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GB1440776A - Electron-beam apparatus - Google Patents

Electron-beam apparatus

Info

Publication number
GB1440776A
GB1440776A GB4577273A GB4577273A GB1440776A GB 1440776 A GB1440776 A GB 1440776A GB 4577273 A GB4577273 A GB 4577273A GB 4577273 A GB4577273 A GB 4577273A GB 1440776 A GB1440776 A GB 1440776A
Authority
GB
United Kingdom
Prior art keywords
jaws
wire
current
anode
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4577273A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1440776A publication Critical patent/GB1440776A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)

Abstract

1440776 Cathode constructions PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 1 Oct 1973 [3 Oct 1972] 45772/73 Heading H1D An electron beam source comprises a field emission wire cathode 2, an anode 9, means for moving the wire to maintain its tip in a fixed position with a constant radius of curvature of 0À2 to 2 Á, and an auxiliary radiation source 8 which directs radiation on to the tip to heat it. The wire is supported and moved by two pairs of jaws 50, 51; 59, 60. Initially the lower jaws are open and the position of the tip determined by wire 58 which pulls 53 against springs 54, 55; 56, 57. When the limit of movement of support 53 is reached jaws 59, 60 close and the others open, support 53 returns to its original position and the process is repeated. The jaws are at right angles to ensure that the cathode is accurately positioned after a few operations. The jaws and position of support 53 are controlled by passing heating current through wires 62, 63 and 58. The current is determined by the difference between the measured and desired current to the first anode. This provides compensation for slowly varying parameters. Rapid adjustment is made using a shutter in the radiation path moved by a signal proportional to the current to the second anode. The device is used in scanning and transmission type electron microscopes, electron beam machining apparatus and microanalysers.
GB4577273A 1972-10-03 1973-10-01 Electron-beam apparatus Expired GB1440776A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7213355A NL7213355A (en) 1972-10-03 1972-10-03

Publications (1)

Publication Number Publication Date
GB1440776A true GB1440776A (en) 1976-06-23

Family

ID=19817064

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4577273A Expired GB1440776A (en) 1972-10-03 1973-10-01 Electron-beam apparatus

Country Status (10)

Country Link
US (1) US3864572A (en)
JP (1) JPS5241137B2 (en)
BE (1) BE805539A (en)
CA (1) CA992670A (en)
DE (1) DE2349352C3 (en)
FR (1) FR2201540B1 (en)
GB (1) GB1440776A (en)
IT (1) IT994357B (en)
NL (1) NL7213355A (en)
SE (1) SE384759B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6828565B2 (en) 2002-09-26 2004-12-07 Leo Elektronenmikroskopie Gmbh Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533310U (en) * 1978-08-24 1980-03-04
JPS58126376U (en) * 1982-02-20 1983-08-27 深沢　房次郎 door stopper
US4496881A (en) 1982-09-29 1985-01-29 Tetra Pak Developpement Sa Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
JPS59163506A (en) * 1983-03-09 1984-09-14 Hitachi Ltd Electronic beam measuring device
US4762975A (en) * 1984-02-06 1988-08-09 Phrasor Scientific, Incorporated Method and apparatus for making submicrom powders
US4829177A (en) * 1986-09-11 1989-05-09 Gregory Hirsch Point projection photoelectron microscope with hollow needle
JPH02134503A (en) * 1988-11-15 1990-05-23 Mitsubishi Electric Corp Scanning type tunnel microscope
DE3839707A1 (en) * 1988-11-24 1990-05-31 Integrated Circuit Testing METHOD FOR OPERATING AN ELECTRON BEAM MEASURING DEVICE
JPH03190044A (en) * 1989-12-19 1991-08-20 Ebara Corp Electron beam accelerator
US5015862A (en) * 1990-01-22 1991-05-14 Oregon Graduate Institute Of Science & Technology Laser modulation of LMI sources
ES2029426A6 (en) * 1991-03-22 1992-08-01 Univ Madrid Metal ion source with surface melting by application of an electric field.
DE69302084T2 (en) * 1992-09-07 1996-09-12 Stephan 72074 Tuebingen Kleindiek ELECTROMECHANICAL POSITIONING DEVICE.
RU2145146C1 (en) * 1998-03-31 2000-01-27 Оборин Андрей Павлович Method for converting power of electrons tunneled through polarized dielectric material
US6828996B2 (en) 2001-06-22 2004-12-07 Applied Materials, Inc. Electron beam patterning with a heated electron source
US6847164B2 (en) * 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
US11417492B2 (en) * 2019-09-26 2022-08-16 Kla Corporation Light modulated electron source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3388280A (en) * 1966-04-19 1968-06-11 Victor E. De Lucia Laser energized hot cathode type of electron discharge device
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6828565B2 (en) 2002-09-26 2004-12-07 Leo Elektronenmikroskopie Gmbh Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source

Also Published As

Publication number Publication date
DE2349352A1 (en) 1974-04-11
JPS4993798A (en) 1974-09-06
SE384759B (en) 1976-05-17
IT994357B (en) 1975-10-20
CA992670A (en) 1976-07-06
NL7213355A (en) 1974-04-05
DE2349352C3 (en) 1978-03-30
BE805539A (en) 1974-04-01
JPS5241137B2 (en) 1977-10-17
FR2201540A1 (en) 1974-04-26
FR2201540B1 (en) 1976-11-19
US3864572A (en) 1975-02-04
DE2349352B2 (en) 1977-07-21

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee