By wiping over with the developer used in Example 6, the plate is developed to a positive image of the original.
In a test run, 140,000 copies of good quality were obtained from the offset printing plate produced.
Comparable results are obtained by replacing Photoinitiator No. 1 by the same quantity of Initiator No. 6, No. 4, or No. 18, or by a mixture of two or all of these
Initiators.
Example 9
A positive-working photoresist of high layer thickness is produced as follows:
29.6 p.b.w. of the novolak used in Example 5,
8.9 p.b.w. of the bis - (5 - ethyl - 5 - butyl - 1.3 - dioxan - 2 - yl) - ether of 2 - ethyl - 2 - butyl - propane - diol,
0.12 p.b.w. of Photoinitiator No. 5, and
2.1 p.b.w. of modified silicon glycol (a commercially available coating auxiliary) are dissolved in
59.28 p.b.w. of butan-2-one.
This solution is applied, by means of a wire bar No. 40, to the cleaned copper surface of the composite material used in Example 2. By storing the material for 12 hours at room temperature, the solvent is substantially evaporated. The plate is after-dried for 15 minutes at 70"C by infrared radiation.
A 70,um thick resist layer is thus produced which is image-wise exposed for 80 seconds under a line original, using the 5 kW metal halide lamp of Example I as the light source, and may then be developed within 40 seconds by spraying with a 0.8 percent sodium hydroxide solution.
Example 10
The efficicncy of the new photoinitiators as acid donors is investigated by
incorporating them in a standard composition:
0.5 gram of the novolak used in Ex. 5,
0.15 gram of the bis-orthoester used in Ex. 9,
0.025 gram of photoinitiator, and
0.012 gram of Crystal Violet, dissolved in
12.5 ml of methyl ethyl ketone, are whirler coated onto plates with electrolytically roughened and anodized surfaces to a layer thickness of 1.5 to 2 ym and then image-wise exposed for 40 seconds under the conditions stated in Example 1.
Layers containing Photoinitiators Nos. 2, 9, 10, 11, 15, 16, 17 and 19 can be developed within 30 seconds by moving them to and fro in the developer used in
Example 6, while the layer containing Photoinitiator No. 14 requires 1 minute's development with the developer used in Ex. 3. In all cases a positive copy of the original is obtained.
Example 11
Aluminum plates with an electrolytically roughened and anodized surface are whirler coated with a solution of
4.7 p.b.w. of the novolak used in Example 5,
1.4 p.b.w. of the compound capable of being split up by acid,
0.23 p.b.w. of photoinitiator,
0.02 p.b.w. of Crystal Violet, and
93.05 p.b.w. of butan-2-one in a manner such that, after drying, a layer of about 1.7 ,um thickness results. The layers are image-wise exposed over all spectral lines with an argon laser of 25 W output, the laser beam being focussed by a lens on a spot with a diameter of 5 pm.
By varying the recording speed of the laser, the sensitivity of each combination is determined. By treatment with the developer used in Example 6, the exposed areas of the layers are dissolved away within 15 to 90 seconds. The trace of the laser may be brought out even more distinctly by inking the unexposed areas with greasy ink.
The following maximum recording speeds were determined:
Recording Speed
Combination (m/sec.)
Propionic aldehyde/triethylene-glycol polyacetal- 50
Photoinitiator No. 12 Benzaldehyde/l .5-pentanediol polyacetal- 75
Photoinitiator No. 5
Bisorthoester acc. to Example 9- 25
Photoinitiator No. 5
WHAT WE CLAIM IS:
1. A radiation sensitive composition which comprises an s-triazine of Formula
wherein
X represents chlorine or bromine,
m and n are integers within the range of 0 to 3 inclusive, the sum of m and n being at most 5, and
R represents a substituted or unsubstituted bi or polynuclear aromatic group which may be partially hydrogenated and which is linked to the s-triazine ring by an unsaturated nuclear carbon atom, and a compound capable of forming chemical reaction product in the presence of the product formed by irradiation of the striazine.
2. A composition as claimed in claim 1, wherein the carbon atom through which the group R is linked to the s-triazine ring is an aromatic carbon atom.
3. A composition as claimed in claim 1 or claim 2, wherein the aromatic group is a heterocyclic aromatic group.
**WARNING** end of DESC field may overlap start of CLMS **.
Claims (16)
1.4 p.b.w. of the compound capable of being split up by acid,
0.23 p.b.w. of photoinitiator,
0.02 p.b.w. of Crystal Violet, and
93.05 p.b.w. of butan-2-one in a manner such that, after drying, a layer of about 1.7 ,um thickness results. The layers are image-wise exposed over all spectral lines with an argon laser of 25 W output, the laser beam being focussed by a lens on a spot with a diameter of 5 pm.
By varying the recording speed of the laser, the sensitivity of each combination is determined. By treatment with the developer used in Example 6, the exposed areas of the layers are dissolved away within 15 to 90 seconds. The trace of the laser may be brought out even more distinctly by inking the unexposed areas with greasy ink.
The following maximum recording speeds were determined:
Recording Speed
Combination (m/sec.)
Propionic aldehyde/triethylene-glycol polyacetal- 50
Photoinitiator No. 12 Benzaldehyde/l .5-pentanediol polyacetal- 75
Photoinitiator No. 5
Bisorthoester acc. to Example 9- 25
Photoinitiator No. 5
WHAT WE CLAIM IS:
1. A radiation sensitive composition which comprises an s-triazine of Formula
wherein
X represents chlorine or bromine,
m and n are integers within the range of 0 to 3 inclusive, the sum of m and n being at most 5, and
R represents a substituted or unsubstituted bi or polynuclear aromatic group which may be partially hydrogenated and which is linked to the s-triazine ring by an unsaturated nuclear carbon atom, and a compound capable of forming chemical reaction product in the presence of the product formed by irradiation of the striazine.
2. A composition as claimed in claim 1, wherein the carbon atom through which the group R is linked to the s-triazine ring is an aromatic carbon atom.
3. A composition as claimed in claim 1 or claim 2, wherein the aromatic group is a heterocyclic aromatic group.
4. A composition as claimed in claim 1, wherein R- represents
wherein
R1 represents H or OR3,
R2 represents H, Cl, Br or an alkyl, alkenyl, aryl, or alkoxy group, and
R3 represents an alkyl, cycloalkyl, alkenyl, or aryl group, or
R1 and R2 together represent an alkylene group.
5. A composition as claimed in claim 4, wherein, in the formula 1, X represents chlorine and n and m are zero.
6. A composition as claimed in claim 1, wherein, when n and m are zero, and R represents a naphthyl radical, the naphthyl radical is substituted.
7. A composition as claimed in claim 1 or claim 2, wherein
R represents a bi- or trinuclear condensed aryl group or a corresponding heterocyclic aromatic group with 0, S. or N as heteroatoms, and which may be partially hydrogenated, or a diphenyl group,
X represents chlorine, and
n and m are zero.
8. A composition as claimed in claim 7, wherein one or more nuclei in the group R is or are substituted.
9. A composition as claimed in claim 1, wherein R- represents a group of the formula
wherein
R1 represents H or -OR3, R2 represents H, Cl, Br, or an alkyl group with 1 to 4 carbon atoms, an alkenyl with from 2 to 4 carbon atoms, aryl, or a substituted or unsubstituted alkoxy group with I to 4 carbon atoms, and R3 resents an alkyl group with 1 to 8 carbon atoms which may be substituted by halogen, or by aryl or aryloxy groups, and in which one or more methylene groups may be replaced by O or S-bridges, or R3 is a cycloalkyl, alkenyl, or aryl group, or
R1 and R2, taken together, represent an alkylene group which is linked to the naphthalene nucleus to form a 5- or 6-membered ring.
10. A composition as claimed in any one of claims I to 9, which also comprises an ethylenically unsaturated compound capable of undergoing a polymerization reaction initiated by free radicals.
I I. A composition as claimed in any one of claims I to 9, which also comprises a compound whose solubility is changed by the action of an acid.
12. A composition as claimed in claim 11, wherein the compound whose solubility is changed contains at least one C-O-C group capable of being split up by an acid and whose solubility is increased by the action of an acid.
13. A composition as claimed in any one of claims I to 9, which also comprises a compound capable of undergoing a cationic polymerization reaction under the action of acid catalysts.
14. A composition as claimed in any one of claims I to 13, which also comprises a polymeric binder.
15. A composition as claimed in any one of claims 1 to 14, in the form of a layer on a support.
16. A printing forme, or photoresist, comprising a composition as claimed in any one of claims I to 14.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2718259A DE2718259C2 (en) | 1977-04-25 | 1977-04-25 | Radiation-sensitive mixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1602903A true GB1602903A (en) | 1981-11-18 |
Family
ID=6007163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB16075/78A Expired GB1602903A (en) | 1977-04-25 | 1978-04-24 | Radiationsensitive copying composition |
Country Status (16)
| Country | Link |
|---|---|
| JP (1) | JPS53133428A (en) |
| AU (1) | AU514951B2 (en) |
| BE (1) | BE866306A (en) |
| BR (1) | BR7802525A (en) |
| CA (1) | CA1103508A (en) |
| CH (1) | CH634158A5 (en) |
| DE (1) | DE2718259C2 (en) |
| DK (1) | DK176878A (en) |
| ES (1) | ES469089A1 (en) |
| FR (1) | FR2389157A1 (en) |
| GB (1) | GB1602903A (en) |
| IE (1) | IE46622B1 (en) |
| IT (1) | IT1102622B (en) |
| NL (1) | NL185179C (en) |
| SE (1) | SE423286B (en) |
| ZA (1) | ZA782332B (en) |
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| US4837128A (en) * | 1986-08-08 | 1989-06-06 | Fuji Photo Film Co., Ltd. | Light-sensitive composition |
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Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1298414B (en) * | 1967-11-09 | 1969-06-26 | Kalle Ag | Photosensitive mixture |
-
1977
- 1977-04-25 DE DE2718259A patent/DE2718259C2/en not_active Expired
-
1978
- 1978-04-21 NL NLAANVRAGE7804304,A patent/NL185179C/en not_active IP Right Cessation
- 1978-04-21 CA CA301,635A patent/CA1103508A/en not_active Expired
- 1978-04-21 AU AU35355/78A patent/AU514951B2/en not_active Expired
- 1978-04-21 SE SE7804588A patent/SE423286B/en not_active IP Right Cessation
- 1978-04-21 IE IE788/78A patent/IE46622B1/en unknown
- 1978-04-21 IT IT49012/78A patent/IT1102622B/en active
- 1978-04-24 JP JP4919578A patent/JPS53133428A/en active Granted
- 1978-04-24 CH CH442078A patent/CH634158A5/en not_active IP Right Cessation
- 1978-04-24 ZA ZA00782332A patent/ZA782332B/en unknown
- 1978-04-24 DK DK176878A patent/DK176878A/en unknown
- 1978-04-24 BR BR7802525A patent/BR7802525A/en unknown
- 1978-04-24 FR FR7812010A patent/FR2389157A1/en active Granted
- 1978-04-24 GB GB16075/78A patent/GB1602903A/en not_active Expired
- 1978-04-24 BE BE187055A patent/BE866306A/en not_active IP Right Cessation
- 1978-04-24 ES ES469089A patent/ES469089A1/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4837128A (en) * | 1986-08-08 | 1989-06-06 | Fuji Photo Film Co., Ltd. | Light-sensitive composition |
| US5064741A (en) * | 1986-08-29 | 1991-11-12 | Fuji Photo Film Co., Ltd. | Positive working light-sensitive composition containing a free radical generator and a discoloring agent |
| US11848249B2 (en) | 2019-09-26 | 2023-12-19 | Fujifilm Corporation | Manufacturing method for thermal conductive layer, manufacturing method for laminate, and manufacturing method for semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| AU3535578A (en) | 1979-10-25 |
| IT7849012A0 (en) | 1978-04-21 |
| CH634158A5 (en) | 1983-01-14 |
| DE2718259C2 (en) | 1982-11-25 |
| DK176878A (en) | 1978-10-26 |
| FR2389157A1 (en) | 1978-11-24 |
| IE780788L (en) | 1978-10-25 |
| BE866306A (en) | 1978-10-24 |
| AU514951B2 (en) | 1981-03-05 |
| NL7804304A (en) | 1978-10-27 |
| SE423286B (en) | 1982-04-26 |
| NL185179C (en) | 1990-02-01 |
| DE2718259A1 (en) | 1978-11-02 |
| ZA782332B (en) | 1979-04-25 |
| FR2389157B1 (en) | 1980-10-31 |
| CA1103508A (en) | 1981-06-23 |
| NL185179B (en) | 1989-09-01 |
| IT1102622B (en) | 1985-10-07 |
| ES469089A1 (en) | 1979-09-16 |
| SE7804588L (en) | 1978-10-26 |
| JPS53133428A (en) | 1978-11-21 |
| JPS6244258B2 (en) | 1987-09-18 |
| IE46622B1 (en) | 1983-08-10 |
| BR7802525A (en) | 1978-12-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PE20 | Patent expired after termination of 20 years |
Effective date: 19980423 |