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GB1466007A - Data storage apparatus employing variable threshold field effect semiconductor devices - Google Patents

Data storage apparatus employing variable threshold field effect semiconductor devices

Info

Publication number
GB1466007A
GB1466007A GB2376274A GB2376274A GB1466007A GB 1466007 A GB1466007 A GB 1466007A GB 2376274 A GB2376274 A GB 2376274A GB 2376274 A GB2376274 A GB 2376274A GB 1466007 A GB1466007 A GB 1466007A
Authority
GB
United Kingdom
Prior art keywords
gate
storage
strips
source
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2376274A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1466007A publication Critical patent/GB1466007A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0466Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/69IGFETs having charge trapping gate insulators, e.g. MNOS transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Non-Volatile Memory (AREA)
  • Read Only Memory (AREA)

Abstract

1466007 Semi-conductor devices INTERNATIONAL BUSINESS MACHINES CORP 29 May 1974 [29 June 1973] 23762/74 Heading H1K [Also in Division G4] A memory cell of the type constituted by a variable-threshold IGFET whose gate insulation 16 (Fig. 6) is capable of storing charges injected therein from the channel region includes at least one capacitive control gate 24 isolated from the storage gate 22 and located between the storage gate 22 and one of the source and drain regions 12, 14. Application of an appropriate potential to the control gate 24 inhibits the formation of a channel therebeneath and so isolates the storage area 40 of the device from the source or drain region. A single control gate may be provided or, as shown, interconnected control gates 24, 24<SP>1</SP> may be provided on both sides of the storage gate 22. Channel inhibition beneath the control gates 24, 24<SP>1</SP> enables an optical write mechanism to be employed, whereby carriers are generated in the storage area 40 by the absorption of light, an appropriate potential on storage gate 22 causing carriers to tunnel into the gate insulation 16, which preferably comprises silicon nitride or silicon oxide. A more conventional electrical writing mechanism employing carriers injected from the source or drain regions 12, 14 requires the application of a channel-inducing potential on the control gates 24, 24<SP>1</SP>, and this is also the case for both read and erase processes. An orthogonal array of such storage cells is described (Fig. 9), in which source/drain regions common to all cells in a column are provided by diffused strips 46, the control gates are provided by polycrystalline silicon strips 24, 24<SP>1</SP> parallel to the source/drain strips 46, and the storage gates are provided by aluminium strips 22 perpendicular to the strips 24, 24<SP>1</SP> and isolated therefrom by insulation 48.
GB2376274A 1973-06-29 1974-05-29 Data storage apparatus employing variable threshold field effect semiconductor devices Expired GB1466007A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US37522273A 1973-06-29 1973-06-29

Publications (1)

Publication Number Publication Date
GB1466007A true GB1466007A (en) 1977-03-02

Family

ID=23480012

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2376274A Expired GB1466007A (en) 1973-06-29 1974-05-29 Data storage apparatus employing variable threshold field effect semiconductor devices

Country Status (3)

Country Link
JP (1) JPS5024038A (en)
FR (1) FR2235454B1 (en)
GB (1) GB1466007A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0003413A3 (en) * 1978-01-19 1979-08-22 Sperry Corporation Improvements relating to semiconductor memories
JPS54136224A (en) * 1978-04-14 1979-10-23 Matsushita Electronics Corp Target electrode for color pick up tube and its manufacture
JPS5512688A (en) * 1978-07-14 1980-01-29 Matsushita Electronics Corp Target electrode for color camera
JPS5584976A (en) * 1978-12-22 1980-06-26 Nippon Telegraph & Telephone Surface treatment of transparent electrode layer
JPS55138278A (en) * 1979-04-11 1980-10-28 Hitachi Ltd Semiconducor non-volatile memory
JPS55156371A (en) * 1979-05-24 1980-12-05 Toshiba Corp Non-volatile semiconductor memory device
JPS5641644A (en) * 1979-09-14 1981-04-18 Hitachi Ltd Manufacture of image pick-up tube
JPS5641640A (en) * 1979-09-14 1981-04-18 Hitachi Ltd Manufacture of image pick-up tube
JPS5654702A (en) * 1979-10-11 1981-05-14 Hitachi Ltd Method of manufactuping transparent conductive film
DE3138947A1 (en) * 1981-09-30 1983-04-21 Siemens AG, 1000 Berlin und 8000 München STORAGE CELL WITH A DOUBLE GATE FIELD EFFECT TRANSISTOR AND METHOD FOR THEIR OPERATION
JPH063762B2 (en) * 1985-10-30 1994-01-12 ロ−ム株式会社 Method for manufacturing metal oxide film resistor

Also Published As

Publication number Publication date
FR2235454B1 (en) 1977-09-30
JPS5024038A (en) 1975-03-14
FR2235454A1 (en) 1975-01-24

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee