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GB1406079A - Induction heating coils - Google Patents

Induction heating coils

Info

Publication number
GB1406079A
GB1406079A GB5139872A GB5139872A GB1406079A GB 1406079 A GB1406079 A GB 1406079A GB 5139872 A GB5139872 A GB 5139872A GB 5139872 A GB5139872 A GB 5139872A GB 1406079 A GB1406079 A GB 1406079A
Authority
GB
United Kingdom
Prior art keywords
induction heating
coil
multiturn
section
metallic members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5139872A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1406079A publication Critical patent/GB1406079A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16Heating of the molten zone
    • C30B13/20Heating of the molten zone by induction, e.g. hot wire technique
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

1406079 Induction heating coil SIEMENS AG 8 Nov 1972 [7 Dec 1971] 51398/72 Heading H5H Crucible free zone melting apparatus comprises a single or multiturn pancake induction heating coil which has an annular conducting insert made in two separable portions 13, 14 which are also separable from the wound section 12 to enable the work to be introduced into it. As shown a multiturn silver or copper tubular coil 11 has two abutting inner metallic members 13, 14 releasably held in contact with the inner surface of the inner turn of the coil section 12 by screws 15-22 secured to a flange 30 soldered to the inner surface of the inner turn. In Figs. 3 and 4 (not shown) the inner metallic members are hollow and connected to the coil section coolant circuit.
GB5139872A 1971-12-07 1972-11-08 Induction heating coils Expired GB1406079A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2160694A DE2160694C3 (en) 1971-12-07 1971-12-07 Induction heating coil for crucible-free zone melting of semiconductor rods

Publications (1)

Publication Number Publication Date
GB1406079A true GB1406079A (en) 1975-09-10

Family

ID=5827286

Family Applications (2)

Application Number Title Priority Date Filing Date
GB676375A Expired GB1406080A (en) 1971-12-07 1972-11-08 Induction heating coils
GB5139872A Expired GB1406079A (en) 1971-12-07 1972-11-08 Induction heating coils

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB676375A Expired GB1406080A (en) 1971-12-07 1972-11-08 Induction heating coils

Country Status (12)

Country Link
US (1) US3827017A (en)
JP (1) JPS5124964B2 (en)
AT (1) AT324433B (en)
BE (1) BE789504A (en)
CA (1) CA976617A (en)
DE (1) DE2160694C3 (en)
DK (1) DK146725C (en)
FR (1) FR2162442B1 (en)
GB (2) GB1406080A (en)
IT (1) IT971386B (en)
NL (1) NL7213754A (en)
PL (1) PL79132B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2855446A1 (en) * 1978-01-05 1979-07-12 Motorola Inc INDUCTION HEATING COIL AND METHOD OF MANUFACTURING IT

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2434136A1 (en) * 1974-07-16 1976-01-29 Siemens Ag DEVICE FOR CRUCIBLE-FREE ZONE MELTING OF SEMICONDUCTOR MATERIAL RODS
DE2538854B2 (en) * 1975-09-01 1979-02-15 Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen Single-turn induction heating coil for crucible-free zone melting
US4059493A (en) * 1976-04-29 1977-11-22 Cities Service Company Anode, anode basket and method of packaging anodes
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
DE3143146A1 (en) * 1981-10-30 1983-05-11 Siemens AG, 1000 Berlin und 8000 München INDUCTION HEATING COIL DESIGNED AS A FLAT COIL FOR POT-FREE ZONE MELTING
DE3229461A1 (en) * 1982-08-06 1984-02-09 Siemens AG, 1000 Berlin und 8000 München DEVICE FOR POT-FREE ZONE MELTING OF A SEMICONDUCTOR STICK, PARTICULARLY MADE OF SILICON
US4714808A (en) * 1986-09-02 1987-12-22 Fmc Corporation Induction heating pressure welding with linear bus bar joint
JPS6448391A (en) * 1987-04-27 1989-02-22 Shinetsu Handotai Kk Single winding induction heating coil used in floating zone melting method
JPS63291888A (en) * 1987-05-25 1988-11-29 Shin Etsu Handotai Co Ltd Production device for semiconductor single crystal
EP0292920B1 (en) * 1987-05-25 1992-07-29 Shin-Etsu Handotai Company Limited Rf induction heating apparatus
US5113049A (en) * 1991-02-14 1992-05-12 Pda Engineering Flexible induction heating coil
JP3127981B2 (en) * 1995-01-31 2001-01-29 信越半導体株式会社 High frequency induction heating device
DE112008003888B4 (en) * 2008-07-17 2014-11-20 Denki Kogyo Co. Ltd. Arrangement of guide elements for a high-frequency induction coil
EP2366814A4 (en) * 2008-11-25 2014-03-19 Luoyang Jinnuo Mechanical Eng High-frequency coil pulling holes arrangement for producing multiple silicon cores
US20110204044A1 (en) * 2008-11-25 2011-08-25 Chaoxuan Liu High-frequency coil pulling holes arrangement for producing multiple silicon cores
DE102010005263A1 (en) * 2010-01-20 2011-07-21 Benteler Automobiltechnik GmbH, 33102 Method for manufacturing component for mounting towing eye, involves warming component region at specific temperature and mechanically deforming component region
US9282593B2 (en) 2011-06-03 2016-03-08 General Electric Company Device and system for induction heating
JP6111033B2 (en) * 2011-12-05 2017-04-05 高周波熱錬株式会社 Heating coil
DE102012017130B4 (en) 2012-09-01 2016-06-16 Man Diesel & Turbo Se Laser Rohreinschweißen
CN111101199A (en) * 2019-12-30 2020-05-05 亚洲硅业(青海)股份有限公司 Detachable high-frequency coil and silicon core furnace
JP1766094S (en) * 2023-12-01 2024-03-19 Heater for heating semiconductor wafers and susceptors

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US156707A (en) * 1874-11-10 Improvement in faucets
US1335895A (en) * 1919-03-24 1920-04-06 Emily W Hughes Electrode-holder
US2266176A (en) * 1934-03-29 1941-12-16 Ohio Crankshaft Co Apparatus for electric heating
US2264301A (en) * 1934-03-29 1941-12-02 Ohio Crankshaft Co Heating and quenching apparatus
US2404987A (en) * 1944-04-19 1946-07-30 Induction Heating Corp Induction heating and quenching device
US2419116A (en) * 1944-04-20 1947-04-15 Westinghouse Electric Corp Apparatus for high-frequency induction heating of strips
US2456091A (en) * 1945-03-12 1948-12-14 Induction Heating Corp Inductor for high-frequency induction heating
US2481008A (en) * 1945-06-27 1949-09-06 Induction Heating Corp Multiturn split inductor
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
GB615779A (en) * 1946-08-17 1949-01-11 Standard Telephones Cables Ltd Improvements in or relating to high frequency heating equipment
US2709741A (en) * 1952-04-17 1955-05-31 Allis Chalmers Mfg Co Inductor coil comprising parallel plates connected by a cooling conduit
US3110793A (en) * 1961-11-20 1963-11-12 Gen Electric Brazing tool
NL295506A (en) * 1963-07-18
US3428769A (en) * 1966-07-26 1969-02-18 Mc Donnell Douglas Corp Induction heating tool
SE318944B (en) * 1967-07-12 1969-12-22 Asea Ab
US3534198A (en) * 1967-11-29 1970-10-13 Leonidas C Miller Adjustable induction heating head for a coaxial cable

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2855446A1 (en) * 1978-01-05 1979-07-12 Motorola Inc INDUCTION HEATING COIL AND METHOD OF MANUFACTURING IT

Also Published As

Publication number Publication date
DE2160694C3 (en) 1980-02-07
GB1406080A (en) 1975-09-10
FR2162442A1 (en) 1973-07-20
DK146725B (en) 1983-12-12
PL79132B1 (en) 1975-06-30
JPS49100960A (en) 1974-09-24
DK146725C (en) 1984-05-28
DE2160694A1 (en) 1973-06-14
FR2162442B1 (en) 1977-08-26
DE2160694B2 (en) 1979-06-13
CA976617A (en) 1975-10-21
NL7213754A (en) 1973-06-12
AT324433B (en) 1975-08-25
US3827017A (en) 1974-07-30
IT971386B (en) 1974-04-30
JPS5124964B2 (en) 1976-07-28
BE789504A (en) 1973-01-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee